0.5

level: 1 Air flow level: 1 10 10 10 10 Air flow level: 10 5 Air flow level: 10 5 Air flow level: 10 Air flow level: 10 5 5 Air flow level: 10 Air flow level: 10 5 5 0 0 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 0 0 0 0 Installation distance [mm] 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 Installation distance [mm] 0 200 400

Ionizer

Power supply 24 VDC B B B Ground with a ground resistance of 100 or less without connecting the DC1 () lead (Blue) of the power supply cable to the power supply 0 V. Red A A +24 V Black Blue Charged object Charged object 0 V Reduced-wiring Fieldbus System F.G. (mm) Ground with a ground resistance of 100 or less. A B When using the autobalance sensor (body-mounting type) 10 20 20 40 3.

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators Relief port 2 x M5 x 0.8 2 x P through M5 x 0.8 R GC GB E GA MM D C J 2.8 2 x P through A 4 x T counterbore E 0.5 B H S Z (mm) 6 depth 4.8 5 S 10 15 20 25 30 5 Z 10 15 20 25 30 Bore size B C D E GA GB GC H J MM P R T A 13 22 3 23 16 15 13 10 3.2 7 M3 x 0.5 31 10 7 6 10 15 24 4 24 33.5 16 15.5 16 11 M4 x 0.7 3.2 9 6 depth 5 64 69 74 79 84 89

Suction cups with flange

ZPG13C-7A-X2 7 7 7 7 ZP13C ZP 16 C ZPG16C-7A-X2 7 7 7 8 ZP16C ZP 20 C ZPG20C-7A-X2 9 10 10 11 ZP20C ZPT3-7A-X2 ZP 25 C ZPG25C-7A-X2 10 10 10 11 ZP25C ZP 32 C ZPG32C-7A-X2 10 11 11 12 ZP32C ZP 10 B ZPG10B-7A-X2 7 7 7 8 ZP10B ZPT2-7A-X2 ZP 13 B ZPG13B-7A-X2 7 8 8 8 ZP13B ZP 16 B ZPG16B-7A-X2 8 8 8 9 ZP16B ZP 20 B ZPG20B-7A-X2 11 11 11 13 ZP20B ZPT3-7A-X2 ZP 25 B ZPG25B-7A-X2 11 12

4-channel Flow Monitor ( compatible)

Normal output Reversed output -100No.PF-OMA1011-A Specifications Model PFG20# series PF2A5 PF3W5 PF2D5 Applicable flow sensor 10 50 11 21 51 04 20 40 11 25 04 20 40 Rated flow range 1 to 10 5 to 50 10 to 100 20 to 200 50 to 500 0.5 to 4 2 to 16 5 to 40 10 to 100 50 to 250 0.4 to 4 1.8 to 20 4 to 40 L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min 0.35 to 1.7 to

Refrigerated Air Dryer

B IDFB4E to 15E A Power cable outlet 0.7 [17 mm] Grommet with membrane Signal cable outlet 0.7 [17 mm] Terminal block (Wire diameter 0.4 [9 to 11mm]) Grommet with membrane Power cable outlet 0.7 [17 mm] IDFB4E to 11E_Terminal block C D A B Terminal block Dimensions Unit: inch [mm] A B C D Model B B 9.0 [230] 2.6 [67] 7.0 [179] 1.3 [32] IDFB4E, 6E, 8E, 11E A Power cable outlet 0.7 [17 mm]

MGC

20.5 (28.5) A B 15 (22.5) A B 17.5 (25.5) A B 19.5 (27.5) A B 18 (26) A B 16 (24) B 20 27.5 27 24.5 31 25.5 27.5 29 27 24 30 21.5 (29.5) 20.5 (28.5) 15 (22.5) 17.5 (25.5) 19.5 (27.5) 18 (26) 16 (24) 25 30 29.5 27 31 25.5 27.5 29 27 24 30 22.5 (30.5) 21.5 (29.5) 15.5 (23.5) 18.5 (26.5) 20.5 (28.5) 19 (27) 17 (25) 32 33.5 33 30.5 32 26.5 28.5 30 28 25 31 25 (34) 24 (33) 18 (27) 21 (30) 33 (

Cost effective and clean looking, series AR regulators offer various pressure range settings to accommodate most applications. The locking adjustment knob prevents accidental setting changes. The modular design of the AR series connects with other SMC air preparation equipment.Modular type regulator, Optional embedded pressure gauge , Available with built-in backflow mechanism , Knob is made

