Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Example) For 10-CQSXB25-47D, a 3mm spacer is installed inside a standard stroke 10-CQSXB25-50D cylinder.

5 Port Solenoid Valve SY Series

SY7120-02 SY7140-03 AS3001F-06 AS4001F-10 AS3001F-06 AN110-01 AN200-02 T0604 x 1 m T1075 x 1 m T1209 x 1 m T0604 x 1 m T1075 x 1 m T1209 x 1 m AS3001F-06 AS4001F-10 AS4001F-12 SY9120-03 SY9140-04 AS3001F-06 AS4001F-10 AS4001F-12 AN202-02 AN200-02 AN200-02 Conditions [When using SGP (steel pipe)] Conditions [When using SGP (steel pipe)] Body ported Base mounted Series CS1 SGP10A x 1 m AS420

SFOD-OMT0009CN

No.SFOD-OMT0009CN-B LEFS40 H A B [mm] 30 20 10 [mm] 1200 1000 1100 1200 1000 1100 1200 [mm/s] 500 500 410 340 250 200 170 [mm/s] 30 20 10 () [mm/s] 49 33 17 () 1.3 LES(H) LES(H)8 LES(H)16 LES(H)25 J K J K J K [mm] 8 4 10 5 16 8 [mm/s] 400 200 400 200 400 200 [mm/s] 20 10 20 10 20 10 () [mm/s] 25 13 27 14 30 15 () 1.4 LEP LEP*8 LEP*16 J K J K [mm] 8 4 10 5 [mm] 25 25 [mm/s] 300 250

In-line Air Filter

0 50 100 150 200 0 20 40 60 80 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] ZFC74/7D 6, 1/4" ZFC75/7E 8, 5/16" ZFC76/7F 10, 3/8" 0.3 MPa 0.3 MPa 0.3 MPa 30 30 30 Pressure drop [kPa] Pressure drop [kPa] Pressure drop [kPa] 0.1 MPa 0.1 MPa 0.1 MPa 20 20 20 0.5 MPa 0.5 MPa 0.5 MPa 0.7 MPa 0.7 MPa 10 10 10 0.7 MPa 0 0 50 100 150 250 200 0 0 0 100 200 300 400 500 0

LVQ

7 20 50.8 38.5 45 128 2 1 35 70 41 82 75 154.5 32 150 60 88 10 7 20 50.8 38.5 45 137.5 17-5-71 10 Series LVQ Dimensions With by-pass Double acting valve N M LVQ20 SMC C A B D (Max.

Information

Note 2) For interface use, supply 24 VDC 10% 150 mA using an external source. Note 3) The failure (ALM) is ON during normal conditions.

CRB1/Size: 10, 15, 20, 30

Q (Depth) 90 100 R P E(g6) A F(h9) B C D G1 G2 J K L M N Model RQ1 M3 (10) RQ2 3.4 (6) (Q3 M3 (5) CRB1BW15-lD CRB1BW15-lDE CRB1BW20-lD CRB1BW20-lDE CRB1BW30-lD CRB1BW30-lDE 5 11 9 14 10 15.5 25 10 25 13 25 14 0.004 0.012 0 0.043 29 5 34 12 20 9 18 4 1.5 6 10 0.5 M3 M4 (13.5) 4.5 (11) M4 (7.5) 0.004 0.012 0 0.043 36 6 42 14 29 10 20 4.5 1.5 7 10 0.5 M5 M5 (18) M5 (10) 5.5 (16.5) 0.005 0.014

Rotary Table/Vane Style Series MSU

Refer to pages 796 and 797 for detailed solid state auto switches with pre-wired connectors. 150 Series MSUA Rotary Table: High Precision Type Vane Style Specifications MSUA1 MSUA3 MSUA7 MSUA20 Model 2 Single vane Vane type Rotating angle 1 90 10 180 10 90 10 180 10 90 10 180 10 90 10 180 10 Fluid Air (Non-lube) Proof pressure (MPa) 1.05 1.5 5 to 60C Ambient and fluid temperature

Series CJ5-S ø10, ø16 Stainless Steel Cylinder

10 400 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 16 Symbol Specifications Manufacture of intermediate strokes at 1 mm intervals is possible.

Low Profile Slide Table Series MXF

Model Maximum allowable load mass Average speed Va (mm/s) A2 10 11 12 17 A3 6 10 10 11 A4 21 23 28 34 A5 21 23 28 34 A6 10 11 12 17 A1 6 10 10 11 MXF8 MXF12 MXF16 MXF20 0.6 1 2 4 Note) Note) MXF8 MXF12 MXF16 MXF20 1.0 Note) 16 mm for MXF8-10 only. 0.7 Table (4) Maximum Allowable Moment: Mmax (Nm) 0.5 0.4 Model Stroke (mm) 100 18.27 75 7.96 13.70 50 3.34 5.69 9.14 30 0.98 2.22 3.41 6.66

