ZP

Thin Flat/Thin Flat with Ribs Deep A B Y Model Model A B C D E F Y G H G H I: M5 x 0.8 I: M6 x 1 ZPR10UT 10 11 1 ZPR10D 10 16 12 18 16 25 33.9 50 71 76 7 15 24 32.9 49 20 25 70 75 6 ZPR16D ZPR13UT 13 14 1.5 ZPR16UT 16 17 Applicable Tubing ZPR10CT 10 11 0.8 Applicable tubing O.D.

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+ 45 (n 2) 25 + 45 70 25 10 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) D-C73C D-C80C D-H7C (n 2) 2 80 + 50 (n 2) 30 + 50 80 5 30 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) D-B5 D-B64 D-G5 D-K59 (n 2) 2 70 + 50 (n 2) 25 + 50 5 70 25 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 75 + 50 (n 2) 30 + 50 D-B59W 10 75 30 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) Note 3) When n is an odd number, an

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

30 75 125 150 10 20 30 125 75 100 20 50 10 40 13-/22-MXQ6(L) 13-/22-MXQ8(L) 13-/22-MXQ12(L) 13-/22-MXQ16(L) 13-/22-MXQ20(L) 13-/22-MXQ25(L) 6 4.5 5.5 5.5 13.5 5.5 13.5 1 1 1 9 9 7.5 5 12 32 8 31 8 16 3.5 3.5 7.5 11.5 26.5 27.5 11.5 6 40.5 14.5 40.5 14.5 21.5 24.5 21.5 20 10 10 17 17 36 36 16.5 26 16 16 16 22 29 47 47 7 51.5 20.5 33.5 51.5 20.5 26.5 30.5 20.5 39 29 19 29 27 35 67 70

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

After securing the cylinder, readjust the stroke with the adjustment bolt. 80 Load [N] 70 60 15 50 40 30 10 20 10 0 0 100 200 300 400 500 600 700 800 900 Distance between supports L [mm] Adjuster holder 6. There are limitations on the load mass and operating pressure in case the product is used in the vertical direction.

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0.65 (0.73) Rubber seal VQ530 5 1 12 0.33 3.4 13 0.37 3.7 60 63 63 0.58 (0.66) VQ5000 1/2 Exhaust center Metal seal VQ540 5 0 12 0.13 2.9 14 0.18 3.4 50 53 70 0.65 (0.73) 3-position Rubber seal VQ540 5 1 14 0.39 3.9 16 0.35 4.5 60 63 63 0.58 (0.66) Pressure center Metal seal VQ550 5 0 12 0.23 2.9 13 0.24 3.3 50 53 70 0.65 (0.73) Rubber seal VQ550 5 1 13 0.32 3.4 14 0.40 3.9 60 63 63 0.58

XLAQ/XLDQ

(Compound No. 1232-70, White) It has a low weight-reduction ratio and low particle generation within O2 plasma and NH3 gas environments. XVD XGT CYV EPDM (Ethylenepropylene rubber) Relatively lower priced and excellent in weatherability, chemical and heat resistance, but with no resistance at all to general mineral oil.

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

20 10 0 100 Suction flow [L/min(ANR)] Air consumption [L/min(ANR)] Vacuum pressure Vacuum pressure [kPa] Vacuum pressure [kPa] 80 60 Suction flow 40 20 Air consumption 0 0 10 20 30 40 Supply pressure [MPa] Suction flow [L/min(ANR)] ZHP-10 ZHP-10 (Supply pressure: 0.35 MPa) 100 90 80 70 60 50 40 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 100 90 80 70 60 50 40 30 20 10 0 100 Suction flow [L/min(

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ZPR20 , 57 61 , ZPR25 65 68 .O' ZPR100 10 12 15 24 3<.9 49 20 70 33.9 50 20 71 25 75 6 57 61 57 61 ZPR16D 16 18 16 25 25 76 7 Applicable tube 2PR32 mm . :Appli~I~1IJbe O.t;) i'P .

MY2

The spacing (l) of the side support must be no more than the values shown in the graph at right. 100 m 90 l 80 70 (650) Caution 60 Load weight m m qIf the cylinder mounting surfaces are not measured accurately, using a side support may cause poor operation. Make sure to level the cylinder tube when mounting the cylinder.

