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3 2 Chapter 4 Maintenance 4 1 Daily inspection . 4 1 4 2 Periodical Maintenance . 4 1 4 2 1 Cleaning of ventilation grille (suction grille) . 4 1 4 2 2 Service parts . 4 1 4 2 3 Cleaning of the bowl assembly . 4 2 Chapter 5 Troubleshooting . 5 1 5 1 Cause and countermeasure of errors . 5 1 5 2 How to reset the thermal relay and high pressure switch . 5 3 Table of Contents 1 Air Dryer Table

1 t o AQ !0 u !1 t o !7 ASV AK Component Parts Description Material Note Description No. Note Material No. ASS NBR U seal Body A PBT q !1 NBR U seal Elbow body PBT w !2 ASR POM, Stainless steel (3) Cassette Handle Black PBT (1) e !3 NBR Seal Body B Electroless nickel plated Brass r !4 ASF NBR O-ring Body B Electroless nickel plated Brass t !

High Suction Vacuum Work 1 Work 2 Work n Max.A ON point OFF point Min.B Not adsorption Work 1 Work 2 Work n Atmosphere A B 4 A B 4 = A ON point Max.A: Maximum pressure value when work piece is vacuumed. Min.B : Maximum pressure value when work piece is not vacuumed.

2 The class indicates the compressed air purity according to ISO 8573-1:2010 (JIS B 8392-1:2012) and indicates the maximum purity class which can be obtained using that system.

VNA VNA 2 1 2 1 2 1 VNA VNA D-X Technical Data 1177

IDX-OM-Y002 Contents Contents Chapter 1 Safety . 1-1 1.1 Before Using the Air Dryer . 1-1 1.1.1 Danger, Warning and Caution in This Manual . 1-1 1.2 Hazard Classifications & Position of Hazard warning Labels . 1-2 1.2.1 Hazard of Electricity . 1-2 1.2.2 Hazard of Hot Surface . 1-2 1.2.3 Hazard of Compressed Air Circuit . 1-2 1.2.4 Cautions for usage . 1-3 1.2.5 Cautions for refrigerant .

A A , $TJ-b SZI;TF P R P B Model '.6NPTF 0.26 (130) 0 4 8 .,6. ].;NPTF with 0.26 (1 Air and inert 20-100 PSI (15/cm'1 pressure vAc-1 l0Torr External pilot pressure 20-'100PSl(15 "7ks{/cm'?) Max. 120"F (50'C) 20ms or less (7OPS|) 600 cpm Nonlocking push type, (std-) Slotted locking type, Knob type (opt.)

C D E F G H J K L M N P Q R S 1B union union 1 2 B 1 HA AT ID AMG AFF AM Misc. 14-15-3

PFMV5 Specifications PFMV505 PFMV510 PFMV530 PFMV505F PFMV510F PFMV530F Model Dry air, N2 (JIS B 8392-1 1.1.2 to 1.6.2: 2003) Applicable fluid Note 1) 0 to 0.5 l/min 0 to 3 l/min 0 to 1 l/min 0.5 to 0.5 l/min Note 2) 1 to 1 l/min Note 2) 3 to 3 l/min Note 2) Rated flow range (Flow rate range) 2 F.S. or less Note 3) Repeatability Pressure characteristics (Based on 0 kPa Note 4)) 2% F.S. or

--CNPN (1 output) + Analogue (4 to 20 mA) output type PFMB7--DMaximum applied voltage: 28 V Maximum load current: 80 mA Internal voltage drop: 1 V or less C: Analogue output: 1 to 5 V Output impedance: 1 k D: Analogue output: 4 to 20 mA Maximum load impedance: 600 NPN (1 output) + External input type PFMB7--GMaximum applied voltage: 28 V Maximum load current: 80 mA Internal voltage drop:

Response time 1 s or less : Other specifications are equal to standard product. Analogue output A B Voltage output 1 V 5 V Current output 4 mA 20 mA Rated flow range Model Min.

