Compact 5-Port Solenoid Valve

178.4 187.4 196.4 205.4 214.4 223.4 232.4 241.4 250.4 259.4 L3 135.5 148 160.5 160.5 173 185.5 185.5 198 210.5 223 223 235.5 248 248 260.5 273 285.5 285.5 298 310.5 310.5 323 335.5 L4 125 137.5 150 150 162.5 175 175 187.5 200 212.5 212.5 225 237.5 237.5 250 262.5 275 275 287.5 300 300 312.5 325 L5 20.5 22 24 19.5 21 23 18.5 20 22 23.5 19 21 22.5 18 20 21.5 23.5 19 20.5 22.5 18 19.5 21.5 33

Fieldbus System

10 P. 12 How to Order Specifications Parts Description Dimensions Series SV (IP67) End Plate Unit to supply power to the EX600 system P. 2 P. 8 P. 10 P. 11 How to Order Specifications Parts Description Dimensions P. 25 Handheld Terminal Series S0700 (IP40) Parameter setting and I/O monitor tool P. 2 P. 8 P. 9 P. 11 How to Order Specifications Parts Description Dimensions P. 33

JXCx-OMT0002

Product Specifications . 26 4.1 Basic Specifications . 26 4.3 Parts Description . 28 4.4 Dimensions . 30 (1) Direct mounting . 30 (2) DIN rail mounting . 30 4.5 Mounting . 31 (1) Mounting. 31 (2) Grounding . 32 (3) Mounting location. 33 5. Initial Setting Method . 34 5.1 Controller setting (IP address setting) . 34 -1No. JXC-OMT0002-C The saved IP address will be lost.

5 Port Solenoid Valve Series SV1000/2000/3000/4000

No. 30 31 32 33 34 35 36 37 38 39 VQ L dimension 473 485.5 498 510.5 523 535.5 548 560.5 573 585.5 Mass (g) 85.1 87.4 89.6 91.9 94.1 96.4 98.6 100.9 103.1 105.4 VQ4 No. 40 41 42 43 44 45 46 47 48 49 L dimension 598 610.5 623 635.5 648 660.5 673 685.5 698 710.5 VQ5 Mass (g) 107.6 109.9 112.1 114.4 116.6 118.9 121.1 123.4 125.6 127.9 No.

Table of Contents

(mm) Size Size 15 20 30 40 15 20 30 40 Thread Shaft type Q1 = M Q1 = M K T K T K T K T Thread M3 x 0.5 M3 x 0.5 2.5 2.5 2.5 2.5 2.5 2.5 2.5 2.5 L1 = L1= M4 x 0.7 M4 x 0.7 3.3 3.3 3.3 3.3 3.3 3.3 L1 L1 M5 x 0.8 M5 x 0.8 4.2 4.2 4.2 4.2 Q1 Q1 11-2-33 33 Series CRB2 (Size: 10, 15, 20, 30, 40) Made to Order Specifications: -XC1, 2, 3, 4, 5, 6, 7, 30 -XC1 to XC7, -XC30 Shaft type W Standard

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(mm) Size Size 15 20 30 40 15 20 30 40 Thread Shaft type Q1 = M Q1 = M K T K T K T K T Thread M3 x 0.5 M3 x 0.5 2.5 2.5 2.5 2.5 2.5 2.5 2.5 2.5 L1 = L1= M4 x 0.7 M4 x 0.7 3.3 3.3 3.3 3.3 3.3 3.3 L1 L1 M5 x 0.8 M5 x 0.8 4.2 4.2 4.2 4.2 Q1 Q1 11-2-33 33 Series CRB2 (Size: 10, 15, 20, 30, 40) Made to Order Specifications: -XC1, 2, 3, 4, 5, 6, 7, 30 -XC1 to XC7, -XC30 Shaft type W Standard

High-precision Digital Pressure Switch ( compatible)

The recommended bend radius of the lead wire is 6 times the outside diameter of the sheath, or 33 times the outside diameter of the insulation material, whichever is larger. Replace the damaged lead wire with a new one. Wire correctly. Incorrect wiring can break the Pressure switch. Do not perform wiring while the power is on.

Digital Pressure Switch ( compatible)

The recommended bend radius of the lead wire is 6 times the outside diameter of the sheath, or 33 times the outside diameter of the insulation material, whichever is larger. Replace the damaged lead wire with a new one. Wire correctly. Incorrect wiring can break the Pressure switch. Do not perform wiring while the power is on.

High-precision Digital Pressure Switch

The recommended bend radius of the lead wire is 6 times the outside diameter of the sheath, or 33 times the outside diameter of the insulation material, whichever is larger. Replace the damaged lead wire with a new one. -6No.PS-OMV0009-E Wire correctly. Incorrect wiring can break the Pressure switch. Do not perform wiring while the power is on.

Servo Motor Controller (24 VDC)

Setting Data Entry.28 7.1 Step data.28 7.2 Basic parameter.31 7.3 Return to origin parameter .33 8.