CXWM/CXWL

If they are placed far apart from each other, please consult with SMC. 20Shock Absorber Specifications RB0805-X552 RB0805 RB1006-X552 RB1006 RB1411-X552 RB1411 Shock absorber (1) Data CXWM20/25CXWM10/16CXWM32Applicable slide unit Maximum energy absorption (J) 0.98 3.92 14.7 Stroke absorption (mm) 5 6 11 Max. collision speed (m/sec) 0.05 to 5 Max. operating frequency (cycle/min) (2) 70 80

MLGC

70 4 104 40 7 7 32 38 Rc 1/8 Rc 1/8 62 60 13 125 M8 x 1.25 M12 x 1.75 depth 21 115 11 82.5 4 115 45 8 8 38 47 67 75 14 150 M8 x 1.25 WH W X Y U W T V Z Bore size (mm) 20 25 32 40 30 23 30 50 112 146 182 16 53 30 25 37 60 132 167 199 20 63 25 28.5 37 60 132 167 202 20 63 20 33 44 70 25 162 73 210 227 Without Rear Plate Stroke range (mm) Long Stroke Bore size (mm) 20 25 32 40 Bore size (mm

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

After securing the cylinder, readjust the stroke with the adjustment bolt. 80 Load [N] 70 60 15 50 40 30 10 20 10 0 0 100 200 300 400 500 600 700 800 900 Distance between supports L [mm] Adjuster holder 6. There are limitations on the load mass and operating pressure in case the product is used in the vertical direction.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

The spacing (l) of the side support must be no more than the values shown in the graph at right. 100 m 90 l 80 70 (650) Caution 60 Load weight m m If the cylinder mounting surfaces are not measured accurately, using a side support may cause poor operation. Make sure to level the cylinder tube when mounting the cylinder.

Suction Guard (Produced upon receipt of order) FHG Series

70 70 85 85 85 105 105 9 9 9 9 9 9 9 9 62 62 62 65 65 65 65 65 3.5 3.5 3.5 6.2 6.2 6.1 11.9 11.9 Port size Weight (kg) E J P Q Port size Weight (kg) E 69 69 74 80 80 85 R 70 70 70 85 85 85 1/2B (04) 3/4B (06) 1B (08) 1 1/4B (10) 1 1/2B (12) 2B (16) 1/2B (04) 3/4B (06) 1B (08) 1 1/4B (10) 1 1/2B (12) 2B (16) 1/2 3/4 1 1 1/4 1 1/2 2 1/2 3/4 1 1 1/4 1 1/2 2 78 78 83 106 106 111 3.6 3.6 3.6

Peltier-type Chiller Thermo-con/ Compact Type

temperature [C] 0 0 10 20 30 40 50 60 70 Circulating fluid temperature [C] For the high-pressure pump (Option), the heating capacity increases by approx. 10 W.

HRX-OM-O021

Table 3-1 Amount of radiation and required ventilation Required ventilation amount m3/min Differential temp. of 3 oC Heat Differential temp. of 6 oC Radiated between inside and Model between inside and outside kW outside of installation of installation area area HRS050-A-20 Approx.10 140 70 The water-refrigerated thermo-cooler discharges heat by using facility water.

HEC_W-E

circuit Detects abnormal current/voltage or heat or fanlock. 3 Low recirculating fluid level Level sensor Detects lowering of recirculating fluid level in reservoir. 4 Detection of breakage of temp. sensor Controller internal circuit Detects breakage and short circuit of temp. sensor and cables. 5 Excessive temp. increase Controller internal circuit Detects temp. input value not less than 70

LEY-OM007

90.00 0.50 No.00[mm] 100[mm] 1AREA 100[mm]-0.5[mm]=99.5[mm] INPON [mm] c 100 0 [mm/s] b INP ON OFF INP [mm] k 100.5 99.5 0 10 20 30 40 50 60 70 80 90 100 [mm] 2AREA AREA1 2 180[mm] 290[mm] AREAON 100[mm]-0.5[mm] = 99.5[mm] [mm] c 2[mm] j 1[mm] j 100 0 [mm/s] b ON AREA OFF INP ON OFF INP [mm] k 100.5 99.5 0 10 20 30 40 50 60 70 80 90 100 [mm] 2 -25- -IN INPAREA a b c d e f

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

60 20 0.3 0.3 15 40 0.2 0.2 10 20 0.1 0.1 5 L L 0 20 30 50 60 Gripping point L (mm) 40 70 0 30 40 60 70 Gripping point L (mm) 50 80 90 12-10-4 4 Series MHY2/MHW2 180 Angular Style Air Gripper MHZ MHW2-32D MHW2-50D MHW2-20D MHF 300 25 100 Pressure 0.7 MPa Pressure 0.7 MPa Pressure 0.7 MPa MHL 250 20 0.6 80 0.6 Gripping force (N) Gripping force (N) Gripping force (N) 0.6 MHR 200 0.5 0.5 0.5

MLGC

70 4 104 Rc 1/8 Rc 1/8 62 7 7 40 125 60 32 M8 x 1.25 13 38 M12 x 1.75 depth 21 115 11 82.5 4 115 67 8 8 45 150 75 38 M8 x 1.25 14 47 WH W X Y T U V W Z Bore size (mm) 20 25 32 40 30 23 30 112 146 182 16 53 50 30 25 37 132 167 199 20 63 60 25 28.5 37 132 167 202 60 20 63 20 33 44 162 210 227 25 73 70 Without Rear Plate Stroke range (mm) Long Stroke Bore size (mm) 20 25 32 40 Bore size (mm