Slit Valve XGT Series

For 200 mm wafer For 300 mm wafer 529

Magnet: None, Mounting: A (Both Ends Tapped), Bore Size: 200 (2"), Stroke: 300 (3"), Body Option: C (Rubber Bumper), Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), X Option: XC4 (Scraper)

Lock: None, Body Shape: K (Mounting Tap: 2xM10x1.5, Pin Hole: 2xø10H7), Mounting Surface: C (Taps Diagonal Top Left, Right and Bottom Left, Right), Bore Size: 50mm, Port Thread: TF (G), Guide Pin Diameter: 300 (30.0mm), Guide Pin Shape: R (Round Type), Clamp Arm Position: B (90° From Port), Clamping Height: H (High Type)

Lock: None, Body Shape: K (Mounting Tap: 2xM10x1.5, Pin Hole: 2xø10H7), Mounting Surface: C (Taps Diagonal Top Left, Right and Bottom Left, Right), Bore Size: 50mm, Port Thread: TF (G), Guide Pin Diameter: 300 (30.0mm), Guide Pin Shape: R (Round Type), Clamp Arm Position: B (90° From Port), Clamping Height: L (Low Type)

Lock: None, Body Shape: K (Mounting Tap: 2xM10x1.5, Pin Hole: 2xø10H7), Mounting Surface: C (Taps Diagonal Top Left, Right and Bottom Left, Right), Bore Size: 50mm, Port Thread: TF (G), Guide Pin Diameter: 300 (30.0mm), Guide Pin Shape: R (Round Type), Clamp Arm Position: D (270° From Port), Clamping Height: L (Low Type)

Lock: None, Body Shape: K (Mounting Tap: 2xM10x1.5, Pin Hole: 2xø10H7), Mounting Surface: D (Taps Diagonal Top Left, Right and Bottom Left, Right), Bore Size: 50mm, Port Thread: TF (G), Guide Pin Diameter: 300 (30.0mm), Guide Pin Shape: R (Round Type), Clamp Arm Position: C (180° From Port), Clamping Height: H (High Type)

Lock: None, Body Shape: K (Mounting Tap: 2xM10x1.5, Pin Hole: 2xø10H7), Mounting Surface: D (Taps Diagonal Top Left, Right and Bottom Left, Right), Bore Size: 50mm, Port Thread: TF (G), Guide Pin Diameter: 300 (30.0mm), Guide Pin Shape: R (Round Type), Clamp Arm Position: C (180° From Port), Clamping Height: L (Low Type)

Lock: None, Body Shape: K (Mounting Tap: 2xM10x1.5, Pin Hole: 2xø10H7), Mounting Surface: E (Taps Diagonal Top Right, Left and Bottom Right, Left), Bore Size: 50mm, Port Thread: TF (G), Guide Pin Diameter: 300 (30.0mm), Guide Pin Shape: R (Round Type), Clamp Arm Position: C (180° From Port), Clamping Height: H (High Type)

Lock: None, Body Shape: K (Mounting Tap: 2xM10x1.5, Pin Hole: 2xø10H7), Mounting Surface: E (Taps Diagonal Top Right, Left and Bottom Right, Left), Bore Size: 50mm, Port Thread: TF (G), Guide Pin Diameter: 300 (30.0mm), Guide Pin Shape: R (Round Type), Clamp Arm Position: C (180° From Port), Clamping Height: L (Low Type)

Lock: None, Body Shape: K (Mounting Tap: 2xM10x1.5, Pin Hole: 2xø10H7), Mounting Surface: F (Taps Diagonal Top Right, Left and Bottom Right, Left), Bore Size: 50mm, Port Thread: TF (G), Guide Pin Diameter: 300 (30.0mm), Guide Pin Shape: R (Round Type), Clamp Arm Position: C (180° From Port), Clamping Height: H (High Type)

Lock: None, Body Shape: K (Mounting Tap: 2xM10x1.5, Pin Hole: 2xø10H7), Mounting Surface: F (Taps Diagonal Top Right, Left and Bottom Right, Left), Bore Size: 50mm, Port Thread: TF (G), Guide Pin Diameter: 300 (30.0mm), Guide Pin Shape: R (Round Type), Clamp Arm Position: C (180° From Port), Clamping Height: L (Low Type)

