ModelMin. operating pressure differential (MPa)Max. operating pressure differential (MPa)Flow characteristicsMax. system pressure (MPa)Weight (g) ACDCCbCv1/2 (15A)15VXZ2240-04--1.00.723.00.346.01.5760
ModelMin. operating pressure differential (MPa)Max. operating pressure differential (MPa)Flow characteristicsMax. system pressure (MPa)Weight (g) ACDCCbCv1/2 (15A)15VXZ2240-04--1.00.723.00.346.01.5760
Regulator AR30 to 60 AR30 Option Thread type Port size Symbol Nil B E G P Applicable models AR30 to 60 AR30 to 60 AR30 to 60 AR30 to 40 Contents With bracket With square embedded type pressure gauge (with limit indicator) Round pressure gauge (with limit indicator) Panel mount (with set nut) Metric thread (M5) Rc NPT G Nil Note 1) 1 4 02 03 04 06 10 N F 3 8 Note 2) 1 2 3 4 1 Note 1) Bracket assembly is not
Ll 3.66 (93) 4.96 n26) (tss) (1e2) 8.86 (225) t0.t6 (258) 11.46 (2er ) 12.76 (324) 14.06 (357) < ):3 position n:with indicator light and surge voltage suppreseor L, 315 (80) 4.45 (fl3) 7.O5 (17e) 8.35 (a2) 9.O5 (245) r0.94 (2781 12.24 (3t1) 13.54 (344) Series VFSOOO Series NVFSOO Sub-Base Mounted/Dimensions inch(mm) NVF5144 Grcmmet/NVF5144-OG clommt Terminal/ilvF5l/t4-OE ( ):NVF5i44-OG-04
Nil C 0.4 to 4 l/min 1.8 to 20 l/min 4 to 40 l/min 04 20 40 The cable and connector are shipped unassembled.
B C d H MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M NTJ-015A NT-015A NT-02 NT-03 NT-04 8 9.2 6 15.5 5 9.2 M5 x 0.8 4 10 20.5 10 8 8 9.2 8 16.5 6 11.5 M6 x 1.0 5 16 22.5 16 10 8 9.2 10 18.5 6 15 M8 x 1.25 5 20 24.5 20 13 10 11.5 12 22.5 11 19.6 M10 x 1.25 6 25 33.5 25 17 14 16 16 28.5 12 25.4 M14 x 1.5 8 30, 40 40.5 30, 40 22 Applicable bore size (mm) Part no.
nylon tubing Name plate and caution plate for bowl in imperial units (PSI, F) Applicable model AL30 to 60 AL30 to 60 AL30 to 60 AL10 to 60 AL10 to 60 AL10 to 60 AL30 to 60 AL20 AL10 to 60 AL30 to 60 AL10 to 60 Body size 10 20 30 40 50 60 Thread type Metric thread (M5) Rc NPT G Nil N F AL20 Port size Body size Symbol Port size M5 1/8 1/4 3/8 1/2 3/4 1 10 20 30 40 50 60 Note 2) M5 01 02 03 04
Accessories AW40 Applicable models AW30, 40 AW30, 40 AW30, 40 AW30, 40 AW30, 40 AW30, 40 Symbol Nil B C D E G P Contents With bracket Float type auto drain (N.C) Float type auto drain (N.O) With square embedded type pressure gauge (with limit indicator) With round pressure gauge (with limit indicator) Panel mount (with set nut) Direct operated type, Relieving type Note 1) Port size 02 03 04
Switch with left hand mounting A t r t fit gI Switch with right hand mounting t[ n-r ffi I+l+| + t 2 switches With right hand moun0ng D6A&1 D-8G&2 Rotation Speed Range Model 20--{.03-0.3sec/90' Model 30-O.04-0.3sec/90" lf a rotation speed is used slower than 0. 3sec/90" sticking may occur. _n_ | d l l"l l l n , t d .
1 2 3 4 Clean room class 1000 Accumulated pulse output Accumulated pulse output Output 1 Switch output Switch output Shipment Accumulated pulse output Accumulated pulse output Output 2 Switch output Switch output For Deionized Water and Chemicals Digital Flow Switch Series PF2D How to Order PF2D5 13 20 1 Remote Type Sensor Unit Flow rate range 0.4 to 4l/min 1.8 to 20l/min 4 to 40l/min 04
catalog N5-Gl l\,lodular type FFL Combinalion Recommended for control of pilot signal: NIT 200 ' OO 2G Elecko-pneumalic regulator Ref. catalog N8-01 HOW TO ORDER x x T I I L aterial I t NIL NBB (Buna) I S Copper Free Extarnal I TFPM (Viton) High Tamperature tP300 42 0 -T-T | l t l Supply & Output Preasure Gauge I t00 no gauge Operution 01 2kgllcrf r bsingte Acring 02 3 kgf/cm'z 03 10kg /cnf 04
multiple pressures IRV 000 1 01 Work piece Vacuum regulator Body size 1 2 3 IRV1000 type IRV2000 type IRV3000 type Leak tester Pressure transducer Solenoid valve Solenoid valve Work piece Vacuum pump IRV Filter Thread type Nil N F Rc NPT G Optional Inspection equipment Port size Solenoid valve Application IRV Work piece Tank Vacuum pump Filter Symbol Bore IRV1000 IRV2000 IRV3000 01 02 03 04
Port size Body size Thread size Port thread Symbol N F Rc NPT G 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 An interface part is required if a spacer or spacer with bracket shown in the table below is attached to a modular FRL.
N 3 4 2 1 VH422-N02 to N06 VH432-N02 to N06 2 (Position) Flow direction 2 Flow direction 4 Flow direction 2 Flow direction 4 90 45 45 3/4" 185(10.2) 1 2 21.34 (9.7) VH6 VH600-N06,N10 3 (Closed center) 3/4", 1" 1" 194(10.5) 3 4 2 How To Order Series VH How to Order VH 2 0 1 02 N Options Hand valve R In/Out Reverse Valve model (Cv) Port size (NPT) 2 3 4 6 (0.4) (1.1) (3.2) (10.5) 02 03 04
Base Mounted Wiring: Non Plug-in Individual Lead Wire Entry, Stations: 04 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 3/4, Thread: -, Exhaust Cleaner Mounting Direction: -
Base Mounted Wiring: Plug-in w/Terminal Block, Stations: 04 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 1/2, Thread: -, Exhaust Cleaner Mounting Direction: -
Base Mounted Wiring: Plug-in w/Terminal Block, Stations: 04 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 3/4, Thread: Rc, Exhaust Cleaner Mounting Direction: D Side, D Side Mounting
Base Mounted Wiring: Non Plug-in Individual Lead Wire Entry, Stations: 04 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 1/2, Thread: NPTF, Exhaust Cleaner Mounting Direction: -
Base Mounted Wiring: Base Mounted Plug-in w/Multi-connector on D Side, Stations: 04 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 3/4, Thread: -, Exhaust Cleaner Mounting Direction: -
Base Mounted Wiring: Base Mounted Plug-in w/Multi-connector on D Side, Stations: 04 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 1/2, Thread: NPT, Exhaust Cleaner Mounting Direction: -