CQS

45 50 55 60 65 70 30 35 40 45 50 55 60 65 70 75 Special long bolt for through hole mounting is available as an option.

Rotary Table/

O-ring Steel balls Size: 70 to 200 only Shock absorber Replacement parts Description Kit no.

Table of Contents

2 Detent assembly VF4000-12A Refer to How to Order Pilot Valve Assembly on page 3-8-70. Pilot valve assembly !

Table of Contents

70 ZF 60 60 50 50 ZP 40 40 30 30 ZCU 20 20 10 10 AMJ 0 0 10 20 30 40 50 60 70 80 90 100 110 120 20 60 100 140 180 220 260 300 130 Suction flow rate (/min(ANR)) Suction flow rate (/min(ANR)) Misc.

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

70 80 ZZ 121 121 121 131 146 185 238 292 344 M 83 83 83 93 108 147 200 254 306 Z 81.5 81.5 81.5 91.5 106.5 145.5 198.5 252.5 304.5 K 31 41 51 61 71 96 121 146 171 J 44 44 44 54 69 108 113 155 190 I 10 10 10 10 10 10 58 70 87 NA 2 2 2 2 2 2 4 4 4 NN 2 2 2 2 3 4 5 6 7 KA 169 223 275 H 45 45 45 55 35 35 35 38 44 HA 35 35 35 35 35 70 70 76 88 G 15 15 15 15 15 19 37 41 19 GA 25 25 25 35 50 54

Table of Contents

70 0 0 40 80 120 160 200 100 200 300 Outlet air flow rate (l/min (ANR)) Outlet air flow rate (l/min (ANR)) IDG100L (Type B products group) Refer to pages 14-19-28 to 29.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

8% 0.1 to 10 L/min 0.5 to 10.5 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.1 to 6 L/min 0.3 to 6.3 L/min 5 V 20 mA 30% 70% PF2M710 92% 8% 0.3 to 25 L/min 1.3 to 26.3 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.3 to 15 L/min 0.8 to 15.8 L/min 5 V 20 mA 30% 70% PF2M725 92% 8% 0.5 to 50 L/min 2.5 to 52.5 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.5

Table of Contents

4 70 >= 7 >= 70, 9= 5,'., ?4 0( 9= 5,'., ?

Aluminum High Vacuum Angle Valve

M12, L = 70 Refer to part no.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

8 @4 CS type snap ring Parallel pin Parallel key Seal washer Plug O-ring Steel balls Shock absorber @5 Size: 10 to 50 Size: 70 to 200 Carbon steel @6 NBR Brass NBR Stainless steel @7 @8 @9 #0 #1 Size: 70 to 200 only Size: 70 to 200 only Replacement Parts Description Kit no. Note 10 P523020-5 30 A set of above numbers r, !2, !3, !7, !

Free Mount Cylinder

(g) Stroke (mm) Model 5 10 15 20 25 30 40 50 60 70 80 90 100 33 (38) 36 (46) 40 (50) 43 (53) 46 (56) 50 (60) 57 (67) 64 (74) 71 (81) C(D)UKW6-D 51 (56) 56 (66) 60 (70) 65 (75) 69 (79) 74 (84) 83 (93) 92 (102) 101 (111) C(D)UKW10-D 84 (109) 91 (121) 98 (128) 105 (135) 112 (142) 119 (149) 133 (163) 147 (177) 161 (191) C(D)UKW16-D 150 (185) 163 (203) 177 (217) 191 (231) 205 (245) 219 (259) 247

Modular F.R.L. Units

147.1 18 35.5 38.4 40 35.5 50 52 26 8.5 12.5 70 2.3 35 186.9 155.6 153.9 149.6 154.1 169.6 174.1 AF40-06-A 3/4 75 149.1 20 35.5 38.4 40 35.5 50 52 25 8.5 12.5 70 2.3 34 188.9 157.6 155.9 151.6 156.1 171.6 176.1 AF50-A 3/4, 1 90 220.1 24 45 30 45 70 66 35 11 13 90 3.2 47 259.9 228.6 226.9 222.6 227.1 242.6 247.1 AF60-A 1 95 234.1 24 47.5 30 47.5 70 66 35 11 13 90 3.2 47 273.9 242.6 240.9

