Series MY3A/3B Mechanically Jointed Rodless Cylinder/Basic Type ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63

Piston Speed Standard Stroke Bore size (mm) 16 25 40 63 20 32 50 Bore size (mm) Max. manufacturable stroke (mm) Standard stroke (mm) 80 to 500 mm/s Without stroke adjustment unit (MY3A) 80 to 1000 mm/s Without stroke adjustment unit (MY3B) 16, 20, 25 32, 40, 50 63 100, 200, 300, 400, 500, 600 700, 800, 900, 1000, 1200 1400, 1600, 1800, 2000 3000 80 to 1000 mm/s (16, 20 L unit: 80 to 800 mm

AMX-OM-Q015E

Membrane module kit and Dew point indicator kit Name Membrane module kit Dew point indicator kit Model IDG3 (Option : S) IDG-EL3 IDG3H (Option : S) IDG-EL3H IDG5 (Option : S) IDG-EL5 IDG5H (Option : S) IDG-EL5H IDG10 IDG-EL10 IDG-DP01 IDG10H IDG-EL10H IDG20 IDG-EL20 IDG20H IDG-EL20H IDG30A IDG-EL30A IDG50A IDG-EL50A IDG60LA, 60SA IDG-EL60LA IDG75LA, 75SA IDG-EL75LA IDG100LA, 100SA IDG-EL100LA

AMX-OM-Q018E

Membrane module kit (Element) and Dew point indicator KIt Name Membrane module set Dew point Checker set Model IDG3 (Option : S) IDG-EL3 IDG3H (Option : S) IDG-EL3H IDG5 (Option : S) IDG-EL5 IDG5H (Option : S) IDG-EL5H IDG10 IDG-EL10 IDG-DP01 IDG10H IDG-EL10H IDG20 IDG-EL20 IDG20H IDG-EL20H IDG30A IDG-EL30A IDG50A IDG-EL50A IDG60LA, 60SA IDG-EL60LA IDG75LA, 75SA IDG-EL75LA IDG100LA, 100SA

Soft Start-up Valve AV2000/3000/4000/5000 1

How to Find the Flow Rate (At air temperature of 20C) Choke flow: (P2 + 0.1)/(P1 + 0.1) ) 0.5 293 273 + t Q = 120 x S x (P1 + 0.1) x Subsonic flow: when (P2 + 0.1)/(P1 + 0.1) > 0.5 Q = 240 x S x (P1 P2)(P2 + 0.1) x 293 273 + t Q: Air flow rate [ /min (ANR)] S: Effective area (mm2) P1: Upstream pressure [MPa] P2: Downstream pressure [MPa] t: Air temperature [C] Note 1) Formulas above are

CYRx-OM0001H

(mm) (Nm) 6 7.3 0.02 100 10 6.0 0.05 100 15 4.5 0.15 200 20 3.7 0.20 300 25 3.7 0.25 300 32 3.1 0.40 400 Fig.6-2 Non-rotation accuracy direction 40 2.8 0.62 400 50 2.4 1.00 500 63 2.2 1.37 500 Note 1) Avoid usage where max. allowable moment is exceeded. In that case, use external guide together.

Electric Actuator Slide table ／ High Precision Type High performance Battery-less absolute encoder

20800 10400 Speed[mm/s] Pushing speed[mm/s] 20~30 10~30 5~30 2030 1030 2030 1030 actuator specification Max.acceleration/ 10 Horizontal Vertical 2] 5000 deceleration[mm/s Position repeatability [mm] 0.01 note4) 0.1 or less Lost motion [mm] Screw Lead [mm] 10 5 2.5 12 6 16 8 Impact / Vibration note5) 50/20 2] resistance [m/s Actuation type Ball screw (In-Line) Ball screw + Belt (Parallel)

BP1000

No gauge port No pressure gauge No code 0 V3 L 1 H 2 4 Ports -30 in.Hg to 30 psig -30 in.Hg to 60 psig -30 in.Hg to 100 psig -30 in.Hg to 160 psig 0 to 200 psig 0 to 400 psig -0.1 to 0.2 MPa -0.1 to 0.4 MPa -0.1 to 0.7 MPa -0.1 to 1.1 MPa 0 to 1.4 MPa 0 to 3 MPa Code Ports 2 ports 3 ports 2PW 3PW Porting Configuration e w q w q 1) Other range available.

0.4

Manifold base recommended dimensions Lead wire Base mounting hole 1 (IN) 2 (OUT) 1 (IN) 9.5 or more Valve mounting pitch 2 (OUT) A A M3 x 0.5 Thread depth 5 2 (OUT) port 1 (IN) port 3 M3 x 0.5 Thread depth 5 Electrical entry can be on the either side, right or left. 2 (OUT) port 3 11 11 40 Sectional view A-A (2:1) 4 4 46 or more RZ12.5 1 (IN) port 510 High Speed 2 Port Valve SX10 Series Control

ASD

Metric size Inch size With One-touch fitting 04 06 08 10 12 01 03 05 07 09 11 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT AS N ASP Bore size ASN M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 AQ ASV AK ASS Needle Valve/Flow Characteristics (Inlet Pressure: 0.5 MPa) ASR ASD230F ASD330F ASD430F ASF 100 200 400 Flow

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

10, 12 Tubing O.D. 1/8", 5/32" 1/8" 3/16", 1/4" 1/4", 5/16" 3/8" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 5/32" 5/16" 3/8" 3/16", 1/4" Controlled flow (Free flow) Flow rate (l/min (ANR)) 100 180 230 260 390 660 790 1580 1710 460 920 Effective area (mm 2) 1.5 2.7 3.5 4 6 7 10 12 14 24 26 Note) Flow rate values are measured at 0.5 MPa and 20C. 15-9-75 2 How to Order AS 2 2 1 1 F 01 06 S

Series HAW Water Cooled Aftercooler 1

Rc 1/2 Rc 11/2 Rc 2 3B flange Rc 11/4 Rc 1 32 67 78 Rc 1/2 Rc 1/2 Rc 3/4 Rc 3/4 Rc 1 Rc 3/4 Weight (kg) Coating color Drain valve (1 pc.) 9.7 11.5 59 95 High efficiency drain Drainage is efficiently removed by built-in drain separator. Visible outlet air temperature Outlet air temperature is easily checked by thermometer, resulting in easy maintenance.

