Oscillation Angle A: 190°, Torque (Range)(N⋅m): 3 to Less than 6, Type: Rotary Table 2-Point Stop, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Slow Speed, Allowable Kinetic Energy (Range)(J): 0.01 to Less than 0.1, Tube Nominal Diameter: 30, Valves: Not Provided, Allowable Kinetic Energy(J): 0.048, Operating Pressure

Oscillation Angle A: 190°, Torque (Range)(N⋅m): 3 to Less than 6, Type: Rotary Table 2-Point Stop, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Slow Speed, Allowable Kinetic Energy (Range)(J): 0.01 to Less than 0.1, Tube Nominal Diameter: 30, Valves: Not Provided, Allowable Kinetic Energy(J): 0.048, Operating Pressure

Oscillation Angle A: 190°, Torque (Range)(N⋅m): 3 to Less than 6, Type: Rotary Table 2-Point Stop, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Slow Speed, Allowable Kinetic Energy (Range)(J): 0.01 to Less than 0.1, Tube Nominal Diameter: 30, Valves: Not Provided, Allowable Kinetic Energy(J): 0.048, Operating Pressure

Oscillation Angle A: 190°, Torque (Range)(N⋅m): 3 to Less than 6, Type: Rotary Table 2-Point Stop, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Slow Speed, Allowable Kinetic Energy (Range)(J): 0.01 to Less than 0.1, Tube Nominal Diameter: 30, Valves: Not Provided, Allowable Kinetic Energy(J): 0.048, Operating Pressure

Oscillation Angle A: 190°, Torque (Range)(N⋅m): 3 to Less than 6, Type: Rotary Table 2-Point Stop, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Slow Speed, Allowable Kinetic Energy (Range)(J): 0.01 to Less than 0.1, Tube Nominal Diameter: 30, Valves: Not Provided, Allowable Kinetic Energy(J): 0.048, Operating Pressure

Oscillation Angle A: 190°, Torque (Range)(N⋅m): 3 to Less than 6, Type: Rotary Table 2-Point Stop, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Slow Speed, Allowable Kinetic Energy (Range)(J): 0.01 to Less than 0.1, Tube Nominal Diameter: 30, Valves: Not Provided, Allowable Kinetic Energy(J): 0.048, Operating Pressure

Oscillation Angle A: 190°, Torque (Range)(N⋅m): 3 to Less than 6, Type: Rotary Table 2-Point Stop, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Slow Speed, Allowable Kinetic Energy (Range)(J): 0.01 to Less than 0.1, Tube Nominal Diameter: 30, Valves: Not Provided, Allowable Kinetic Energy(J): 0.048, Operating Pressure

Oscillation Angle A: 190°, Torque (Range)(N⋅m): 6 to Less than 10, Type: Rotary Table 2-Point Stop, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Slow Speed, Allowable Kinetic Energy (Range)(J): 0.01 to Less than 0.1, Tube Nominal Diameter: 50, Valves: Not Provided, Allowable Kinetic Energy(J): 0.081, Operating Pressure

Oscillation Angle A: 190°, Torque (Range)(N⋅m): 6 to Less than 10, Type: Rotary Table 2-Point Stop, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Slow Speed, Allowable Kinetic Energy (Range)(J): 0.01 to Less than 0.1, Tube Nominal Diameter: 50, Valves: Not Provided, Allowable Kinetic Energy(J): 0.081, Operating Pressure

Oscillation Angle A: 190°, Torque (Range)(N⋅m): 6 to Less than 10, Type: Rotary Table 2-Point Stop, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Slow Speed, Allowable Kinetic Energy (Range)(J): 0.01 to Less than 0.1, Tube Nominal Diameter: 50, Valves: Not Provided, Allowable Kinetic Energy(J): 0.081, Operating Pressure

Oscillation Angle A: 190°, Torque (Range)(N⋅m): 6 to Less than 10, Type: Rotary Table 2-Point Stop, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Slow Speed, Allowable Kinetic Energy (Range)(J): 0.01 to Less than 0.1, Tube Nominal Diameter: 50, Valves: Not Provided, Allowable Kinetic Energy(J): 0.081, Operating Pressure

Oscillation Angle A: 190°, Torque (Range)(N⋅m): 6 to Less than 10, Type: Rotary Table 2-Point Stop, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Slow Speed, Allowable Kinetic Energy (Range)(J): 0.01 to Less than 0.1, Tube Nominal Diameter: 50, Valves: Not Provided, Allowable Kinetic Energy(J): 0.081, Operating Pressure

Oscillation Angle A: 190°, Torque (Range)(N⋅m): 6 to Less than 10, Type: Rotary Table 2-Point Stop, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Slow Speed, Allowable Kinetic Energy (Range)(J): 0.01 to Less than 0.1, Tube Nominal Diameter: 50, Valves: Not Provided, Allowable Kinetic Energy(J): 0.081, Operating Pressure

Oscillation Angle A: 190°, Torque (Range)(N⋅m): 6 to Less than 10, Type: Rotary Table 2-Point Stop, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Slow Speed, Allowable Kinetic Energy (Range)(J): 0.01 to Less than 0.1, Tube Nominal Diameter: 50, Valves: Not Provided, Allowable Kinetic Energy(J): 0.081, Operating Pressure

Oscillation Angle A: 190°, Torque (Range)(N⋅m): 6 to Less than 10, Type: Rotary Table 2-Point Stop, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Slow Speed, Allowable Kinetic Energy (Range)(J): 0.01 to Less than 0.1, Tube Nominal Diameter: 50, Valves: Not Provided, Allowable Kinetic Energy(J): 0.081, Operating Pressure

Oscillation Angle A: 190°, Torque (Range)(N⋅m): 6 to Less than 10, Type: Rotary Table 2-Point Stop, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Slow Speed, Allowable Kinetic Energy (Range)(J): 0.01 to Less than 0.1, Tube Nominal Diameter: 50, Valves: Not Provided, Allowable Kinetic Energy(J): 0.081, Operating Pressure

High Vacuum L Type Valve

Port 1(P) S K L M N B T Port 3(R) A G A Unit: mm Model A B C Fn Fd G J XLFV-16-2 40 108 38 30 17 41 XLFV-25-2 50 121 48 40 26 46 XLFV-40-2 65 171 66 55 41 54.5 XLFV-50-2 70 185 79 75 52 71 XLFV-63-2 88 212 100 87 95 70 80.5 XLFV-80-2 90 257 117 114 110 83 90.5 Model K L M N S T XLFV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLFV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLFV-40-2 33.9 10.2 3.6 3.6 M5 M5 XLFV-50-2

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To ensure saf et y, be sure t o observe I SO 4414, J I S B 8370 and ot her saf et y pract i ces. Expl anat i on of l abel Label M eani ng of l abel W ARN I N G O perat or error coul d resul t i n seri ous i nj ury or l oss of l i f e. CAU TI O N O perat or error coul d resul t i n i nj ury or equi pm ent dam age.

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To ensure saf et y, be sure t o observe I SO 4414, J I S B 8370 and ot her saf et y pract i ces. Expl anat i on of l abel Label M eani ng of l abel W ARN I N G O perat or error coul d resul t i n seri ous i nj ury or l oss of l i f e. CAU TI O N O perat or error coul d resul t i n i nj ury or equi pm ent dam age.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

J Setting of security code (F81) The user can select whether a security code must be entered to release the key lock. At a time of shipment from the factory, it is set such that a security code is not required. Made to Order 36 ZSE20(F)/ISE20 Series The F in ( ) shows the function code number. Refer to the operation manual for details about operation procedures and function codes.