Series: 3 (VQZ300), Stations: 6 Stations, Port Size: 02 (Rc1/4), Option: R (External Pilot)

Stations: 02, A Port Size: One-touch Fitting for ø1/4", P, R Port Thread: NPTF

EXxx-OMO0027

Over range USINT 2 90x2:01 1 Channel 0 BOOL FALSE (Undetected) TRUE (Detected) 90x2:02 1 Channel 1 BOOL FALSE (Undetected) TRUE (Detected) 90x3:0 1 Slot x: Under range USINT 2 90x3:01 1 Channel 0 BOOL FALSE (Undetected) TRUE (Detected) 90x3:02 1 Channel 1 BOOL FALSE (Undetected) TRUE (Detected) 90x4:0 Slot x: Over upper limit value USINT 2 90x4:01 Channel 0 BOOL FALSE (Undetected) TRUE (

VFA3000

1 8 1 4 1 8 1 4 1 8 1 4 VFA32302 position double 0.17 1 8 14.4 (0.8) 18 (1) 01 02 (EXH: ) 1 8 VFA3330-X1 3 position closed center 0.32 1 8 11.7 (0.65) 14.4 (0.8) 01 02 Base mounted (EXH: ) 1 8 VFA3430-X1 3 position exhaust center 0.32 1 8 14.4 (0.8) 18 (1) 01 02 (EXH: ) 1 8 VFA3530-X1 3 position pressure center 0.32 1 8 14.4 (0.8) 9.9 (0.55) 16.2 (0.9) 10.8 (0.6) 01 02 (EXH: ) 1 8 1 4 3

Fieldbus system EtherCAT compatible SI Unit

of Channels 40x7:01 40x7:02 Channel 0 Channel 1 (Analogue user setting value lower limit detection) Enum0800 0=Disable 1=Enable 40x8:0 Lower limit value UNSIGNED8 Number of Channels 40x8:01 40x8:02 Channel 0 Channel 1 (Analogue user setting value of lower limit) UNSIGNED16 0 to 0xF 40x9:0 Filter UNSIGNED8 Number of Channels 40x9:01 40x9:02 Channel 0 Channel 1 (Analogue average filter

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

7.8 7.8 7.8 9.6 9.6 10.7 10.7 15.8 31.5 32.8 12 27 35 12 15.8 31.5 32.8 12 27 35 12 Screw-in connection Model A B C D E F G H Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 ZH05DS-01-01-01 ZH05DL-01-01-01 ZH07DS-01-01-01 ZH07DL-01-01-01 ZH10DS-01-01-01 ZH10DL-01-01-01 ZH13DS-01-02-02 ZH13DL-01-02-02 73.5 41.5 29.5 12 3.2 12 14.2 14.2 73.5 41.5 29.5 12 3.2 12 S type: White

Process Pump

2) Note 2) Note 1, 2) Note 1, 2) Note 1, 2) 1.

Clean Gas Filter

SF-OMW0001 PRODUCT NAME Clean Gas Filter MODEL / Series / Product Number SFA Series SFA10-02 SFA20-02 SFA30-02 Contents Page Safety Instructions 2 to 3 SFA Series Specific Product Precautions 4 to 5 1. Product components and functions 6 2. Specifications 7 to 8 3. Mounting 9 4.

Safety Speed Control Valve (SSC Valve) Series ASS

bracket 1 3 5 6 AK 8 3 B 3 4 1 Port size ASS Applicable series Port size 01 02 03 04 06 10 Type 1 8 ASS100/110 ASS300/310 ASS300/310 ASS500 ASS500/600 ASS600 ASR PAT.PEND 1 4 00 10 Meter-out control type Meter-in control type Meter-in type is available only for ASS110 and ASS310. 8 3 ASF 1 2 3 4 1 JIS Symbol Thread type Nil N F Rc NPT G Meter-out control Meter-in control Caution Be sure

KA

thread M 1 8 KAH06-U01 14.5 6 5 12 19.5 17 1 4 KAH06-U02 13 17 14 12 13.1 13.1 10 H 3 8 KAH06-U03 17.5 11.5 16 1 8 1 4 KAH08-U01 KAH08-U02 20.5 15.5 25 21.5 11 27 Applicable tubing 14 D 14 8 18.0 18.0 18.5 3 8 KAH08-U03 17 19.5 13.5 33 1 8 KAH10-U01 28 23 17 MS 1 4 3 8 KAH10-U02 KAH10-U03 22 18 17 17 10 29.5 29.5 21 24 14 T 1 2 KAH10-U04 22 14 28 22 16 22 Connection

KRM

Aereo 081045 Santa Fe de Bogot, Colombia TEL: 1-424-9240 FAX: 1-424-9260 15-18-20 SMCs Global Service Network Europe Oceania/Asia AUSTRALIA SMC Pneumatics (Australia) Pty.Ltd. 14-18 Hudson Avenue Castle Hill NSW 2154, Australia TEL: 02-9354-8222 FAX: 02-9894-5719 FINLAND SMC Pneumatics Finland OY PL72, Tiistinniityntie 4, SF-02231 ESP00, Finland TEL: 09-8595-80 FAX: 09-8595-8595 NORWAY SMC

