REC

1 8 1 8 1 4 20 M20 X 1.5 M8 X 1.25 150 to 700 18 15.5 13 26 8 20 13 10 41 5 8 33.5 5 20 30 146 200 M26 X 1.5 25 M10 X 1.25 150 to 700 22 19.5 17 32 10 26 13 10 45 6 8 37.5 5.5 20 34.5 146 204 M26 X 1.5 32 M10 X 1.25 150 to 1000 22 19.5 17 32 12 26 13 11 45 6 8 46.5 5.5 22 42.5 159 217 M32 X 2 40 M14 X 1.5 200 to 1000 24 21 22 41 14 32 16 12.5 50 8 10 56 7 26.5 51 181 247 REC L/Axial foot

VHK

(mm) Port size R 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 4 6 8 10 12 1(P) 1(P) M5 4 6 8 10 12 1(P) 1(P) M5 Applicable tubing O.D. (mm) Applicable tube O.D. (mm) Applicable tubing O.D.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

x One-touch fitting Applicable tubing O.D.: 4, 6, 8, 1/4" OUT IN 68 2 x 3.4 2 x One-touch fitting Applicable tubing O.D.: 4, 6, 8, 1/4" 28 28 [mm] Model A C P PF2M701/702/705/710L -C4(-L) 84.4 7.6 2.8 depth 8.4 8 8 PF2M701/702/705/710/ 725/750L-C6(-L) 84.4 8 2.8 depth 8.4 2 x P 2 x P PF2M725/750L-N7(-L) 84.4 11.8 2.8 depth 8.4 PF2M711/721L-C8(-L) 88 12 2.8 depth 6.2 PF2M711/721L-N7(-L) 88

VHK

(mm) Port size R 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 4 6 8 10 12 1(P) 1(P) M5 4 6 8 10 12 1(P) 1(P) M5 Applicable tubing O.D. (mm) Applicable tube O.D. (mm) Applicable tubing O.D.

Pilot Operated

/N.O. 1/8 to 1/2 N.C.

Rubber seal 5 Port Solenoid Valve Series SYJ5000

1/8 1/4 1/8, C6 (One-touch fitting for 6) P, R port M5 x 0.8, Port size C4 (One-touch fitting for 4) C4 (One-touch fitting for 4) A, B port C6 (One-touch fitting for 6) M5 x 0.8 Flow Characteristics Flow characteristics Port size 14/2 (PA/B) 4/25/3 (A/BR) Manifold C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(P), 5/3(R) Port 2(B), 4(A) Port M5 x 0.8 C4 C6 M5 x 0.8 M5 x 0.8 1/8 C6 C4 1/8 1/8 1

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

Note 3) Refer to page 6 for DIN rail weight. 1 Cassette Type Manifold Series SY3000/5000/7000 How to Order Valves SY 3 1 60 5 L C6 Series 3 5 7 Symbol M5 C4 C6 01 C4 C6 C8 02 C8 C10 SY3000 SY5000 SY7000 A, B port size Port size M5 x 0.8 4 One-touch fitting 6 One-touch fitting Rc(PT)1/8 4 One-touch fitting 6 One-touch fitting 8 One-touch fitting Rc(PT)1/4 8 One-touch fitting 10 One-touch

A_HEC-OM-K001

/8 3/4x5/8 1/2x3/8 3/4x5/8 Recirculating fluid (Note 6,7,8) Pure water, Hydrofluoric acid, Ammonia hydrogen peroxide solution etc.

7.4

) 22.8 10.5 7.4 58.5 39.7 41.8 9.2 22 28.5 22.9 20.4 10.5 8 8 3 x C2, C4, N1, N3 <1(P), 5(EA), 3(EB) port> C2: 2 One-touch fitting C4: 4 One-touch fitting N1: 1/8" One-touch fitting N3: 5/32" One-touch fitting 8.7 With plug connector/light, built-in silencer S0716S-mM(O)-m 16.7 2-Position Double/4-Position Dual 3-Port Grommet: S07 6-mG-m 2 A B C 8 2 x 3.2 5.3 2 x C2, C4, N1, N3 <4(A), 2

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

OMRON Corp.: CompoBus/S System (16 output points) OMRON Corp.: CompoBus/S System (8 output points) Mitsubishi Electric Corp.: CC-LINK System 0 A B C D E F1 G H J1 J2 K Q R1 R2 V (2) Max. 16 stations Kit S Max. 8 P. 2-4-80 Max. 16 stations P. 2-4-82 C Connector kit 1 2 No. of terminals: 8, 1 row Applicable stations 1 to 8 Kit T Max. 8 Max. 16 No. of terminals: 16, 2 rows Max. 16 Applicable

Electric Rotary Table

Connector C Actuator side (8) (Terminal no.) 1 2 5 6 (14) (18) A1 B1 (13.5) (17.7) (17.7) Cable length (L) [m] 1 3 5 8 A B C 1 2 1.5 3 5 8 A6 B6 (30.7) Connector A 15 16 (14.7) Connector D L (11) (10) 8 A B C LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m ( Produced upon receipt of order) Controller side 10 (14.2) Connector C (Terminal no.) 1 2 5 6 (5.5) (6.3) 15 Actuator side (14) (18) (Terminal

