Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper (Mounting thread) Note) If the fitting attached to the port interferes with the auto switch, please use the extension fitting assembly supplied with the air gripper. 4 x AA thread depth AB (Mounting thread) Prepared hole diameter AC through (Mounting hole) Note) AD depth AE AF depth AG S H When open AS When closed AR When closed AT M T D P B R N G Q F E C A 2 x AH thread depth AJ (Mounting
In periodical inspections, check the following items and replace the parts if necessary. a) Scratches, gouges, abrasion, corrosion b) Air leakage c) Twisting, crushing and turning of connected tubes d) Hardening, deterioration and softening of connected tubes e) Loosening of nozzles 2.
Symbol 0 P Side 1 E Side Side Bottom (1) Side Other A, B Side Base specifications 9 2 1 Individual exhaust Common exhaust Note 1) Size of A, B port bottom ported: 3/8, 1/2 Option Stations 02 2 stations 10 10 stations How to Assemble Manifold To order valves and blanking plate assembly mounted onto the manifold, list valves and blanking plate assembly with manifold base part number.
Note Platinum silver Platinum silver Black Black q Description Sub-plate Body Aluminum die-casted Stainless steel w e Mounting bolt and gasket are not attached. : Thread type Spool/Sleeve Adapter plate Thread Type r Resin t Resin End plate Nil Standard Rc y Resin Piston NPT N Option T NPTF G F Replacement Parts Description Material Part no. No.
1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.
Applicable filter Element size Quantity ZFC-EL-1 ZFC1 5 x 3 x L11 10 ZFC-EL-2 ZFC3 6 x 4 x L25 10 2 Cover Resin PBT 2 ZFC-EL-3 ZFC5 12 x 8 x L20 10 3 Element Sintered resin 1 ZFC-EL-4 ZFC7 16 x 12 x L25 10 4 O-ring HNBR 2 5 Bracket Resin PBT 1 w OUT e w One-touch fitting r q IN r One-touch fitting t Element Replacement Procedure 1.
Construction Vacuum generator side Vacuum generator side u w r t No.0.8 e y For the direction of the product, refer to 4 of back page 3. Pad side q u Description Component Parts Material Surface treatment No.
~~===rr-N"~e-_ ~~ =4It PNP, and analog output.
Applicable series: CVJ5, CVJ3 e Installation and removal of the sockets containing lead wires OInstallation: Insert the sockets into the square holes of the connector (marked and , respectively), pinch the lead wires to push them in entirely, allowing the hook on each socket to engage with the seat of the connector, thus locking the socket in place.
Description Body Material Note Baking finish q Aluminum alloy w w Baking finish Aluminum alloy Housing e Baking finish Aluminum alloy Drain guard y r Foam rubber Float IN t Pilot valve Stainless steel + Rubber y Lever Resin u Flushing button Brass t i Orifice r o Diaphragm Rubber Replacement Parts 10-1 e No. Description Part no. ADH-D400 Note 10-2 !
.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Component Parts MB No. q w e r Description Material Brass Brass Stainless steel Brass Body Brass Gasket PVC NBR NBR NBR Steel Steel Note Electroless nickel plated Electroless nickel plated Rod cover Cylinder tube Piston Seal retainer MB1 Electroless nickel
View A-A Bore size (mm) Stroke range (mm) AF AE AD AC AB AA A G F E D C B AP H 20 25 32 40 50 75, 100, 125, 150, 200 25 62 15.5 13 11 84 5.6 90 45 24 106 M5 x 0.8 depth 10 9.5 depth 6 22 M6 x 1 depth 10 30 65 16.5 13 15 89 6.8 103 45 26.5 120 11 depth 8 M6 x 1 depth 12 M8 x 1.25 depth 14 27 75, 100 125, 150 200, 250 300 35 70 16.5 13 15 94 6.8 118 50 26.5 135 11 depth 8 M6 x 1 depth 12 M8
4 20Clear anodized Rod cover Magnet Magnetic material Aluminum alloy e !5 Chromated Piston Plug Carbon steel Aluminum alloy r !6 Data Electroless nickel plated Piston rod Element Resin Carbon steel t !7 Anodized Plate Snap ring Spring steel Aluminum alloy y !8 Anodized End plate Rod seal NBR Aluminum alloy u !
.: GR-S-010 (10 g) Replacement Parts: Lock Unit CLG1B 40 TN N E Cushion Type Lock operation N A Spring locking (Exhaust locking) Rubber bumper Air cushion E P D Pneumatic locking (Pressure locking) Spring and pneumatic locking Port thread type Bore size (mm) Nil TN NPT Rc 153
Model: Top Ported, Connector Type: D-sub Connector, 25 Pins, Connector Entry Direction: Upward, Valve Stations: 3 Stations, P,E Port Location: D Side, SUP/EXH Block: Internal Pilot, Built-in Silencer, P,E Port Size: -, Mounting: -
Model: Top Ported, Connector Type: D-sub Connector, 25 Pins, Connector Entry Direction: Upward, Valve Stations: 5 Stations, P,E Port Location: D Side, SUP/EXH Block: Internal Pilot, Built-in Silencer, P,E Port Size: -, Mounting: -
Model: Top Ported, Connector Type: D-sub Connector, 25 Pins, Connector Entry Direction: Upward, Valve Stations: 8 Stations, P,E Port Location: Both Sides, SUP/EXH Block: -, P,E Port Size: -, Mounting: -
Model: Top Ported, Connector Type: D-sub Connector, 25 Pins, Connector Entry Direction: Upward, Valve Stations: 12 Stations, P,E Port Location: Both Sides, SUP/EXH Block: Internal Pilot, P,E Port Size: ø5/16" One-touch Fitting, Inch, Mounting: DIN Rail Mounting w/DIN Rail
Model: Top Ported, Connector Type: D-sub Connector, 25 Pins, Connector Entry Direction: Upward, Valve Stations: 24 Stations, P,E Port Location: Both Sides, SUP/EXH Block: Internal Pilot, P,E Port Size: ø5/16" One-touch Fitting, Inch, Mounting: DIN Rail Mounting w/DIN Rail