Environment

100 50 70 12 70 20 1.3 85 15 0.8 LEY25 LEPY LEPS 40C 140 Lead 3: LEY25AC LER 120 LEY25 Lead 6: LEY25AB 100 Lead 12: LEY25AA 500 LEH Force [N] 80 Lead 3: LEY25C 400 60 LEY -X5 Lead 6: LEY25B 40 Force [N] Lead 12: LEY25A 300 11LEFS 20 200 20 30 40 50 60 70 80 90 100 0 11LEJS Set value of pushing force [%] 100 Max. 95% Max. 65% Ambient temperature Set value of pushing force [%] Duty ratio

Electric Actuators

With brake: 150 Without brake: 115 Housing 36.5 32 Thread size M4 x 0.7 6 4 70 M5 x 0.8 6 4 70 Effective thread length (mm) Quantity P.C.D. B 89 A A B Section BB Coupling P.C.D.

Integrated Controller

The load factor for each direction can be found as follows. x = 0/350 = 0 y = 50/250 = 0.2 z = 200/1000 = 0.2 5. x + y + z = 0.4 1 1000 1000 Lz 1000 800 800 800 600 600 600 L2 [mm] L3 [mm] L1 [mm] 400 400 400 Lx Ly 200 200 200 0 0 10 20 30 40 50 60 70 0 10 20 30 40 50 60 70 0 0 0 10 20 30 40 50 60 70 Work load [kg] Work load [kg] Work load [kg] 15 Easy to Operate Model Selection EQFSH Series

5 Port Solenoid Valve Series SY3000/5000/7000/9000

L Dimension 66 923 67 935.5 68 948 69 960.5 70 973 71 985.5 No.

240

or less 100 70 30 3 100 15 1 LEC 11.

LEC-OM07605CN

(4) (4) ABZ ( PSEL) LECSS2T (5) (5) 4 4 4 (6) (6) LECSS2T (7) (7) (8) (8) 8 44 8. 70 1 70.5 (1) ABZ AB (PA,PAR,PB,PBR) LECSS21 T (2) (2) [AL. 70.1] LECSS2T (3) (4) (5) 70.6 (1) ABZ Z (PZ,PZR) LECSS22 T (2) (2) [AL. 70.1] LECSS2T (3) (4) (5) 70.7 [AL. 70.1] 3 70.A LECSS2T (2) (1) 1 (2) (3) (3) 70.B [AL. 70.A] 2 70.C 3 70.D 4 70.E 5 70.F 6 8 45 8. 71 1 71.1

Industrial Filters

x L500 65 to 70 x L250 65 to 70 x L750 65 to 70 x L250 65 to 70 x L500 65 to 70 x L250 65 to 70 x L750 65 to 70 x L250 65 x L500 65 x L250 65 x L750 65 x L250 65 to 70 x L250 65 x L250 65 to 70 x L250 Element size Cover Stainless steel 304 Case Stainless steel 304 Main materials Gasket Fluororesin Fluororesin Fluororesin O-ring NBR FKM Legs SS400 (Chromatic plating) Weight (kg) 10 13

JXCx-OMU0004

1400 70 1400 13 70 1600 70 1600 80 1600 80 1600 14 75 1800 75 1800 90 1800 90 1800 15 80 2000 80 2000 100 2000 100 2000 LEHZ32 LEHZ40 2] 2] [mm/s] [mm/s [mm/s] [mm/s 0 5 100 5 100 1 10 150 10 150 2 15 200 15 200 3 20 300 20 300 4 25 400 25 400 5 30 500 30 500 6 35 600 35 600 7 40 700 40 700 8 50 800 50 800 9 60 900 60 900 10 70 1000 70 1000 11 80 1200 80 1200 12 90 1400 90 1400 13 100 1600