MQQ

0.2 A + Stroke M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com E 25, 28 H thread effective depth C 2-Rc 1/8 F Q Y 2 x 4-OB Counterbore depth RB 2 x 4-OA effective depth RA J I 4-N through 0.2 D W E M K L B + Stroke 0.2 A + Stroke M E Bore size (mm) Stroke range

Guide Table Series MGF ø40, ø63, ø100 1

Breathing hole for guide (with element) When the cylinder is extended 46 Port for retracting cylinder 4-M10 x 1.5 through M6: T-slot for hexagon bolt K 50 140 160 146 4 11 6-K (6 places) 73 146 8-23-11 12 Series MGF Dimensions: 100 MGF100 4-M12 x 1.75 through 170 200 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside

CLQ

Joint 7 9 YB-03 32, 40 11.5 depth 7.5 34 25 12 K ( across flats) H (With locking) 9 11 YB-05 50, 63 42 32 12 14.5 depth 8.5 11 13 YB-08 80 52 38 16 18 depth 12 d2 d1 14 17 YB-10 100 62 50 19 21 depth 14 L UT C UA Bore size (mm) T1 RS Weight (g) T2 V W Part no. Part no.

33

(20 [C]) : 295 [K] (22 [C]) : 2.0 [K] (= T2 T1) : 60 [s/min] : Unknown [cal/h] [W] : Tap water* Heat generation amount by users equipment Q Circulating fluid Circulating fluid weight flow rate qm Circulating fluid weight volume ratio g Circulating fluid (volume) flow rate qv Circulating fluid specific heat C Circulating fluid outlet temperature T1 Circulating fluid return temperature T2

Series 11-MXJ Air Slide Table

(Through) Note 1) 3 +0.05 0 depth 1.5 6 3.5 11 3 +0.03 0 depth 1.5 Note 1) (Through) M 2 x M1.7 x 0.35 thread depth 2 8 K 1.5 10.5 4 3 Vacuum port M3 x 0.5 J 12 I Operating port 2 x M3 x 0.5 (Plugged when the product is not a symmetric type.) (Plugged when the product is not a symmetric type.)

LEF-OM002xx

The INP output signal is turned on from 100[mm] 0.5[mm]=99.5[mm] Table Position[mm] c Area2[mm] j Area1[mm] j b Speed[mm/s] 100 0 AREA Output signal ON OFF INP Output conodition INP Output signal ON In pos[mm] k OFF 100.5 99.5 0 10 20 30 40 50 60 70 80 90 100 Stroke [mm] 27 - Example of step data input (2) Positioning operation Relative a b c d e f g h i j k Step data No.

LEF-OM006xx

AREA ON 12 INC ABS() No.1 10 22 AREA k INP(IN )ON INP INP ON :LEFS: 0.50,LEFB: 1 No.1 0+0.5 = 0.5 INP -22- IN INPAREA a b c d e f g h i j k No.0 0[mm] 100[mm] )AREA )AREA AREA1 2) No. 1 2 mm/s mm mm/s2 mm/s2 % % mm/s % mm mm mm 0 ABS 100 100.00 3000 3000 0 0 0 100 80.00 90.00 0.50 100[mm]-0.5[mm]=99.5[mm] INPON [mm] c 100 0 [mm/s] b ON OFF INP INP [mm] k 100.5 99.5 0 10 20 30

MQQ

B + Stroke L M 0.2 A + Stroke E 25, 28 H thread effective depth C 2-Rc 1/8 2 x 4-OB Counterbore depth RB 2 x 4-OA effective depth RA Y Q F E J I 4-N through M 0.2 D W K B + Stroke L A + Stroke M 0.2 E Bore size (mm) Stroke range (mm) F A H B C D E OA I J K L M N OB Q RA W Y RB 10 10 to 40 69.5 M3 x 0.5 61.5 6 6 29 9 M4 x 0.7 38 5 8 20 3.5 6.5 39.5 7 5 4 16 10 to 60 80.5 M4 x 0.7 70.5 8

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

19 +0.030 0 depth 2.5 3 20 0.05 Prepared hole diameter 3.3 +0.030 0 15 W 0.50.05 B D 2-M5 x 0.8 Piping port M5 x 0.8 Vacuum suction port 28 27 10 4.5 depth 1.5 3 J 6 +0.030 0 10 9.5 4 Section AA Mounting base side B D +0.030 0 Q QL depth 1.5 3 11-/22-MXP10-20 Without magnet and switch rail Max. 2.5 2-M2 x 0.4 depth 3 8 2.5 4.7 15 15 L 6-M3 x 0.5 depth 4 2-M3 x 0.5 depth 3.5 (mm) G H J K

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

MXW Order Made Rod Boot Materials Standard Stroke Made to Order Specifications Symbol J K Materials Max. ambient temp. MXP Refer to p.5.4-1 for made to order specifications of series CBA1.

