Valve Type: 33 (N.C. Base Mounted), Voltage: 6 (12VDC), Electrical Entry: G (Grommet), Orifice Size: 40 (4mm), Port Size: 01 [Base Mount w/Sub-Plate 1/8(6A) or Body Ported 1/8(6A)]

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

L1 D L2 L3 L4 L5 L6 L8 Model Port size AS2000E-01 10 4.5 17 16 5 57 30 61.5 40 15.5 1/8 AS2000E-02 12 4.5 23 20 5 59 30 63.5 40 17 1/4 AS3000E-02, 03 5.5 25 26 5.25 69 45.5 76 56 20.6 13.25 1/4, 3/8 Note 1) Reference dimensions AS4000E 2 x 1/4 to 1/2 72 (Max. 80) (1) Effective thread depth 6 2 x M4 x 0.7 664

3 Port Air Operated Valve

1/8 12(PA) port NO 2A VFRA 42 52 NC 12 12 VPA4 3R 1P NC SYJA (1/8) 12(PA) port 12.6 13.5 83 23 VZA 91 VTA VGA 74.5 73.5 VPA VPA 28.5 X VPA3 M5 x 0.8 (Breathing hole) 13.5 28.5 57 1/4, 3/8 1(P) port For vacuum/VPA544V-102 03 A B 1/4, 3/8 2(A) port 13.5 28.5 51 2 x 5.2 (For mounting) 47 23 1/4, 3/8 3(R) port 17.6 NO 2A 42 52 NC 12 3R 1P NC 1/8 12(PA) port 13.5 12.6 91 23 74.5 73.5 28.5 X M5

Speed Controller with

Body size 100 200 205 300 400 Metric size Inch size M3, M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard Grease-free (Sealant: Fluoro coated) + Restrictor (Without Check Valve) -X21 02 23 04 06 08 10 12 01 03 07 09 11 13 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" 2 3.2 Ex.)

EXxx-OMW0014CN

SI 2 16 16 Valves32 32 Valves 2 4 D 012 31 Byte 16 Valves 32 Valves 0 Valve coils 0-7 Valve coils 0-7 1 Valve coils 8-15 Valve coils 8-15 2 Valve coils 16-23 3 Valve coils 24-31 . 6-3 39 No.EX-OMW0014CN-A 6.4.

Rotary Table

(g) Size 1 2 3 7 Basic Type 75 105 150 250 High precision Type 80 115 165 265 * Values excluding the weight of auto switch Effective torque 0.8 7 Effective torque (Nm) 0.6 3 0.4 2 0.2 1 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 Operating pressure (MPa) 19 - Internal construction and parts MSQ1 to 7 20 11 18 12 17 23 21 2 24 7 1 15 14 13 6 14 15 24 5 10 9 16 22 8 4 3 19 24 O ring 4 23 Hexagon socket set

MRQB-OM0002

MRQB32,40 18 1 17 2 16 2 34 2 15 1 33 O 1 14 1 32 4 13 2 31 2 12 O 1 30 1 11 2 29 1 10 1 28 S 1 9 1 27 S 1 8 O 2 26 1 7 1 25 2 6 1 24 4 5 1 23 4 4 1 22 4 3 1 21 O 3 2 1 20 O 1 1 1 19 1 12 14 2 28 1 13 2 27 1 12 4 26 1 11 1 25 R 1 10 1 32 24 2 9 2 23 2 8 4 22 8 7 1 21 2 6 2 20 2 5 1 19 2 4 1 18 O 4 3 1 17 O 4 2 1 16 4 1 1 15

LEC-T1_C

LEC-OM08003 // LEC-T1 Series LEC6 LECPA TB Ver2.1 .5 .7 1. .9 1.1 .9 1.9 2.10 1.2 .11 1.11 2. .12 3. .13 3.1 .13 (1).13 (2)Tree .13 3. .14 (1).14 (2)Tree .15 4.16 5. .17 5.1 .18 5.2 .19 (1).19 (2).19 5.3 .20 (1).21 (1-1) LECPLECA 22 (2) .23 (2-1) LECPLECA 23 (2-1-a) TB Ver1.**. 23 (2-1-b) TB Ver2.**. 25 (2-2) LECPLECA 27 (2-2-a) TB Ver1.**. 27 (2-2-b) TB Ver2.**. 29 (2-3) LECPLECA .32 1

MHT2

2 to 23 Finger opening angle (Total) 0.80 1.09 1.93 2.8 Weight (kg) Gripping moment Note) 12.4 36.0 63.0 106 (Effective value) (Nm) Note) At the pressure of 0.5 MPa 12-9-2 3 Angular Style Air Gripper Toggle Type Series MHT2 Effective Gripping Force Workpiece gripping point should be within the range indicated in the graph.