Fieldbus system CC-Link IE Field compatible SI Unit IO-Link Master Unit

-DX#F (16 inputs) 16 bit (16 bit) EX600-DY#B (8 outputs) (16 bit) 16 bit2 EX600-DY#E (16 outputs) (16 bit) 16 bit Digital output unit EX600-DY#F (16 outputs) (16 bit) 16 bit EX600-DM#E (8 inputs / 8 outputs) 16 bit2 16 bit2 Digital I/O unit EX600-DM#F (8 inputs / 8 outputs) 16 bit2 16 bit2 Analogue input Unit EX600-AXA (2ch) 4 word3 (4 word) Analogue output Unit EX600-AYA (2ch

Modular Type Regulator Series AR

Modular Type Regulator Series AR Regulator Series AR Port size Model Accessory AR10 M5 x 0.8 AR20 1/8, 1/4 AR25 1/4, 3/8 AR30 1/4, 3/8 AR40 1/4, 3/8, 1/2 AR40-06 Bracket 3/4 Square embedded type pressure gauge (except for AR10) AR50 3/4, 1 AR60 Pages 36 through 40 1 Round pressure gauge Regulator with back flow mechanism Series ARK AR20K 1/8, 1/4 Panel mount AR25K 1/4, 3/8 AR30K 1/4, 3/8

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

(same side) n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 Different sides 120 15 90 2 pcs. "n" pcs. 2 pcs. "n" pcs. 2 pcs.

MXW Series Long Stroke Slide Table

A Shock absorber and urethane bumper side Dimensions (mm) B A Adjuster bolt D Lock nut C M Adjustment range (mm) 5 Applicable size B A C Model D M 1mm 1mm 21 MXW-A812 8 2.5 6 M5x0.5 MXW 8 15 31 MXW-A812-X11 5 23.5 MXW-A1212 8 2.5 6 M5x0.8 MXW12 15 33.5 MXW-A1212-X11 5 28.5 MXW-A1612 10 3 8 M6x1 MXW16 15 38.5 MXW-A1612-X11 5 34.5 MXW-A2012 13 4 10 M8x1.25 MXW20 15 44.5 MXW-A2012-X11 5 40 MXW-A2512

SMC

at retraction end) I 7.5 8 15 15 14 14 12 6.5 6.5 Vacuum suction port Rc, G, NPT1/8 12 25 6.5 K NA-M6 x 1 thread depth 6.5 25 KA Stroke adjuster at extension end Stroke adjuster at retraction end 6 18 46.5 (With stroke adjuster at extension end) N-M5 x 0.8 thread depth 10 (Insert) 6-M5 x 0.8 thread depth 8 6 2 (With stroke adjuster at extension end) 5 (With stroke adjuster at retraction

SFOD-OMT0010

8 8 9 9 9 (Speed tuning control) 112 No.SFOD-OMT0010-B Model LEHF10 LEHF20 LEHF32 LEHF40 Lead symbol K Lead [mm] 40/15 50/15 70/16 70/16 (2.667) (3.333) (4.375) (4.375) Max. speed [mm/s] 80 100 100 100 Min. speed [mm/s] 5 5 5 5 (Independent and interpolation) Min. speed [mm/s] 7 8 8 8 (Speed tuning control) Model LEHS10 LEHS20 LEHS32 LEHS40 Lead symbol K Lead [mm] 255/76 235/56 235/40 235

MHZ

8 10 10 12 12 6 5 8 7 10 9 12 12 M2 x 0.4 M2 x 0.4 M3 x 0.5 M3 x 0.5 M4 x 0.7 M4 x 0.7 M5 x 0.8 M5 x 0.8 3.6 3.6 6 6 8 8 10 10 3 2 4 2.5 5 3.3 6.5 3.5 5.2 5.2 8.3 8.3 10.5 10.5 13.1 13.1 12 9 16 12 20.8 15.5 25 19 MHZ2-10-X51 MHZ2-16-X51 MHZ2-20-X51 MHZ2-25-X51 Dimensions other than the above are identical to the standard type; refer to pages 12-2-33 to 12-2-36. 12-2-58 58 12-2-59 59 Parallel

MHZ

8 10 10 12 12 6 5 8 7 10 9 12 12 M2 x 0.4 M2 x 0.4 M3 x 0.5 M3 x 0.5 M4 x 0.7 M4 x 0.7 M5 x 0.8 M5 x 0.8 5.2 5.2 8.3 8.3 10.5 10.5 13.1 13.1 12 9 16 12 20.8 15.5 25 19 3.6 3.6 6 6 8 8 10 10 3 2 4 2.5 5 3.3 6.5 3.5 MHZ2-10-X51 MHZ2-16-X51 MHZ2-20-X51 MHZ2-25-X51 Dimensions other than the above are identical to the standard type; refer to pages 12-2-33 to 12-2-36. 12-2-58 58 Courtesy of Steven

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

1/8", 5/13" 6 : 30 5/32", 1/4" 8 : 50 5/16" 1103 Air Suction Filter Series ZFA Model ZA Prevents vacuum equipment trouble due to airborne contaminants.