Low Friction: Double Acting Single Rod Series CM2Q ø20, ø25, ø32, ø40

9 Rod seal NBR Basic (B) CM2QB Bore size Stroke (mm) Stroke range 1 to 300 1 to 300 1 to 300 1 to 300 S 65 65 67 91 N 15 15 15 21.5 Bore A 18 22 22 24 B2 26 32 32 41 D 8 10 12 14 H2 8 8 8 10 I 28 33.5 37.5 46.5 ZZ 119 123 125 157 NA 24 30 34.5 42.5 AL 15.5 19.5 19.5 21 E F 13 13 13 16 K 5 5.5 5.5 7 NN M20 X 1.5 M26 X 1.5 M26 X 1.5 M32 X 2 B1 13 17 17 22 G 8 8 8 11 MM M8 X 1.25 P 1/8 1/8 1

AZ1000

Single Stage Regulator for Ultra High Purity Low to intermediate flow Series AZ1000 For UHP gas delivery High inlet pressure type: Max. 3500 psig (24.1 MPa) Flow capacity Standard: to 30 slpm HF (option): to 120 slpm Body material: 316L SS Hastelloy internals available for corrosion resistance How to Order Port Number q w e r AZ10 S FV4 FV4 01 2PW Delivery pressure Delivery pressure 1 to

AP10PA

pressure isolated from process gas by two seals Body material: 316L SS secondary remelt High inlet pressure type: Max. 3500 psig (24.1 MPa) Flow capacity Standard: to 30 slpm HF (Option): to 120 slpm Ni-Cr-Mo alloy internals available for corrosion resistance 100 psig (0.69 MPa) outlet pressure achievable with 80 psig (0.55 MPa) control pressure or less How to Order Port Number q w e r AP10 S

2 Shock Absorber Series RB Specifications Model RB0805 RB0806 RB1006 RB1007 RB1411 RB1412 RB2015 RB2725 Basic type

2 Shock Absorber Series RB Specifications Model RB0805 RB0806 RB1006 RB1007 RB1411 RB1412 RB2015 RB2725 Basic type RBC0805 RBC0806 RBC1006 RBC1007 RBC1411 RBC1412 RBC2015 RBC2725 With cap Specifications Max. energy absorption (J) 0.98 2.94 3.92 5.88 14.7 19.6 58.8 147 Stroke absorption (mm) 5 6 6 7 11 12 15 25 Collision speed (m/s) 0.05 to 5.0 Max. operating frequency (cycle/min) 80 80 70

VFR5000-OMN0001

N.O. 9 VFR5000-OMN0001 VFR5000 Series/ DIN / 01T DIN 180 (A B AB ) COM ARBF5050 A B P 1.0MPa 1) 1.25-3.5M1.25Y-3L1.25-3M VFR5000 A-B+B+COM -COM AB+ B0.1~0.83MPa 2) VFR5100 A COM 5~60 () 3) VFR5200 A COM B Rc1/8 3 (kg) 0.83 A COM B VFR5 400 PA 44 38 32 (mm2) P1=0.7MPa;P2=0.5MPa S PB 38 40 31 5 AEA 90 (mm2) P2=0.5MPa S AEB 77 1) 0.9MPa 2) 3) .50 4) 2 5) P A B ARBF5000 ARBF5000

Booster Relay Series IL100

How to Order IL 100 02 Suffix Booster relay Nil Standard Thread type T High temperature (5 to 100C) Nil Rc N NPT* L Low temperature (30 to 60C) F G* * Semi-standard S Copper-free ST Copper-free/ High temperature (5 to 100C) Port size 02 1/4 03 3/8 SL Copper-free/ Low temperature (30 to 60C) Accessories Nil None B With bracket Standard Specifications Flow-rate Characteristics Supply pressure

AR Series Modular Type Regulator

A : Max. 3.5 AR20-A to AR25-A : Max. 4 AR30-A to AR40-06-A : Max. 8 Model Standard specifications Optional specifications Round type pressure Round type pressure gauge gauge (with color zone) Bracket mount Panel mount P1 P2 A B C D F J H J H J M N Q R S T U V W Y Z AR10-A M5 x 0.8 1/16 25 47.4 11 12.5 M18 x 1 12.5 26 26 25 28 30 4.5 6.5 40 2 18 18.5 AR20-A 1/8, 1/4 1/8 40 67.4 23.5 22

Fieldbus system (SI unit – PROFIBUS DP compatible)

Unused Power supply connector M12 5-pin (Plug) Example of connected cable: SMC EX500-AP00-S etc. Pin No. Description Function 1 SV24 V +24 V for solenoid valve. 2 SV0 V 0 V for solenoid valve 3 SW24 V +24 V for SI unit and Input Block 4 SW0 V 0 V for SI unit and Input Block 5 FE Ground -13No.EX-OME0014-F Maintenance Addition of Input Block Remove screws from End Plate.

ASP

Series ASP How to Order ASP 3 30F 01 06 S Made to Order Lubricant: Vaseline X12 Ex.) ASP330F-01-06S-X12 With seal Pilot check valve Body size Applicable tubing O.D.