PFA/PFW

Panel adapter B ZS-22-02 Thread type Piping port size Rc NPT G Nil N F 01 02 1/8 1/4 Specifications PFA301-m PFA300-m Model Specifications Note 1) 1 to 10, 5 to 50l/min (0.04 to 0.35, 0.18 to 1.77SCFM) Flow rate range measurement & setting Minimum setting unit 1% of maximum flow rate range Model PFA510-m PFA550-m Real-time flow rate l/min, CFM x 10-2 Display units Measured fluids Dry air,

Air Cylinder CP Series Cylinder Positioner Assembly

Clevis Y-O5A Y.O5A Y-O8A Y-1OA Fod Clevis Pin CDP.3 CDP-3 CDP-5 CDP-6 Rod Nul NT.05 NT-05 NT.O8 NT-10 Mounlinq Brackel Clevis Pln CDP.3 CDP.4 CDP.6 CDP-7 SERIES CP CYLINDER POSITIONING ASSEMBLY DIMENSIONS CPA1 B N vr/o Boot with Boot' BORE B D E K L M MM N s H z.

CG5-S

100 14 10 29 20 71 16 110 M12 x 1.75 10 26 8 M26 x 1.5 131 212 100 to 750 Flange brackets and plug bolts are installed before shipment from factory.

Cost effective and clean looking, series AR regulators offer various pressure range settings to accommodate most applications. The locking adjustment knob prevents accidental setting changes. The modular design of the AR series connects with other SMC air preparation equipment.Modular type regulator, Optional embedded pressure gauge , Available with built-in backflow mechanism , Knob is

ZL3-OM00801

N06 NPT3/4 5/16(inch) N04 2xNPT1/2 6) 5 DC24V *1G JIS B0202 ISO1603 ISO1179 8) Z 7 L L 0.3(m) 11) A NPN LO B PNP M M 0.3(m) MO 12) 9) M SI (kPa) D P (:psi) E 10) 14 GN (G) B G *7ZL212 27mm ZL212 (2 /1 , 4 ) E (2 ) F (2 ) V (1 ) 13 G 2m) W (2m) 5 No.ZL3-OM00801-A 2. 2.1 (1/P) (2/V) ZL3 ZL6 (3/E) // / (G) (2/V) 2.2 ZL6 1 ZL6 (ZL6-SC1-A) 2), 6 No.ZL3-OM00801-A 3. 3.1

Large Bore Compact Cylinder Series CQ2

Z Y69BZ Auto switches marked with a "" symbol are produced upon receipt of order.

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

E B ,rt1 0f $ [,r PEEAA P B EAPE +q--dz 3 position Closed centr/Exhaust centet/Presute cenler .1&t*080 PEEA A P B EBPE Main Parts No.

-fl Seies

E B ,rt1 0f $ [,r PEEAA P B EAPE +q--dz 3 position Closed centr/Exhaust centet/Presute cenler .1&t*080 PEEA A P B EBPE Main Parts No.

AC Servo Motor Driver (MECHATROLINK-III type)

C L A B C Series Lead 5(2.86) (Including pulley 20 10 5 20 10 5 (Pulley ratio 4/7) ratio) Parameter *1,*2 Para.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Operating: 0 to 50C, Stored: 10 to 60C (with no freezing and condensation) Resistance Operating or Stored: 35 to 85%RH (with no condensation) 10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, in each X, Y, Z direction for 2 hrs., whichever is smaller.

VXZ

Fluid Table (1) Rated Voltage-Electrical Entry-Electrical Option Standard specifications Option (1) Made to Order (2) Water (standard) Turbine oil High temperature water (D, E) Air X500B Vacuum (up to 1.3 x 10 2 Pa) X500B For pure water X500 G C Class B D, T Class H G, C T S Note) S L, Z L, Z S Note) Surge voltage suppressor is attached in the middle of lead wire.

IDX-OM-V020

Option L . 10-1 10.1 SAFETY INSTRUCTIONS FOR USE . 10-1 10.2 SPECIFICATIONS . 10-1 10.3 MOUNT THE HEAVY DUTY AUTO DRAIN . 10-2 10.4 MAINTENANCE . 10-2 Chapter 11 Option R .11-1 11.1 SAFETY INSTRUCTIONS FOR USE . 11-1 11.2 EARTH LEAKAGE BREAKER SPECIFICATION . 11-1 11.3 CONNECTION OF POWER SUPPLY . 11-2 Chapter 12 Option T . 12-1 12.1 SAFETY INSTRUCTIONS FOR USE . 12-1 12.2 OPERATION / ERROR