Number Description PPMW-701-30-FM-B80 N.C., 30 PSI, Flush Mount, Nylon 1/16" ID Barbed Fitting PPMW-701-30-FM-B85 N.C., 30 PSI, Flush Mount, Nylon 1/8" ID Barbed Fitting PPMW-701-30-FM-OT1 N.C., 30 PSI, Flush Mount, 1/8" O.D.

Number Description PPMW-701-30-FM-B80 N.C., 30 PSI, Flush Mount, Nylon 1/16" ID Barbed Fitting PPMW-701-30-FM-B85 N.C., 30 PSI, Flush Mount, Nylon 1/8" ID Barbed Fitting PPMW-701-30-FM-OT1 N.C., 30 PSI, Flush Mount, 1/8" O.D.

Number Description PPMW-701-30-FM-B80 N.C., 30 PSI, Flush Mount, Nylon 1/16" ID Barbed Fitting PPMW-701-30-FM-B85 N.C., 30 PSI, Flush Mount, Nylon 1/8" ID Barbed Fitting PPMW-701-30-FM-OT1 N.C., 30 PSI, Flush Mount, 1/8" O.D.

Number Description PPMW-701-30-FM-B80 N.C., 30 PSI, Flush Mount, Nylon 1/16" ID Barbed Fitting PPMW-701-30-FM-B85 N.C., 30 PSI, Flush Mount, Nylon 1/8" ID Barbed Fitting PPMW-701-30-FM-OT1 N.C., 30 PSI, Flush Mount, 1/8" O.D.

Number Description PPMW-701-30-FM-B80 N.C., 30 PSI, Flush Mount, Nylon 1/16" ID Barbed Fitting PPMW-701-30-FM-B85 N.C., 30 PSI, Flush Mount, Nylon 1/8" ID Barbed Fitting PPMW-701-30-FM-OT1 N.C., 30 PSI, Flush Mount, 1/8" O.D.

Number Description PPMW-701-30-FM-B80 N.C., 30 PSI, Flush Mount, Nylon 1/16" ID Barbed Fitting PPMW-701-30-FM-B85 N.C., 30 PSI, Flush Mount, Nylon 1/8" ID Barbed Fitting PPMW-701-30-FM-OT1 N.C., 30 PSI, Flush Mount, 1/8" O.D.

Number Description PPMW-701-30-FM-B80 N.C., 30 PSI, Flush Mount, Nylon 1/16" ID Barbed Fitting PPMW-701-30-FM-B85 N.C., 30 PSI, Flush Mount, Nylon 1/8" ID Barbed Fitting PPMW-701-30-FM-OT1 N.C., 30 PSI, Flush Mount, 1/8" O.D.

Clean Regulator/Fluororesin Type

) 23 32 SRF10 1/4" A1 A2 B1 B2 Model SRF10S-1S07 SRF10S-1S0711 SRF10S-1S11 SRF10S-1S1107 SRF10S-2S07 SRF10S-2S0711 SRF10S-2S11 SRF10S-2S1107 31 48 31 48 OUT IN 28 51 54 26 28 51 28 51 31 48 28 52 28 52 27 55 5.5 27 55 A1 A2 27 55 28 52 B1 B2 Tube extensions 23 Pilot port Rc, NPT 1/8 R 12 32 54 26 48 40 1 2 SMC 4 x 3.5 (Mounting hole) 23 5/32" OUT IN 1/4" 5.5 32 30 30 884 Clean Regulator

Series LQ3 High Purity Fluororesin Fitting

W M L H E W M 10 14 18 22 30 36 14 20 25 29 37 49 46.5 57 79 88 103 122 11 16 21 24 32 41 10 17 22.5 24.5 27 30 1/8" 1/4" 3/8" 1/2" 3/4" 1" LQ3U1A LQ3U2A LQ3U3A LQ3U4A LQ3U5A LQ3U6A 1/4 (E) (E) L

5 Port Air Operated Valve SYA3000/5000/7000 Series

2(B) (A)4 Symbol Applicable series Nil Port size Without sub-plate 2 1 8 (EA)5 1 (P) 3(EB) 01 SYA3000 With sub-plate 1 4 3 position closed center With sub-plate 02 SYA5000 2(B) (A)4 1 4 3 With sub-plate 02 SYA7000 (EA)5 1 (P) 3(EB) 3 8 With sub-plate 03 3 position exhaust center 2(B) (A)4 4 (EA)5 1 (P) 3(EB) 3 position pressure center 2(B) (A)4 5 (EA)5 1 (P) 3(EB) 1458 5 Port Air Operated

PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).

