Smooth Cylinder Series CG1Y ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the low friction, double acting, single rod type of Series CG1  Q .

NPN) C76 5 V IC Reed switch Solid state switch Grommet B54 C73 C73C B59W H7A1 H7A2 H7B H7C H7NW H7PW H7BW H7BA H7NF 100 V, 200 V 100 V 12 V Relay, PLC 2-wire 24 V Connector Diagnostic indication (2-color) Grommet G59 G5P K59 G59W G5PW K59W G5BA G59F 3-wire (NPN) 3-wire (PNP) 5 V, 12 V IC Grommet 2-wire 12 V Connector 3-wire (NPN) 3-wire (PNP) IC Relay, PLC 5 V, 12 V Diagnostic

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12 V IC circuit 12 V 5 V, 12 V 12 V IC circuit Relay, PLC Diagnostic indication (2-color indicator) 24 V Yes Grommet 5 V, 12 V IC circuit Water resistant (2-color indicator) M9PAV1 M9PA1 M9BAV1 M9BA1 12 V 3-wire (NPN equivalent) Grommet 24 V A96V A96 IC circuit 5 V Yes A93V2 A93 A90 100 V IC circuit Relay, PLC 2-wire 12 V A90V No 100 V or less 1 Water resistant type auto switches

Booster Regulator/Air Tank

V 10 T = t x = 89 x = 89 (s).

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In the case of Fig. (3), ripple 10% means V' V" V'/V x 100 = 10% When no pulsation has occurred, ripple is 0%. V ZSE ISE Vacuum breaking pressure Positive pressure added for releasing the work or quickly returning to atmospheric pressure after breaking the vacuum condition. V' V" PSE V Vibration resistance The amount of vibration a device can withstand without damage.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

(NPN) 3-wire (PNP) A96 A96V 5 V M9N M9NV IC circuit 5 V 12 V M9P M9PV 12 V M9B M9BV 2-wire Relay PLC Yes Grommet 24 V 3-wire (NPN) 3-wire (PNP) F9NW F9NWV Diagnostic indication IC circuit 5 V 12 V F9PW F9PWV 2-color indication F9BW F9BWV 2-wire 12 V Lead wire length symbols 0.5 m Nil (Example) F9NW 3 m L F9NWL 5 m Z F9NWZ Solid state switches marked with a symbol are produced upon

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

(NPN) 3-wire (PNP) A96 A96V 5 V M9N M9NV IC circuit 5 V 12 V M9P M9PV 12 V M9B M9BV 2-wire Relay PLC Yes Grommet 24 V 3-wire (NPN) 3-wire (PNP) F9NW F9NWV Diagnostic indication IC circuit 5 V 12 V F9PW F9PWV 2-color indication F9BW F9BWV 2-wire 12 V Lead wire length symbols 0.5 m Nil (Example) F9NW 3 m L F9NWL 5 m Z F9NWZ Solid state switches marked with a symbol are produced upon

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Auto switch model Electrical entry direction Lead wire length (mm) Load voltage Type Electrical entry Indicator light Wiring (Output) Special function Applicable load 5 (Z) AC DC 0.5 (Nil) 3 (L) Perpendicular In-line Z76 5 V IC circuit 3-wire Yes Reed switch Z73 12 V 100 V Grommet Relay, PLC 24 V 2-wire Z80 5 V, 12 V 100 V or less No IC circuit Y59A Y69A 3-wire (NPN) IC circuit 5 V, 12

ITVH

SRF ITV +24 V +24 V Output power Output power IC 0 V 0 V Control/Input power Control/Input power ITVH ITVH 24 V +24 V ITVX 4. Each product needs to be powered by one power supply unit.

Hydraulic Filters

06 to 08 AL-197H-V 10 to 12 FKM-70 or EPDM-70 AL-198H-V Phosphoric ester 16 AL-199H-V 20 to 24 AL-200H-V 28 to 32 AL-201H-V Note) The material of seals (AL-196H-V to AL-201H-V) is EPDM-70.

Series AP500

Code Delivery pressure Unit psig/bar MPa Code 1 V V No code MPA 10 15 30 5 to 100 psig (0.034 to 0.7 MPa) 5 to 150 psig (0.034 to 1.0 MPa) Preset to 300 psig (2.1 MPa) 2) Pressure gauge unit MPa or psig/bar selectable.

Smooth Cylinder Series CQSY

NPN) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) Reed switch Solid state switch A96V A96 5 V IC Yes Yes Grommet A93 M9N M9P M9B F9N F9P F9B F9NW F9PW F9BW F9BA A93V F9NV F9PV F9BV F9NWV F9PWV F9BWV 100 V 24 V 12 V Relay, PLC 5 V, 12 V IC 12 V 5 V, 12 V IC Relay, PLC 24 V Grommet 12 V Diagnostic indication (2-color) 5 V, 12 V IC

