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E F G H J K Vacuum inlet direction q Pad dia.

M M H W Y L E 1/8 LQ1H11-F LQ1H12-F LQ1H21-F LQ1H22-F LQ1H23-F LQ1H24-F LQ1H31-F LQ1H32-F LQ1H33-F LQ1H34-F LQ1H35-F LQ1H36-F LQ1H41-F LQ1H42-F LQ1H43-F LQ1H44-F LQ1H51-F LQ1H52-F LQ1H53-F LQ1H54-F LQ1H61-F LQ1H62-F LQ1H63-F LQ1H64-F 4 3 6 4 6 4 10 8 6 10 8 6 12 10 12 10 19 12 19 12 25 19 25 19 11.5 18.5 10 10 26.5 1/8" Class 1 Rc (NPT) Port size 18.5 35 1/8" 16.5 14 14 15 (L) 21.5 36.5

M H L M E W Y 1/8 LQ1H11-F LQ1H12-F LQ1H21-F LQ1H22-F LQ1H23-F LQ1H24-F LQ1H31-F LQ1H32-F LQ1H33-F LQ1H34-F LQ1H35-F LQ1H36-F LQ1H41-F LQ1H42-F LQ1H43-F LQ1H44-F LQ1H51-F LQ1H52-F LQ1H53-F LQ1H54-F LQ1H61-F LQ1H62-F LQ1H63-F LQ1H64-F 4 3 6 4 6 4 10 8 6 10 8 6 12 10 12 10 19 12 19 12 25 19 25 19 11.5 18.5 10 10 26.5 1/8" Class 1 Rc (NPT) Port size VC 18.5 35 1/8" 16.5 14 15 14 L VDW 21.5

21.5 LQ1R2E-F3/16" 2.9 LQ1R2F-F 1/8" 1.8 LQ1R3A-F 3/8" 1/4" 3.6 21.5 LQ1R24-F 4 2.6 LQ1R2F-F 3 1.8 LQ1R31-F 10 1/4" 5.8 21.5 LQ1R3B-F 1/4" 3.6 LQ1R3C-F 3/8" 3/8" 25.5 5.8 25 LQ1R3D-F 1/4" 3.6 LQ1R3F-F 3/8" 1/8" 34.5 19.7 5.8 18.5 LQ1R4A-F 1/2" 3/8" 24 7.4 5 20 9 18 17 36.5 21.5 LQ1R32-F 8 5.5 LQ1R33-F 6 3.6 LQ1R34-F 10 3/8" 25.5 24 23 5 9 18 36.5 7.4 20 17 23 25 LQ1R35-F 8 5.5 LQ1R36-F 6

only Hexagon width across flats G Hexagon width across flats 12 Hexagon width across flats 12 Hexagon width across flats G Flat with ribs Flat with ribs Flat/Flat with Ribs Flat/Flat with Ribs 1 8 B C D D Flat E Flat with ribs F: M6 x 1 F: M8 x 1.25 D F: Rc Y 1 8 D G Flat Flat with ribs F: M5 x 0.8 F: M6 x 1 E D G F: Rc Y Model A Model A B C E D G E ZPT40 U C ZPT50 U C ZPT10 U C ZPT13 U

Displacement NBR (N): Silicone rubber (S): Urethane rubber (U): FKM (F): Mark-free NBR (CL): ZP3E-32UM ZP3E-80UM 3 6 Displacement [mm] Displacement [mm] 2 4 N, S, U, F, CL N, S, U, F, CL 1 2 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-100UM ZP3E-40UM 3 8 Displacement [mm] Displacement [mm] 6 2 N, S, U, F, CL N, S, U, F, CL 4 1 2

m i n i m u m c l e a r a n c e o f 1 0 O m m u n d e r t h l s e q u i P m e n t ' ( R e f e r t o P . 7 , 8 . ) f u n c t i o n r e f e r r e d i n P . 5 f l D o u t . , C L E A N I N G O F A U T O D R A I N , , . a c o n f i r m n o r m a I P e r f o r m a n c e o f r n e m b r a n e a i r d r Y e r b Y c o l o r o f g r a i n s i n s i d e t n e d e w P o i n t c h e c k e r ( O P t

Made to Order Change of Rod End Shape 1 CH2 Series Mounting type Bore size Rod size series Stroke Cylinder options X A0 Indicate the rod end shape pattern symbol A1 A2 A3 C0.5 30 30 30 30 D D D d d F Width across flats F F H H H A4 A5 A6 30 30 30 D D D d D d 30 30 Width across flats Width across flats F Width across flats F F H H H Note) Female thread effective depth should be no more

