SMC Corporation of America
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3 Sleeve 7 Iron Spacer 8 PBT r Return spring 9 Stainless steel w Board assembly 10 e Casing 11 PBT q Plug 12 NBR O-ring 13 NBR 3 Diaphragm Type Direct Acting 2/3 Port Solenoid Valve for Chemicals Series LVM10/100 Construction/Base Mounted Type LVM13R LVM14R LVM16R !2 !0 !2 !0 !2 !0 !1 !1 !1 y y y t t t u u i i u i o o !3 !3 o !3 r r r e e w w e w q !4 !4 q q !4 LVM115 Description No.

This time is characterized as =0 exp(E/RT) where R is the ideal gas constant and 0=(approx.) 10-13sec. Residence time of water at 20C is 5.5 x 10-6sec, whereas at 150C is 2.8 x 10-8 sec, or 200 times shorter.

SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS (72.4) Attached washer (63.6) (60.1) Attached washer SMC SMC SMC SMC 10.2 V V V V V 28.8 8.5 21 10 9 8.5 9 81 Vacuum port (V port) Note 4) 107 (M5 x 0.8) Note 1) The above dimensions are for ZZQ1-BSB.

This can be changed by the operation display panel. c) Function Command is assigned. d) Data Depending on the function, the address and the number of the register, the value of reading/writing are assigned. e) CRC CRC method.

Connection circuit (POWER connector) 0.8-1.0 26-24 0.14-0.2 ZS-28-C Wiring of the IZS40 e-con is adopted for the connector of the IZS40. Connector with cable or without cable may be selected when placing an order for the power supply cable. When only an e-con is required, place an order for it as a part.

Gauge port 2) (Inlete, Outletr) Porting Configuration Pressure gauge Code r psig/bar unit MPa unit r e 0 6 10 20 40 60 Q No pressure gauge w q w q 600 psig/bar 3) 4.1 MPa 7 MPa 14 MPa 28 MPa 41 MPa 70 MPa qIN wOUT eGauge port (Inlet) rGauge port (Outlet) Connections (Inletq, Outletw) 1000 psig/bar 3) Ports Code 2000 psig/bar 3) Connections 4P V 4PN 4000 psig/bar 3) e 4P 4PN 4 4B NPT 1/4 inch

S: B Throo h hole standard A Both ends ta d L Foot mount F Rod side Iia e Head side flan e Type of Auto Switch , No auto SWitch built in (high magnetic Bore Size D Clevis mount . ~ field resIstance ma net 50 50mm P7G 0P10 63 63mrn l'l14C D-P74 80 80mm i P7 D-P75 Cylinder Stroke D-PS P8!

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

Spring and pneumatic locking type Air pressure supply Air pressure exhaust Air pressure exhaust Air pressure supply Unlocked state Locked state Brake piston is operated by air pressure and spring force. 9-2-8 Fine Lock Cylinder Double Acting, Single Rod Series CLG1 20, 25, 32, 40 How to Order CL Without auto switch CLG1 100 L E N 25 CL1 MLGC CDLG1 With auto switch H7BW 100 L E N 25 CNG Built-in

: E) In the case of EZ or TZ, the length is longer by 10 mm.

A E Push type A Push-locking type E Dimensions: Single Dimensions: VZ1120-G-M5-X1 Push type A (Push type A) Manual override Manual override (Non-locking) (Mounting hole for manifold) Push-locking type E (Piping port) Manual override (Push-locking type E) ( ) Pressing makes the valve operate.

Dimensions MGQL (Ball bushing bearing) A, DB, E Dimensions E E 30 st or less Over 30 st A A Symbol Symbol DB DB Stroke Stroke Bore size (mm) 12 16 20 25 Bore size (mm) 12 16 20 25 50 st or less Over 50 Over 50 50 st or less 30 st or less Over 30 st 43 39 4 6 8 16 0 55 49 43 6 8 10 22 0 65 57 10 61.5 10 12 27 14.5 0 74 47 63.5 16 62 13 16 32 14.5 0 79.5 47.5 8-20-9 10 Series MGQ Bore Size

DX#B DY#B DM#E AXA AYA LBB1 SEC3 System Valve 32 Diag. Unit 0 Unit 1 Unit 2 Unit 3 Unit 4 Unit 5 Unit 6 Diag.

/PL / OSSD SIL 2 2 2 3 3 3 3 3 SIL CL 2 2 2 3 3 3 3 3 * 2 2 4 3 4 ** 4 3 Cat. 3 PL d d d e d e e d *:Cat. 3 EN13849-2 2 N.O. **:Cat. 18 No.EX##-OMY0006CN 3.3.8. SI 0 SI 0 A SI 1. 2.I/O 3.SI 4. 5. 10 0 I/O 0 "0"= SI 72 72 SI 72 SI SI 16 SI SI SI SI 0 16 19 No.EX##-OMY0006CN SI SI SI 16 SI SI 20 D 3.3.9. GSDMLFDCML 3.4.

Approx. 1.7 mm Colours Brown, White, Black, Blue Sheath Material Lead free heat and oil resistant PVC Finished O.D. 6 -66No.LV50***-OMQ0002-G Characteristics Chart Flow characteristics (pressure loss) LFE1 LFE2 0.02 0.02 P r essur r e l oss[ M P a] 0.015 0.015 P r essur e l oss[ M P a] 0.01 0.01 0.005 0.005 0 0 0 5 10 15 20 0 20 40 60 80 100 Fl ow r at e[ L/ m i n] Fl ow r at e[ L/ m i n]

C E (KF flange) Fn C E D J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-40-2 65 171 66 39 11 55 41 67 29 12 XL-OMV0007 5-3.Dimensions Size 50, 63, 80 E C C E E (KF flange) (K flange) Fd Fn D K J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J K XLC-50-2 70 185 79 46 11 75 52 72 29 9 XLC-63-2 88 212 100 55 11 87

Fail Action Fail to Close, Fail to Open 5 Valve Travel 85.2 % 5 Positioner Information 5 Dead Angle (a0) 0.0 % [0..99%] 6 Temperature 24.7 C 6 Units 6 Performance Level A(1)-Aggressive, b(1)-fast, C(1)-Optimum, d(1)-Stable, E-Max. stability, (1) = Capac.

Caution Upper cylinder chamber Lower cylinder chamber DIN terminal block Terminal block Sm Sp Ground Terminal no. 1 2 E DIN terminal + Terminal + Applicable cable O.D. Type T: 4.5 to 7 mm Type E: 2.3 to 2.8 mm REG.

[L/min] Flow rate [L/min] Fl ow r at e[ L/ m i n] Fl ow r at e[ L/ m i n] LFE3 0.02 Pressure loss [MPa] 0.015 P r essur e l oss[ M P a] 0.01 0.005 0 0 50 100 150 200 Fl ow r at e[ L/ m i n] Flow rate [L/min] -25No.LV50***-OMQ0004-F IN side straight pipe length (reference value) Straight pipe length 5 Change of accuracy [%F.S.]