MXF

A2 10 11 12 17 Model A1 6 10 10 11 MXF8 MXF12 MXF16 MXF20 A3 6 10 10 11 A4 21 23 28 34 A5 21 23 28 34 A6 10 11 12 17 Graph (2) Allowable Moment Coefficient: Note) Note) MXF8 MXF12 MXF16 MXF20 1.0 Allowable Moment Coefficient: Note) 16 mm for MXF8-10 only. 0.7 Stroke (mm) Table (4) Maximum Allowable Moment: Mmax (Nm) 0.5 0.4 Model 10 0.56 100 18.27 75 7.96 13.70 50 3.34 5.69 9.14 30 0.98

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Free Free E Free Pitch dimensions (without magnet) (mm) Bore Size E 4 6 8 10 10 13 13 13.5 Free Easy seal replacement With front boss (h9) Seals can be replaced easily by removing rod cover. Centering can be done easily. Rod cover Tolerance h9 Clean room series Series 10-, 11-CUJ Two auto switches can be installed even for 4mm strokes.

Dual Rod Cylinder/High Speed Specification Type Series CXS-XB19

x 0.8 thread depth 4.5 (piping port) IN 7 2-M3 x 0.5 (through) 13 + ST 2-M5 x 0.8 thread depth 4.5 (piping port) (same on reverse side) 10 2-M3 x 0.5 thread depth 4.5 (same on reverse side) 4 8 6 11 22.5 (13) (10 + 1/2ST) 4 Model ST 13 + ST 45 + ST 58.5 + ST 10 + 1/2ST CXS6-10-XB19 10 23 55 68.5 15 CXS6-20-XB19 20 33 65 78.5 20 CXS6-30-XB19 30 43 75 88.5 25 CXS6-40-XB19 40 53 85 98.5 30

High Power Cylinder:

Composed effective area So (mm2) 6 2000 h=0.7 10 1/4, 3/8 7.5 2500 REC 0.5 10 10 1/4, 3/8 0.1 0.3 9 3000 RHC 6 1/4, 3/8 2.5 500 8 1/4, 3/8 MTS 5 1000 0 1,000 2,000 3,000 25 (1/4) 10 1/4, 3/8 Max. speed Vmax (mm/s) 7.5 1500 CC Graph 3:32 10 1/4 10 2000 12.5 15 2500 3000 30 1/4 1/4 h=0.7 6 10 1/4, 3/8 20 4 500 0.5 0.1 0.3 10 32 (3/8) 10 1/4, 3/8 8 1000 0 1/4, 3/8 3/8 3/8 3/8 12 16 20 24 1500

JXCx-OMY0004

Outlines of Product 7 2.1 Features 7 2.2 How to Order 8 2.3 Product configuration 9 2.4 Start up procedure 10 (1) Checking the contents of the package 10 (2) Mounting the controller 10 (3) Wiring and Connection 10 (4) Supply of power 10 (5) Configuration 11 (6) Setup of the operation parameters 11 (7) Test run 11 3.

LA-OMP0023

LAT3LAT3MLAT3F600 350 700 Load weight1000g Load weight1000g Load weight1000g 300 600 Positioning time [ms] Positioning time [ms] Positioning time [ms] [ms] 500 [ms] [ms] 700g 700g 700g 250 500 400 500g 500g 500g 200 400 300 150 300 200 100 200 300g 300g 300g 100 100g 100g 50 100 100g 0g 0g 0g 0 0 0 0 10 20 30 40 50 0 5 10 15 20 25 30 0 10 20 30 40 50 Total travel distance [mm] Total travel

Fieldbus system PROFINET compatible SI Unit

(between FE and all accessible terminals) Insulation resistance 10 M ohm or more (500 VDC is given between FE and all accessible terminals) Ambient temperature Operation: -10 C to 50 C Storage: -20 C to 60 C Ambient humidity 35% to 85% RH (non-condensing) 10 Hz to 57 Hz (constant amplitude) 0.75 mm 57 Hz to 150 Hz (constant acceleration) 49 m/s2 2 hours for each direction X, Y and Z (complies

VZ100/300/500

Air Fluid Operating pressure range (MPa) 0.15 to 0.7 Internal pilot Ambient and fluid temperature (C) Response time (ms) (at the pressure of 0.5 MPa) (1) 10 to 50 (No freezing. Refer to page 4-18-4.) 20 or less Max. operating frequency (Hz) 10 Flow characteristics Refer to the table below.

Speed Controller: Standard Type Series AS In-line Type

Suitable screw torque (Nm) Body size M3 0.07 M5 0.3 1/8 1 1/4 1.5 3/8 4 1/2 10 15-8-6

JXCx-OMY0008

Outlines of Product 7 2.1 Features 7 2.2 How to Order 8 2.3 Product configuration 9 2.4 Start up procedure 10 (1) Checking the contents of the package 10 (2) Mounting the controller 10 (3) Controller Setting 10 (4) PLC set up 10 (5) Wiring and Connection 10 (6) Supply of power 11 (7) Configuration 11 (8) Setup of the operation parameters 12 (9) Test run 12 3.