VFRA3000, 4000 Series

Effective area at supply side (mm2) PA 44 38 32 4 2 (A)(B) 4 2 (A)(B) Single Double S at P1=0.7MPa/P2=0.5MPa PB 38 40 31 Number of pilots Effective area at exhaust side (mm2) AEA 5 1 3 (EA)(P)(EB) 5 1 3 (EA)(P)(EB) 90 4 2 (A)(B) 4 2 (A)(B) 77 S at P2=0.5MPa BEB 5 1 3 (EA)(P)(EB) 5 1 3 (EA)(P)(EB) How to Exchange Air Operated Valves Loosen set screw and take air operated valve out vertically

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

Series MLGP Dimensions 40 to 63/MLGPM, MLGPL/Retraction locking (mm) LOCK 1in = 25.4mm XAH7 depth XL T-slot dimensions 4-YY depth YL a b XB XAH7 c d e X XC XAH7 Bore size (mm) XL a b c d e 6.5 11 10.5 5.5 40 4 Section XX detail 8.5 13.5 13.5 50 7.5 4.5 WB Z WA Section XX 17.8 63 11 18.5 10 7 Bottom view Section XX L 4-NN through Section XX WA Z IA IC 4-MM depth ML 4-OA through 4-OB counter

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

SUP, Common EXH/Top Ported Type 20 Manifold Grommet: G DIN terminal: D 4-Rc(PT) 1/8 (ports P, R) Manual override (non-locking) Applicable cord O.D. 4 to 6.5 Max .10 71.5 78.5 71 Light (DZ type only) 2-4.5 (mounting holes) 67.5 59 19 17 2 R P P R 34 2.3 7 20 Pg.7 4-Rc(PT) 1/8 (ports P, R) A A A P = 19 13.5 L2 L1 4 1 7 8 26 47.5 Approx. 300 (lead wire length) n-Rc(PT) 1/8, M5 x 0.8 (port A

Miniature Tubing & Miniature Fittings Series TU/M

Barb elbow Barb fitting Barb one-touch Reducer Port size M3 x 0.5 M5 x 0.8 Tubing size 3.2 4 Port size M3 x 0.5 M5 x 0.8 Fitting size 3.2 4 Piping for compact actuator Scale :100% Scale :100% Scale :100% Piping for compact pressure sensor 4 x 7 Scale :100% Sectional area 113.04mm2 4 75% Reduction 2 x 7 Sectional area 2 28.26mm2 Easy size reduction Reduction of the tubing size from standard

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

Flow Rate and Effective Area AS12 1F-M3 AS13 1F-M3 AS12 1F-M5 AS13 1F-M5 AS22 1F-01 AS23 1F-01 AS22 1F-02 AS23 1F-02 AS32 1F AS33 1F AS42 1F AS43 1F Model Metric size 3.2, 4 3.2, 4, 6 3.2, 4 6, 8, 10 8,10 4 6 6 8 10 12 10, 12 Tubing O.D. 1/8" 5/32" 1/8", 3/16" 1/8" 5/32" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 3/8" 1/4" 1/4", 5/32" Controlled flow (Free flow

CJP

Bore size H4 H6 Nil 4/For 2.5 tubing 6/For 4 tubing Without hose nipple 6 10 15 6 mm 10 mm 15 mm Refer to caution on piping on page 6-2-15.

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators Note 2) 2 x 3.5 through M5 x 0.8 32 0.5 15.5 25 6 Rod end nut 9 Flat washer 5 9.2 10.5 4 4 10 15.5 27 + Stroke 14 25 8 4 41 + Stroke 16 17.5 5 Note 2) 2 x 2 x 6.5 counterbore 2 x 2 x M4 x 0.7 effective depth 7 2 x M5 x 0.8 (Piping port) M5 x 0.8 (Relief port) 5.5 2 x 3.5 through 38 M6 x 1.0 0.5 20 29 8 Rod end nut 10 Flat washer 11.5 6 12 4

Series MHR2 11- 2 Finger Rotary Actuated Air Gripper 22- Size: 10, 15, 20, 30

port 2 2 3-0.02 0 3-0.02 0 8-0.05 0 +0.02 3 x 3 0 depth 6 (A, B, C common view) Open: 16, Closed: 10 12 12 2 x M3 x 0.5 thread depth 6 (Thread for mounting attachment) 4 4 4 4 With Auto Switch: MDHR2-10R 11223 x M3 x 0.5 thread depth 6 P.C.D.24 (Mounting thread) MDHR2-10E port location 112233.4 B 32 36 120 120 D A 32 +0.02 2 x 3 0 depth 6 9.5 Finger closing port Finger opening port M3 x

VK300

x Rc 1/8 (P, R port) (Lead wire length) 2 x 4.5 4 x Rc1/8 8 (P, R port) (Mounting hole) 2A 2A 2A 34 2.3 20 7 (Pitch) 7 44.5 (Station 1) (Station n) 4 x M3 x 0.5 depth 6 (Bracket mounting screw) L Dimension n L n: Stations 1 35 27 20 396 388 13 32 51 70 89 108 127 146 165 184 203 222 241 260 279 298 317 336 355 374 2 54 46 3 73 65 4 92 84 5 111 103 6 130 122 7 149 141 8 168 160 9 187 179 10

Steam Valve

N.C. 6A 8A 10A 10A 15A 20A 25A 32A 32F 40A 40F 50A 50F 1 8 1 4 3 8 3 8 1 2 3 4 7 1 15 2 20 3 25 4 1 1 1 4 32 5 11 4 B Flange 11 2 40 6 11 2 B Flange 2 50 7 2B Flange 634 Steam Valve: 2 Port Valve For SteamVND Series Model Port size Flow rate characteristics Weight (kg) Orifice dia.