Z Standard Specifications AR40 AR40-06 AR50 AR60 1 AR30 Model Port size Fluid Proof pressure Maximum operating pressure Regulating pressure range Gauge port size Relief pressure Ambient and fluid temperature Construction Weight (kg) 1 2 1 4 3 8 , 1 4 3 8 , , 4 3 3 4 1 , Air 1.5MPa 1.0MPa 0.05 to 0.85MPa 1 4 1 8 1 4 1 4 1 4 Note 1) Set pressure + 0.05MPa (at relief flow rate of 0.1l/min(ANR

1 4.5 4.5 4.5 4.5 1 1 4.5 4.5 4.5 4.5 1 1 6.5 6.5 6.5 6.5 0.5 0.5 3 3 1 1 Hysteresis MHF2-8D D-F9(V) D-F9W(V) MHF2-8D1 Red ON Green ON MHF2-8D 0.5 0.5 1 MHF2-8D2 MHF2-12D 0.5 0.5 1 MHF2-16D 0.5 0.5 1 MHF2-12D MHF2-20D 0.5 0.5 1 MHF2-12D1 Auto Switch Mounting MHF2-12D2 Insert the auto switch into the switch mounting groove in the air chuck in the direction shown below, and after setting

4 4 3.4 98 3 6.5 depth 3.4 RB0805X552 CY1F15 CY1F15 +0.012 0 M5 x 0.8 1 4 4 3.4 105 3 6.5 depth 3.4 RB0805X552 CY1F25 CY1F25 +0.012 0 -X Rc 1/8 1 5 7.5 5.5 140 NPT 1/8 G 1/8 5 9.5 depth 5.4 RB1006X552 Note 1) When adjusting the stroke, keep the T dimension within a 0 to 2 mm range.

ZQ-OM01501 How to order ZQ ZSV A M W 2 A (1) (2) (3) (4) (1) Vacuum pressure switch Symbol Pressure range [kPa] output specifications A -100 to 100 NPN1 output + Energy Saving Function B PNP1 output + Energy Saving Function (2) Vacuum pressure switch unit specifications Nil Note 1 With unit switching function M Fixed SI unit [kPa] Note 1 ) The unit conversion function is not for use in Japan

Note 1) ISO 4414: Pneumatic fluid power--General rules relating to systems. Note 2) JIS B 8370: General Rules for Pneumatic Equipment Warning 1. The compatibility of pneumatic equipment is the responsibility of the person who designs the pneumatic system or decides its specifications.

H 4 S y m b o l Initial power / Power consumption (W) 100 VAC 200/40 200/50 400/100 200 VAC 800/40 800/50 800/100 Heater assembly number XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 XLA25-60S-3 No. of heater assemblies 1 pc. 1 pc. 1 pc. 1 pc.

(mm) M Effective area (mm 2) Weight (g) A L2 L1 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 DL04-01 15 3.5 23 DL04-02 17 19 4 10 23.5 19.6 10 30 DL06-01 25 17 Applicable tubing 19.6 10 23.5 DL06-02 16 19 31 14 6 9 12 DL06-03 22 53 26.5 24.5 21.6 22.6 24.5 25.8 24.5 29.4 29.6 30.3 29.4 91 Reference dimensions after R thread installation.

IODD file 1 D-MP025A/B/C SMC-D-MP025-ymmdd-IODD1.1 2 D-MP050A/B/C SMC-D-MP050-ymmdd-IODD1.1 3 D-MP100A/B/C SMC-D-MP100-ymmdd-IODD1.1 4 D-MP200A/B/C SMC-D-MP200-ymmdd-IODD1.1 : "ymmdd" indicates the file preparation date. y is the year, mm is the month and dd is the date.

d A IZN10E-01 02m06 6 3.5 IZN10E-01 02m07 1/4" 7 34.7 26 2 x M3 x 0.5 thread depth 10 11 291 *1 Dimension of the resin part in described in the Mounting Warning note 3 (page 24). 18.31 One-touch fitting (Elbow) IZN10E-mm 16 17 D B C Applicable tubing O.D. d 180 [mm] Model d B C D IZN10E-mm16 6 22 16 11.5 IZN10E-mm17 1/4" 24.5 18.5 12 Female threads for piping (Rc1/8) IZN10E-11mm 14 Rc1/