5 Port Solenoid Valve SY Series

50/60 Hz 110 V 50/60 Hz 200 V 50/60 Hz 220 V 50/60 Hz M plug connector Sonic conductance C [dm3/(sbar)] L plug connector 24 V Series M8 Connector Pressure center 12 V DIN terminal Closed center Exhaust center 6 V Grommet { } 4/25/3 (A/BEA/EB) Double 5 V Single 3 V P.1 SY3 20 0.65 Body ported Base mounted Body ported Base mounted SY5 20 2.4 SY7 20 3.3 SY9 20 8.6 P.19 SY3 40 1.1 SY5 40 2.8

ZCUK

F9BWV 2-wire Relay, PLC IC circuit No 5 V, 12 V 100 V or less 3-wire (NPN) IC circuit 5 V, 12 V 3-wire (PNP) IC circuit 2-wire 12 V Relay, PLC 24 V Grommet 3-wire (NPN) 3-wire (PNP) 5 V, 12 V Diagnostic indication (2-color indication) 2-wire 12 V Lead wire length symbols: 0.5 mNil (Example) M9N 3 mL (Example) M9NL 5 mZ (Example) M9NZ Solid state switches marked with are produced upon

Clean Air Module

Nil Without restrictor With restrictor S Digital flow switch ON/OFF valve Nil Without digital flow switch NPN open collector 1 output + Analog output (1 to 5 V) PNP open collector 1 output + Analog output (1 to 5 V) NPN open collector 2 outputs PNP open collector 2 outputs NPN open collector 1 output + Analog output (4 to 20 mA) PNP open collector 1 output + Analog output (4 to 20 mA) P1

EX260-SPN-A_eng

Caution: PWR(V) Load voltage for the valve is not supplied or is outside the tolerance range. (19 V or less) Mounting hole Mounting hole for connection to the valve manifold 7 OFF SV0 V 0 V for solenoid valve 2 4 5 2 Accessories 3 SI24 V +24 V for SI unit operation Warning: WARNING indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury

ZQ-OM01601

DC24V10% DC24V 10% DC(+) DC(-) 8 / / 9 ( ) 10 , 5 m / / 11 1015 10 "-M" (kPaMPa) ( ) "M" 12 SI kPa,MPa 48 - No. 13 14 () 15 () / ( ) () 49 - 80mA 3.5 F.S.1 1F.S. 50 - 100.0-100.0 kPa 105.0-105.0 kPa 500 kPa 0.1 kPa DC24 V 10(p-p)10() 40 mA NPN PNP OUT1OUT2 80 mA DC26.4 V 2 V (80 mA ) 2.5 ms (20,100,500,1000,2000 ms ) 0.2F.S.1 digit 1 0 3 1/2 7 LED () 2% F.S

IDX-OM-U021

1.6MPa 1-2-4 P 1-2-5 R 30A (IDF100F, IDF125F, IDF150F) 30Ma 1-2-6 V ON 1.5 OFF 0.5 1-2-7 3 2 1 1-2 IDF100150F 1 2 IDX-OM-U021 1 1-3 A 3 300 A 1-3 IDF100150F 1 3 IDX-OM-U021 1 B V IDF100F V IDF125F V IDF150F B 1-3 IDF100150F 1 4 IDX-OM-U021 1 3.6 5.2 (IDF100F, 125F) R OFF 5.2 L1 L2 L3 M5 9.5mm 3.5mm 2 1,2 3,4 5,6 L1,L2,L3 PE: L1 L2 L3 PE 1 2 3 4 5 6 M4 9.5mm

IDX-OM-M051

Rear Ball valve Test button Flush button Option: V Heavy-duty IDF100F auto drain Check the operation once a day. Option: V IDF125F Option: V IDF150F Enlarged view of part B IDF100F~150F-W 1.3 Name and function of parts 1 5 IDX-OM-M051 Air Dryer 1. Name and Function of Parts Layout of parts on front panel Controller Refer to 3.6 for checking operation.

IDX-OM-Z004

K 1.6MPa 1.2.4 P 1.2.5 R 30A (IDF100F, IDF125F, IDF150F) 30Ma 1.2.6 V ON 1.5 OFF 0.5 1.2.7 5 4 1.2 IDF100150F-W 1 2 IDX-OM-Z004 1 1.3 A ( 4) ( 4) Y 3 A 1.3 IDF100150F-W 1 3 IDX-OM-Z004 1 ( 5) ( B 5) Y V IDF100F V IDF125F V IDF150F B 1.3 IDF100150F-W 1 4 IDX-OM-Z004 1 3.6 5.2 (IDF100F, 125F) R OFF 5.2 L1 L2 L3 M5 9.5mm 3.5mm 2 1,2 3,4 5,6 L1,L2,L3

ø32, ø40, ø50, ø63 Series CVQM Compact Cylinder with Solenoid Valve/ Guide Rod Type

Relay, PLC Yes Grommet 24 V 3-wire (NPN) Diagnostic indication 2-color indication 5 V, 12V IC circuit 3-wire (PNP) 12 V 2-wire A96 A93 A90 A96V A93V A90V 5 V IC circuit 3-wire (NPN equivalent) Yes 100 V 12 V Grommet Relay, PLC 24 V 2-wire 5 V, 12 V IC circuit 100 V or less Solid state auto switches marked with are produced upon receipt of order.