CLQ

Joints 12 7 25 9 34 11.5, depth 7.5 YB-03 32, 40 K ( across flats) 12 9 32 11 42 14.5, depth 8.5 YB-05 50, 63 H (with locking) 16 11 38 13 52 18, depth 12 YB-08 80 d2 d1 19 14 50 17 62 21, depth 14 YB-10 100 L UT Weight (g) Bore size (mm) C UA RS W T1 T2 V Part no. (mm) 9 50 18 6.5 10 YB-03 32, 40 80 UA C d1 d2 H K L UT Weight (g) Part no.

CRQ2

gr ot ey R K Using the Body as a Flange The body's L dimensions are shown in the drawing on the right.

MGF

40 3.5 100 120 114 8.7 6-K (6 places) 57 114 5 Guide Table Series MGF 63 MGF63 Scale: 40% 4-M10 x 1.5 through 140 160 120 11.5 48.5 + Stroke 10 60 + Stroke 20 9 2-Rc 1/4 port for extending cylinder Breathing hole for guide (with element) When the cylinder is extended 46 Port for retracting cylinder 4-M10 x 1.5 through M6: T-slot for hexagon bolt K 50 140 160 4 146 11 6-K (6 places) 73 146

MQQ

A + Stroke M 0.2 E 25, 28 H effective thread depth C 2-Rc 1/8 F Q Y 2 x 4-OA effective depth RA 2 x 4-OB Depth of counter bore RB J I 4-N through M 0.2 D W E K L B + Stroke M 0.2 A + Stroke E (mm) Bore size (mm) Stroke range (mm) OA A B C D E F H RB I J K L M N OB Q RA W Y M4 x 0.7 4 14.5 7 5 M3 x 0.5 10 to 40 39.5 31.5 6 6 29 5.5 10 38 5 8 20 3.5 6.5 M6 x 1.0 7 18 10 5 M4 x 0.7 10 to

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

0.2 A + Stroke M E 25, 30, 40 H effective thread depth C 2-Rc1/8 (NPT1/8, G1/8) F Q Y 2 x 4-OB Depth of counterbore RB 2 x 4-OA effective depth RA J I 4-N through 0.2 D W E M K L B + Stroke 0.2 A + Stroke M E (mm) Bore size (mm) Stroke range (mm) Note) A OA B C D E F H RB I J K L M N OB Q RA W Y 10 10 to 40 39.5 M4 x 0.7 31.5 6 6( 5.8) 29 5.5 M3 x 0.5 4 38 5 8 20 3.5 6.5 14.5 7 5 16 10

Compact Cylinder with Lock Series CLQ

Joints 12 7 25 9 34 11.5, depth 7.5 YB-03 32, 40 K ( across flats) 12 9 32 11 42 14.5, depth 8.5 YB-05 50, 63 H (with locking) 16 11 38 13 52 18, depth 12 YB-08 80 d2 d1 19 14 50 17 62 21, depth 14 YB-10 100 L UT Weight (g) Bore size (mm) C UA RS W T1 T2 V Part no. (mm) 9 50 18 6.5 10 YB-03 32, 40 80 UA C d1 d2 H K L UT Weight (g) Part no.

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

gr ot ey R K Using the Body as a Flange The body's L dimensions are shown in the drawing on the right.

Compact Cylinder Series NCQ8

Cylinder tube shape for 0.75, 106 K M1 O-counter bore R depth A + Stroke E 0.13 [0.16] Note 1) 2 sides x 4 places (Inch) C Symbol Bore 1/8"st 1/4"st 3/8" to 4"st A Z W R Q P O N M2 M1 K J I H E D 075 (3/4") 106 (1-1/16") 150 (1-1/2") 200 (2") 250 (2-1/2") 0.31 0.36 0.46 1.25 0.56 #10-32UNF 1.56 0.06 0.25 0.86 1.22 0.15 0.25 0.19 0.15 1.31 0.38 #10-32UNF 0.50 0.70 0.52 1.56 0.88 5/16-24UNF

Compact Cylinder with Air Cushion Series RQ

YU-03 RS M W T2 V J E T1 B 2-D through K ( across flats) 2-O counter bore Joint H (with locking) d2 d1 mm Bore size (mm) B D E J M O Part no. L UT C UA 12 7 25 9 34 11.5, depth 7.5 YB-03 32, 40 12 9 32 11 42 14.5, depth 8.5 YB-05 50 mm Part no. Applicable bore size (mm) UA C d1 d2 H K L UT Weight (g) Weight (g) Bore size (mm) T1 T2 V W RS Part no.

Guide Table Series MGF

40 3.5 100 120 114 8.7 6-K (6 places) 57 114 5 Guide Table Series MGF 63 MGF63 Scale: 40% 4-M10 x 1.5 through 140 160 120 11.5 48.5 + Stroke 10 60 + Stroke 20 9 2-Rc 1/4 port for extending cylinder Breathing hole for guide (with element) When the cylinder is extended 46 Port for retracting cylinder 4-M10 x 1.5 through M6: T-slot for hexagon bolt K 50 140 160 146 4 11 6-K (6 places) 73 146