SYA3000/5000/7000

(66) 2 x 4.2 (For mounting) (52) (5.5) 47.6 (49.5) (42.5) SYA7220-02-F2) 30 24.5 1/4 (A, B port) 15 20 Manual override 1/4 (P port) 2 x 1.8 (Breathing hole) 0.9 2 40 (23.9) 18 30 24.5 EB P EA 2 x 2.2 die-cast hole (For manifold gasket positioning) 1/8 (EA, EB port) 36 3 position closed center / exhaust center / pressure center SYA7 20-F2) C8, N9 C10, N11 3 4 5 SYA 109.7 48.1 SYJA 51.6 38.1

Tube One Touch Fitting FMW-4200-X30-FM-OT2 30 Hg, Flush Mount, 5/32" O.D. Tube One Touch Fitting FMW-4200-X30-PM-B80 30 Hg, Panel Mount, Nylon 1/16" ID Barbed Fitting FMW-4200-X30-PM-B85 30 Hg, Panel Mount, Nylon 1/8" ID Barbed Fitting FMW-4200-X30-PM-OT1 30 Hg, Panel Mount, 1/8" O.D.

Tube One Touch Fitting FMW-4200-X30-FM-OT2 30 Hg, Flush Mount, 5/32" O.D. Tube One Touch Fitting FMW-4200-X30-PM-B80 30 Hg, Panel Mount, Nylon 1/16" ID Barbed Fitting FMW-4200-X30-PM-B85 30 Hg, Panel Mount, Nylon 1/8" ID Barbed Fitting FMW-4200-X30-PM-OT1 30 Hg, Panel Mount, 1/8" O.D.

Tube One Touch Fitting FMW-4200-X30-FM-OT2 30 Hg, Flush Mount, 5/32" O.D. Tube One Touch Fitting FMW-4200-X30-PM-B80 30 Hg, Panel Mount, Nylon 1/16" ID Barbed Fitting FMW-4200-X30-PM-B85 30 Hg, Panel Mount, Nylon 1/8" ID Barbed Fitting FMW-4200-X30-PM-OT1 30 Hg, Panel Mount, 1/8" O.D.

Tube One Touch Fitting FMW-4200-X30-FM-OT2 30 Hg, Flush Mount, 5/32" O.D. Tube One Touch Fitting FMW-4200-X30-PM-B80 30 Hg, Panel Mount, Nylon 1/16" ID Barbed Fitting FMW-4200-X30-PM-B85 30 Hg, Panel Mount, Nylon 1/8" ID Barbed Fitting FMW-4200-X30-PM-OT1 30 Hg, Panel Mount, 1/8" O.D.

Tube One Touch Fitting FMW-4200-X30-FM-OT2 30 Hg, Flush Mount, 5/32" O.D. Tube One Touch Fitting FMW-4200-X30-PM-B80 30 Hg, Panel Mount, Nylon 1/16" ID Barbed Fitting FMW-4200-X30-PM-B85 30 Hg, Panel Mount, Nylon 1/8" ID Barbed Fitting FMW-4200-X30-PM-OT1 30 Hg, Panel Mount, 1/8" O.D.

Tube One Touch Fitting FMW-4200-X30-FM-OT2 30 Hg, Flush Mount, 5/32" O.D. Tube One Touch Fitting FMW-4200-X30-PM-B80 30 Hg, Panel Mount, Nylon 1/16" ID Barbed Fitting FMW-4200-X30-PM-B85 30 Hg, Panel Mount, Nylon 1/8" ID Barbed Fitting FMW-4200-X30-PM-OT1 30 Hg, Panel Mount, 1/8" O.D.

Tube One Touch Fitting FMW-4200-X30-FM-OT2 30 Hg, Flush Mount, 5/32" O.D. Tube One Touch Fitting FMW-4200-X30-PM-B80 30 Hg, Panel Mount, Nylon 1/16" ID Barbed Fitting FMW-4200-X30-PM-B85 30 Hg, Panel Mount, Nylon 1/8" ID Barbed Fitting FMW-4200-X30-PM-OT1 30 Hg, Panel Mount, 1/8" O.D.

Tube One Touch Fitting FMW-4200-X30-FM-OT2 30 Hg, Flush Mount, 5/32" O.D. Tube One Touch Fitting FMW-4200-X30-PM-B80 30 Hg, Panel Mount, Nylon 1/16" ID Barbed Fitting FMW-4200-X30-PM-B85 30 Hg, Panel Mount, Nylon 1/8" ID Barbed Fitting FMW-4200-X30-PM-OT1 30 Hg, Panel Mount, 1/8" O.D.