Lock: None, Body Shape: K (Mounting Tap: 2xM10x1.5, Pin Hole: 2xø10H7), Mounting Surface: C (Taps Diagonal Top Left, Right and Bottom Left, Right), Bore Size: 50mm, Port Thread: TF (G), Guide Pin Diameter: 300 (30.0mm), Guide Pin Shape: R (Round Type), Clamp Arm Position: D (270° From Port), Clamping Height: H (High Type)

EM, E, "HYDRAULIC ELEMENT EB, 633 lb

UL certified for use in North America; 60 Hz operation; Max. inlet air temperature: 122°F (50°C); Max. flow at rated conditions: 300 scfm 510m³/hr (ANR) @37°F (3°C) PDP; Connections: NPT threads are standard; R/Rc adapters are available  

UL certified for use in North America; 60 Hz operation; Max. inlet air temperature: 122°F (50°C); Max. flow at rated conditions: 300 scfm 510m³/hr (ANR) @37°F (3°C) PDP; Connections: NPT threads are standard; R/Rc adapters are available  

Types: Dryers, Method: Hollow Fiber Type, Shape: Standard, Outlet Flow Rate(l/min): 240, Outlet Open Air Pressure Dew-Point(°C): -40, Exit Flow Rate Class(l/min): Up to 300, Supply Side Connection Type: NPT, Inlet Air Temperature(°C): 25, Inlet Air Pressure(MPa): 0.7, Supply Side Plumbing Thread Nominal: 3/8, Control Side Connection Type: NPT, Control Side Plumbing Thread Nominal: 3/8, Standard

Types: Dryers, Method: Hollow Fiber Type, Shape: Standard, Outlet Flow Rate(l/min): 240, Outlet Open Air Pressure Dew-Point(°C): -40, Exit Flow Rate Class(l/min): Up to 300, Supply Side Connection Type: NPT, Inlet Air Temperature(°C): 25, Inlet Air Pressure(MPa): 0.7, Supply Side Plumbing Thread Nominal: 1/2, Control Side Connection Type: NPT, Control Side Plumbing Thread Nominal: 1/2, Standard

Blow Gun Series VMG

VMG1-06-150-300 VMG1-06-200-300 VMG1-06-150-600 VMG1-06-200-600 VMG1-06-150-100 VMG1-06-200-100 VMG1-06-150-150 VMG1-06-200-150 VMG1-08-250-100 VMG1-08-300-100 VMG1-08-350-100 VMG1-08-250-150 VMG1-08-300-150 VMG1-08-350-150 VMG1-08-250-300 VMG1-08-300-300 VMG1-08-350-300 VMG1-08-250-600 VMG1-08-300-600 VMG1-08-350-600 Nozzle size Nozzle length 1.5 2 1.5 2 1.5 2 1.5 2 2.5 3 3.5 2.5 3 3.5 2.5

Blow Gun Series VMG

VMG1-06-150-300 VMG1-06-200-300 VMG1-06-150-600 VMG1-06-200-600 VMG1-06-150-100 VMG1-06-200-100 VMG1-06-150-150 VMG1-06-200-150 VMG1-08-250-100 VMG1-08-300-100 VMG1-08-350-100 VMG1-08-250-150 VMG1-08-300-150 VMG1-08-350-150 VMG1-08-250-300 VMG1-08-300-300 VMG1-08-350-300 VMG1-08-250-600 VMG1-08-300-600 VMG1-08-350-600 Nozzle size Nozzle length 1.5 2 1.5 2 1.5 2 1.5 2 2.5 3 3.5 2.5 3 3.5 2.5

Piston Material: Aluminum, Added Function: N/A, Rod Motion: Double Acting Single Rod, Operating Pressure Range(MPa): 0.3～3.5, Tube Material: Aluminum, Piston Speed(mm/sec): 8～300, Piston Packing Material: NBR, Stroke(mm): 300, Cushioning Mechanism: N/A, Operating Temperature Range(°C): -10～80, Support Type: [Rod Side Flange] Rod-Side Flange, Standard: None, Nominal Pressure: 3.5MPa, Cylinder