1 Stroke (mm) 100 50 0.05 0.1 0.5 1 2 3 0.1 0.05 0.5 1 2 5 Load (kN) Load (kN) 123 Hydraulic Cylinders: Technical Data 2 Series CHA Stroke range limit charts: Bore sizes 40, 50, 63, 80 Symbol Mounting orientation Mounting orientation Mounting orientation Mounting orientation Symbol Symbol Symbol F F F F F F F F F F F F Bore size 40 Bore size 50 3000 2 4 8 9 3 7 2 4 3 7 5 2000 8 9 1 5 1 6

HRX-OM-X010-E Operation Manual Original Instructions Thermo-Chiller HRZ002-WS-F HRZ004-WS-F HRZ008-WS-F HRZ008-L-F HRZ002-W1S-F HRZ004-W1S-F HRZ008-W1S-F HRZ008-L1-F HRZ002-W2S-F HRZ004-W2S-F HRZ008-W2S-F HRZ010-WS-F HRZ010-W1S-F HRZ010-W2S-F Save This Manual Carefully for Use at Any Time 2022 SMC CORPORATION All Rights Reserved To the Customers Thank you for purchasing our THERMO CHILLER

only Hexagon width across flats G Hexagon width across flats 12 Hexagon width across flats 12 Hexagon width across flats G Flat with ribs Flat with ribs Flat/Flat with Ribs Flat/Flat with Ribs 1 8 B C D D Flat E Flat with ribs F: M6 x 1 F: M8 x 1.25 D F: Rc Y 1 8 D G Flat Flat with ribs F: M5 x 0.8 F: M6 x 1 E D G F: Rc Y Model A Model A B C E D G E ZPT40 U C ZPT50 U C ZPT10 U C ZPT13 U

CJ2 Rod boot Mounting style Basic style B F U None Nil J K CM2 Rod side flange style Nylon tarpaulin Rod side trunnion style Heat resistant tarpaulin CG1 Made to Order (Refer to page 200 for details.) MB 32 F CM2 P 150 MB1 CA2 32 With auto switch CDM2 150 F M9BW P CS1 Number of auto switches Centralized piping type CS2 With auto switch (Built-in magnet) 2 pcs.

/ISE20 Series Function Details ZSE20C(F)/ISE20C(H) ZSE20B(F)/ISE20B ZSE20B(F)-L/ISE20B-L ZSE20A(F)/ISE20A ZSE20(F)/ISE20 Function Details Display examples of the main and sub (set value) screens of each mode.

LJ1H303NDStroke -F-X70 LJ1H303SEStroke -F-X70 LJ1H303PAStroke K-F-X70 LJ1H303NAStroke K-F-X70 Combinations other than the above cannot be manufactured.

0.8 NN MM C D B 0 0.3 B 0 0.3 A F NA H Z + Stroke S + Stroke NB F For details of the mounting nut, refer to page 63.

Connection threads Rc/NPT 2 x B K E E F G L1 L1 L2 Y H M B Model L2 M N F LQ3B11-F LQ3B12-F LQ3B21-F LQ3B22-F LQ3B31-F LQ3B32-F LQ3B33-F LQ3B34-F LQ3B35-F LQ3B36-F LQ3B41-F LQ3B42-F LQ3B43-F LQ3B51-F LQ3B52-F LQ3B53-F LQ3B61-F LQ3B62-F LQ3B63-F 4 3 M 11 14 3.5 10 9 9.5 28.5 27.5 19.5 18.5 4.8 1/8" (E,E) (E,E) G H 20 18.5 1/8" 1/4" H L1,L1 L1,L1 6 16 20 4 17 16 12 34.5 33.5 6 22 21.5 10 8

VQD AXT661-14A-F AXT661-14AN-F AXT661-13A-F AXT661-13AN-F Positive common Single (2-wire) Negative common Positive common Double (latching) (3-wire) Negative common Note) Lead wire length: 300 mm DIN Rail Mounting Each manifold can be mounted on a DIN rail. Order it by indicating an option symbol for DIN rail mounting style, -D.

9 6-8-19 20 Series CA2W Basic Style: CA2WB 2-P (Rc, NPT, G) Width across flats KA 4-J G G M Width across flats KA 2-cushion valve MM MM D E D E H1 H1 AL AL B1 N F K A N F K A B C S + Stroke H H + Stroke ZZ + 2 strokes e e e l + Stroke f 9 f 9 l l 9 f Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800)

Note 2) L kit: Nil F P PC J Nil S F kit P kit (26P) P kit (20P) J kit (20P) L kit S kit q w Note) L kit: Nil F e r kit SE SSQ1000 No.