Stations: 10 (10 Stations), Piping: U (U Side: Open; D Side: Closed), Thread Type: N (NPT), Supply Unit Components: Flow Adj. Valve: None; Stop Valve: None, Return Unit Flow Switch: 5 (Remote Sensor Unit), Return Unit Flow Range: 04 (0.5 to 4 L/min), Return Unit Components: S (w/Flow Adj.

, Liquid contact parts material: [Resin] PBT, Display: -, Protection Structure: IP65, Unit Specifications: SI unit fixed, Lead Wire: Lead wire with M12 connector 3 m, Rated Pressure Range: -50 kPa to 0.5 MPa, Rating Flow Range(L/min): 1 to 10, Sensor Type: -, Option: -, Output Specification: PNP open collector 2 outputs, Accuracy(%F.S.): ±5% F.S., Contact Configuration: -, CE compliant: -

, Liquid contact parts material: [Resin] PBT, Display: -, Protection Structure: IP65, Unit Specifications: With unit conversion function, Lead Wire: Lead wire with M12 connector 3 m, Rated Pressure Range: -50 kPa to 0.75 MPa, Rating Flow Range(L/min): 10 to 100, Sensor Type: -, Option: -, Output Specification: NPN open collector 2 outputs, Accuracy(%F.S.): ±5% F.S., Contact Configuration:

Cylinder (Tube) Inner Diameter(φ): 32, Stroke(mm): 10, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, Operating Pressure(MPa): 0.05～1, Cushion: None, Specification: Without built-in magnet, Support

Cylinder Inner Diameter: D(φ): 10, Stroke: L(mm): 10, Cylinder Operation Method: Single Acting, Spring Return, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -20～80, Operating Pressure(MPa): 0.08～1.0, Specification: Without magnet, Support bracket: None, Body Options: Basic Integrated

Cylinder Inner Diameter: D(φ): 10, Stroke: L(mm): 10, Cylinder Operation Method: [Single Action Retraction] Single Acting, Spring Extend, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -20～80, Operating Pressure(MPa): 0.08～1.0, Specification: Without magnet, Support bracket: None,

Cylinder Inner Diameter: D(φ): 10, Stroke: L(mm): 10, Cylinder Operation Method: Single Acting, Spring Return, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -20～80, Operating Pressure(MPa): 0.08～1.0, Specification: Built-in magnet, Support bracket: None, Body Options: Basic Integrated

Cylinder (Tube) Inner Diameter(φ): 32, Stroke(mm): 10, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, Operating Pressure(MPa): 0.05～1, Cushion: None, Specification: Built-in magnet, Support bracket:

l/min?

10% or less)100 mA or lessIP65Operating: 0 to 50C, Stored: ?25 to 85C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M or more (500 VDC Mega) between external terminal and case.10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, whichever is smaller.490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?

10% or less)100 mA or lessIP65Operating: 0 to 50C, Stored: ?25 to 85C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M or more (500 VDC Mega) between external terminal and case.10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, whichever is smaller.490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?

10% or less)100 mA or lessIP65Operating: 0 to 50C, Stored: ?25 to 85C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M or more (500 VDC Mega) between external terminal and case.10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, whichever is smaller.490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?

(Specifications: Maximum load current of 10 mA; Maximum applied voltage of 30 V)Voltage output 1 to 5 VLinearity: ?5% F.S. or less; allowable load resistance: 100 k or more.Current output 4 to 20 mALinearity: ?5% F.S. or less; allowable load resistance: 300 or less with 12 VDC, 600 or less with 24 VDC12 to 24 VDC (ripple ?10% or less)20 mA or lessIP65Operating: 0 to 50C, Stored: ?

m]Max. screw-in depthL [mm]LEHS20(L)M6 x 15.010

(Specifications: Maximum load current of 10 mA; Maximum applied voltage of 30 V)Voltage output 1 to 5 VLinearity: ?5% F.S. or less; allowable load resistance: 100 k or more.Current output 4 to 20 mALinearity: ?5% F.S. or less; allowable load resistance: 300 or less with 12 VDC, 600 or less with 24 VDC12 to 24 VDC (ripple ?10% or less)20 mA or lessIP65Operating: 0 to 50C, Stored: ?

s (3cP) or lessKarman vortex1.8 to 20 l/min Note 1)0 to 1 MPa1.5 MPa0 to 90C?2.5% F.S. or less (at 25C water)?1% F.S. or less (at 25C water)?5% F.S. or less (0 to 50C, based on 25C)Pulse output, N channel, open drain, output for display unit PF2D 300/301(Specifications: Maximum load current of 10 mA; Maximum applied voltage of 30 V)Voltage output Note 5) 1 to 5 VLinearity: ?

(Specifications: Maximum load current of 10 mA; Maximum applied voltage of 30 V)Voltage output 1 to 5 VLinearity: ?5% F.S. or less; allowable load resistance: 100 k or more.Current output 4 to 20 mALinearity: ?5% F.S. or less; allowable load resistance: 300 or less with 12 VDC, 600 or less with 24 VDC12 to 24 VDC (ripple ?10% or less)20 mA or lessIP65Operating: 0 to 50C, Stored: ?

(Specifications: Maximum load current of 10 mA; Maximum applied voltage of 30 V)Voltage output 1 to 5 VLinearity: ?5% F.S. or less; allowable load resistance: 100 k or more.Current output 4 to 20 mALinearity: ?5% F.S. or less; allowable load resistance: 300 or less with 12 VDC, 600 or less with 24 VDC12 to 24 VDC (ripple ?10% or less)20 mA or lessIP65Operating: 0 to 50C, Stored: ?

(Specifications: Maximum load current of 10 mA; Maximum applied voltage of 30 V)Voltage output 1 to 5 VLinearity: ?5% F.S. or less; allowable load resistance: 100 k or more.Current output 4 to 20 mALinearity: ?5% F.S. or less; allowable load resistance: 300 or less with 12 VDC, 600 or less with 24 VDC12 to 24 VDC (ripple ?10% or less)20 mA or lessIP65Operating: 0 to 50C, Stored: ?

(Specifications: Maximum load current of 10 mA; Maximum applied voltage of 30 V)Voltage output 1 to 5 VLinearity: ?5% F.S. or less; allowable load resistance: 100 k or more.Current output 4 to 20 mALinearity: ?5% F.S. or less; allowable load resistance: 300 or less with 12 VDC, 600 or less with 24 VDC12 to 24 VDC (ripple ?10% or less)20 mA or lessIP65Operating: 0 to 50C, Stored: ?