180 ° Angular Type Air Gripper Rack & Pinion Type MHW2 Series ø 20, ø 25, ø 32, ø 40, ø 50

. : 20, 25, 32 : GR-S-010(10 g) 40, 50 : GR-S-020(20 g) 713 MHW2 Series Dimensions MHW2-20D Flat finger type (Standard) 20 2 x M5 x 0.8 thread depth 7 (Mounting thread) 17 60 4 x M5 x 0.8 thread depth 10 (Mounting thread) Bottom through hole dia. 4.2 (Mounting hole) 45 2 x M5 x 0.8 thread depth 10 (Mounting thread) 35 23 26 27 36 18 23 7 2 21H9 +0.052 depth 3 0 +0.2 +0.1 12 16 36 26 4 x M4

MHT2

2 to 23 Finger opening angle (Total) 0.80 1.09 1.93 2.8 Weight (kg) Gripping moment Note) 12.4 36.0 63.0 106 (Effective value) (Nm) Note) At the pressure of 0.5 MPa 12-9-2 3 Angular Style Air Gripper Toggle Type Series MHT2 Effective Gripping Force Workpiece gripping point should be within the range indicated in the graph.

MXU

Auto Switch Groove Position D-A, D-A9V W D-M9, D-F9W A D-M9V, D-F9WV W Bore size (mm) Application B B A W A B stroke 6 5 to 30 3.5 0 17 6.5 13 3.5 2.5(5) 17 4.5 5 to 20 17 13 17 10 25 7.5 3.5 20 16 2.5 7.5 20 1.5 0.5 30 19 15 19 (1) 5 27 23 27 10 22 18 22 15 27 23 27 16 8 4 2 8 2 0 B A 20 22 18 22 Bore (mm) 6 10 16 25 27 23 27 (0.5) 6.9 10 30 27 23 27 8.8 14 13.9 19 Note 1) Negative figures

NAMUR Interface 3 Port Solenoid Valve Series VFN200N 1

Applicable heavy-duty cord O.D.6 to 8 Pg9 24 36.5 66.5 57 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 32 40 14 Pilot EXH. 2-5.5 Mounting hole 2-1/4 3 1 Manual override (Non-locking) 9 23 VFN212N--02-D 213 19 23 Applicable heavy-duty cord O.D.6 to 8 Pg9 24 66.5

Shuttle Valve/AND Valve, with One-Touch Fittings, SeriesVR12

F

How to Order VR 12 1 06 0 F Body size Applicable tubing outside diameter Metric sizes Inch sizes 1 2 1/8 standard 1/4 standard 23 04 06 08 10 01 03 07 09 11 3.2 4 6 8 10 1/8" 5/32" 1/4" 5/16" 3/8" With One-touch fitting Use 1/8" tubing for 3.2. 1 Series VR120F Application Circuit Examples Self holding circuit 1. When "A" is turned ON, output goes ON. 2.

EXxx-OMZ0016

1 8 User setting lower level detection 0 9 Detection of the upper limit of the ON/OFF cycles 4 16 Detection of US1 power supply voltage drop 9 17 Detection of US2 power supply voltage drop 8 19 Connection failure between units (during operation) 11 System diagnosis 2 20 Connection failure between units (when power is supplied) 12 22 Detection of system error (when power is supplied) 14 23

MXU

Auto Switch Groove Position D-A, D-A9V W D-M9, D-F9W A D-M9V, D-F9WV W Bore size (mm) Application B A B B W A stroke 6 5 to 30 0 13 3.5 3.5 6.5 17 2.5(5) 17 4.5 5 to 20 13 17 17 10 25 3.5 16 7.5 7.5 2.5 20 1.5 20 0.5 30 15 19 (1) 19 5 23 27 27 10 18 22 22 15 23 27 27 16 4 8 8 2 2 0 A B 20 18 22 22 Bore (mm) 6 10 16 25 23 27 27 (0.5) 10 6.9 30 23 27 27 14 8.8 19 13.9 Note 1) Negative figures

AS-FG

AS1201FG-M5-23-X12 AQ Ex.) AS1201FG-M5-23-X21 Note 1) Not particle-free Note 2) Throttle valve is only compatible with the part no. of the meter-out type. Throttle Valve (Without Check Valve) 3 X214 ASV Ex.) AS1201FG-M5-23-X214 AK Note) Throttle valve is only compatible with the part no. of the meter-out type.

Electronic Pressure Switch Series (Separate Type)

Adsorption Confirmation 2 Sensor installed close to the pad (No. 2) 1 Sensor installed close to the pad (No. 1) Series PSE54 + PSE200 Series PS1100 16-3-23 16-3-1 16-5-1 Pad adsorption can be confirmed easily. Response delays, caused by piping, will not be a factor due to the close proximity of the sensor to the pad.

SYJA3000

(Pilot port) (Mounting holes) (Pilot port) (Mounting holes pitch) A B 1 A B 11 5 3 1 24 A B 1 1 R P 10 (Mounting holes for manifold) 2.6 237.5(Mounting holes pitch) 19 4 43 15 70.5 48 17.5 70.5 (Non-locking) Manual override 24.5 20 23 11.5 (Mounting holes) 2.6 211 4-Rc(PT)1/8 (Non-locking) Manual override 33.5 (Piping port) 5-M5 X 0.8 21.5 2-1.8 (Bleed port) With filter (80 Mesh) (Piping

Speed Controller with One-touch Fittings

Made to Order Body size 100 200 205 300 400 M3, M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard Grease-free (Sealant: Fluoro coated) + Restrictor (Without Check Valve) -X21 Metric size 02 23 04 06 08 10 12 Inch size 01 03 07 09 11 13 Lock nut option 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" 2 3.2 Ex.)