CQS

50l x 55l x 60l M3 x 35l x 40l x 45l x 50l x 55l x 60l M5 x 40l x 45l x 50l x 55l x 60l x 65l x 70l x 75l x 80l x 85l M5 x 45l x 50l x 55l x 60l x 65l x 70l x 75l x 80l x 85l x 90l 6.5 6.5 Head side mounting style Mounting bolt 6.5 6.5 Rod side mounting style 6.5 6.5 Mounting bolt 8.5 8.5 Note) When mounting a cylinder with through-hole, be sure to use the attached plain washer. 7-4-32 33

VQ4000

A A B A B A B A B A B A Rc 3/8: Rc 3/8 thread SMC SMC SMC SMC SMC SMC SMC 7 B B B A A A A A A A C8: One-touch fitting for 8 4 A 2 B C10: One-touch fitting for 10 6 C12: One-touch fitting for 12 4 A 2 B 5 L1 L2 4 A 2 B 4 B B 4 A 2 B 3 4 A 2 B 2 P = 25 P = 25 4 A 2 B 1 44 50.5 X Stations 12 38 26.5 Cable length (600 or 1500 mm) D side Manual override 15 12 16.5 Indicator light 43.5 2-5-32 33

0.5

ESD-STM3.1-2006 standards Weights AC Adapter Specifications Input voltage 100 to 240 VAC, 50/60 Hz Output voltage 24 VDC Output current 1.9 A max Ambient temperature 0 to 40C, Stored: 20 to 65C Ambient humidity Operating, Stored: 5 to 95%RH (No condensation) Weight 375 g (including AC cord, connector) IZF21 IZF31 Body 430 g 605 g Bracket 146 g 220 g Automatic cleaning unit 96 g 127 g Louver 33

3

B B1 2 x P Port size 2 x P Port size Bracket mounting hole a1 (VXS23, 25) a a1 (VXS24, 26) 6.5 10.5 Dimensions (mm) Model Port size P A B B1 C D E F G H J M Bracket mounting a b d e f g h i j VXS23 1/4, 3/8 21 57 28.5 87.5 35 10.5 22 40 35 10 M5 56 75 2.3 30 6.5 10.5 31 37 VXS24 1/2 28 70 37.5 94 35 14 22 48 35 14 M5 56 75 2.3 34 6.5 10.5 35 41 VXS25 3/4 33.5 71 38.5 105.5 40 17 24.5 62 33

SI Unit for Vacuum Manifold

Accessories 33 10. Troubleshooting 38 -2No.EX-OMZ0018 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of "Caution", "Warning" or "Danger".

T

TCU 1 core For flexibility and moving applications 2 cores 1 core Polyurethane Coil Tubing Series 10-TCU 3 cores 2 cores 3 cores For flexible multi-tube applications Polyurethane Flat Tubing Series TFU 2 cores For flexible multi-tube 3 cores Polyurethane Flat Tubing Series 10-TFU 2 cores 3 cores Related Products: Blow system and air system for drive inside clean room 15-6-31 15-6-32 15-6-33

I

2.5% 1% + -1% Wiring: The use of three-core screened cable is strongly recommended with the screen earthed at the end away from the VY Valve. 02 14 2.0 3 03 38 3.3 body Ported Type 04 12 3.9 Terminal Designations are as follows: 04 12 7.2 5 06 34 8.9 1 = 24v Power Supply 2 = Control Signal 3 = Common Negative for both power and signal. 10 1 10 5% 2% + -2% 7 10 1 114 17 12 114 18 9 14 112 2 33

VQ20/30

L 62 6 9 12 15 18 21 24 27 30 33 36 39 42 45 47 50 53 56 59 785.5 85.5 123 160.5 198 235.5 273 310.5 348 385.5 423 460.5 498 535.5 573 598 635.5 673 710.5 748 DIN rail mounting bracket VVQZ100-DB-5 This bracket is used for mounting the manifold on the DIN rail. DIN rail mounting bracket is attached on the manifold. 1 set of DIN rail mounting brackets for 1 manifold includes 2 brackets.

21

Integral Clevis (E) (mm) A 14.5 AL 12 B1 13 CD 8 CI 20 CX 12 D 8 E 20 F 13 FL 10.5 G 6 H 31 H1 5 I 27.9 KA L 12 Bore size 0 0.033 0 0.033 0 0.033 0 0.039 20 25 32 40 Width across flats 6 length 3.5 17.5 15 17 8 22 12 10 26 13 10.5 6 34 6 33.4 Width across flats 8 length 3.5 12 17.5 15 17 10 27 20 12 26 13 10.5 8 34 6 37.4 Width across flats 10 length 3.5 15 23.5 20.5 22 10 33 20 14 32 16

Multi Channel Pressure Sensor Controller

The recommended bend radius of the lead wire is 6 times the outside diameter of the sheath, or 33 times the outside diameter of the insulation material, whichever is larger. Replace the damaged lead wire with a new one. Wire correctly. Incorrect wiring can break the Controller. Do not perform wiring while the power is on.