CJP

Bore size H4 H6 Nil 4/For 2.5 tubing 6/For 4 tubing Without hose nipple 6 10 15 6 mm 10 mm 15 mm Refer to caution on piping on page 6-2-15.

MU

S 55 58 60 74 75 P M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 NY 26 28 36 42 46 NX 6 6.5 8 10 11 NC 7.5 depth 4.5 9 depth 5.5 10.5 depth 6.5 13.5 depth 8.5 17 depth 10.5 MM M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 NS 43 45 44 54 53 N 14 15.5 16 21.5 21.5 KA 10 12 14 18 18 ND M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 NE 4.3 5.1 6.9 8.7 10.5 ZZ 69 72 75 92 96 Model MUB25 MUB32 MUB40

EXxx-OML0010CN

Hold/Clear HandheldSwitch HandheldPLCHold/Clear SwitchSI Hold/Clear -30No.EX-OML0010CN-C 4. 4. Clr Counter Value () -31No.EX-OML0010CN-C 5. 5. Parameter Default ( ) 6. 6. Clear Error Log -32No.EX-OML0010CN-C 4. Parameter Setting() 2. [4.Parameter Setting] Waring 1. 3. 4. 1. 34 2. 34 3. 35 4. 41 -33No.EX-OML0010CN-C 1. a) b) c) d) 2.

Digital Flow Switch (Remote type monitor unit)

An application which could have negative effects on people, property, or animals requiring special safety analysis. 4.

PSxx-OMG0005CN

2030 10 1% * -7No.PS-OMG0005CN-E 0 01 28 C2 PSE56 0 (01MPa) (1) C2 1 (0-101kPa) 3 (-100100kPa) *PSE200 4 (0500KPa) (15V) 01 R1/8(M5) 28 (420mA) 02 R1/4(M5) C01 Rc1/8 N01 NPT1/8(M5) N02 NPT1/4(M5) A2 URJ1/4 B2 TSJ1/4 ZS-28-C 1 Rc1/4 ZS-31-X175 1 NPT1/4 ZS-31-X186 1 Rc1/8 ZS-31-X188 1 NPT1/8 ZS-31-X189 1 15[V]F.S.=514[V] (1F.S.40.010.04[V]) F.S. ( 25[]ON-OFF (1K 1M A/D 5V A/D

CVRA1-E

Table 15 Parts where grease is to be applied Application of grease Grease Body (inner sliding surface) Piston(Seal groove) Slider(Sliding surface) GR-S-010 Piston seal Tube gasket 23 24 25 O-ring 5 11 1 16 12 7 23 24 12 11 4 25 4 24 25 23 -34- (2) Mount the tube gasket 11 to the left cover 3 to mount to the body 1 . (3) Insert the rack 16 and the piston 4 into the body 1 .

MHx-OMU0057

715 1,275 SC 235 425 760 1,370 2) 4 - 2. 2-1. 1. () 2. 3. 4. 2-2. . 2 L H L H (1) (2) (3) 3. 5 - 4. 5. 6. <> (1) (2) 2 7. 2-3. 1. 2. 3. 4. 5.

Direct Operated 3-port solenoid valve

Coil Terminal no.2 4) Remove cable gland (4), washer (5) rubber seal (6). Wiring 1) Insert cable gland (4), washer (5) and rubber seal (6) into cable In the case of indicator light assembly DC Terminal no.1 (+) (7) in order, and insert it into housing (2). Coil 2) Loosen screws (11) on terminal (3). Insert lead wires (10) and tighten screws (11) again.

Precision Regulator

(Note 4) Repeatability(Note 5) Within 0.5% F.S.(Note 4) Air consumption(Note 6) 4.4L/min(ANR) or less (at supply pressure of 1.0MPa) Ambient and fluid temperature -5 to 60oC (No freezing) Port size Rc1/4 Port size of pressure gauge Rc1/8 [2 places] Weight 0.30kg -4- (Note1) Minimum supply pressure: At a downstream side flow rate of zero. Be sure to keep the minimum supply pressure.

SI unit for EtherCAT

Fieldbus interface connector layout BUS OUT: M12 4-pin socket, D-coded (SPEEDCON) No. Designation Description 1 TD+ Transmit Data + 2 RD+ Receive Data + 3 TDTransmit Data 4 RDReceive Data BUS IN: M12 4-pin socket, D-coded (SPEEDCON) No.