DM

Aereo 081045 Santa Fe de Bogot, Colombia TEL: 1-424-9240 FAX: 1-424-9260 15-18-20 SMCs Global Service Network Europe Oceania/Asia AUSTRALIA SMC Pneumatics (Australia) Pty.Ltd. 14-18 Hudson Avenue Castle Hill NSW 2154, Australia TEL: 02-9354-8222 FAX: 02-9894-5719 FINLAND SMC Pneumatics Finland OY PL72, Tiistinniityntie 4, SF-02231 ESP00, Finland TEL: 09-8595-80 FAX: 09-8595-8595 NORWAY SMC

VSA4

0.31 0.31 0.30 0.33 b 0.34 0.47 0.51 0.34 0.47 0.51 0.34 0.44 0.48 0.33 0.48 0.53 Cv 1.0 1.2 1.4 1.0 1.2 1.4 1.0 1.2 1.3 1.1 1.2 1.3 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 8 Rc VSA4120-01 VSA4120-02 VSA4120-03 VSA4220-01 VSA4220-02 VSA4220-03 VSA4320-01 VSA4320-02 VSA4320-03 VSA4420-01 VSA4420-02 VSA4420-03 2 position single VA 1 4 1 8 Rc 0.60 1 8 Rc 1 8 Rc SA 2 position double

Clean Gas Filter Clean Gas Strainer

Case, Cover Stainless steel 316 (Interior/Exterior: Electrolytic polishing) SFB10PTFE membrane Filter medium Main material SFB20-02 Stainless steel 316 sintered metal Seal Fluororubber (FKM) Packaging Antistatic sealed double package -7- 2-3 Dimensions 1) SFB100-02,SFB200-02: Rc1/4 SFB101-02,SFB201-02: NPT1/4 SFB104-M5: M5 2) SFB102-02,SFB202-02: TSJ1/4 (Tube Swage Joint) 3) SFB103-02,SFB203

Ionizer Nozzle type IZN10 Series IZS

Maintenance detection signal ON OFF Output Requirement for maintenance detected ON OFF Input External switch signal 1, 2 455 IZN10 Series Dimensions 06 07 06 07 Energy saving static neutralization nozzle/IZN10-01 High flow rate nozzle/IZN10-02 20 Note 1) (110) 16 100 5 5 46 A 3.4 18.5 11 6 5 6 A 8 7 (Tap for ground wiring) M3 x 0.5 depth 4 40 25 12 A 93.6 A-A (mm) A Model 01 02 01 02 IZN1006

Antistatic Tubing Series TA

Aereo 081045 Santa Fe de Bogot, Colombia TEL: 1-424-9240 FAX: 1-424-9260 15-18-20 SMCs Global Service Network Europe Oceania/Asia AUSTRALIA SMC Pneumatics (Australia) Pty.Ltd. 14-18 Hudson Avenue Castle Hill NSW 2154, Australia TEL: 02-9354-8222 FAX: 02-9894-5719 FINLAND SMC Pneumatics Finland OY PL72, Tiistinniityntie 4, SF-02231 ESP00, Finland TEL: 09-8595-80 FAX: 09-8595-8595 NORWAY SMC

KDM

Aereo 081045 Santa Fe de Bogot, Colombia TEL: 1-424-9240 FAX: 1-424-9260 15-18-20 SMCs Global Service Network Europe Oceania/Asia AUSTRALIA SMC Pneumatics (Australia) Pty.Ltd. 14-18 Hudson Avenue Castle Hill NSW 2154, Australia TEL: 02-9354-8222 FAX: 02-9894-5719 FINLAND SMC Pneumatics Finland OY PL72, Tiistinniityntie 4, SF-02231 ESP00, Finland TEL: 09-8595-80 FAX: 09-8595-8595 NORWAY SMC

5 Port Solenoid Valve Series SV

SV B00 SOL.b SOL.a 3(EB) 5(EA) 1(P) 4(A) 2(B) N.C. valve N.O. valve SOL.b SOL.a 1 2 SV C00 3(EB) 5(EA) 1(P) External pilot specification is not available for 4 position dual 3 port valves.

Table of Contents

1-2-7 Precautions 1 Be sure to read before handling.

Ionizer Gun

Doc. no.IZ*-OMX0012-B PRODUCT NAME Ionizer Gun MODEL / Series / Product Number IZG10 1 Doc. no.IZ*-OMX0012-B Contents Safety Instructions . 3 1. How to Order . 9 1-1. Ionizer . 9 1-2. Accessories . 9 1-3. Repair parts . 10 2. How to Use . 11 2-1. Procedures to operation . 11 3. Wiring . 12 3-1. AC adapter type/ IZG10-01, 02 . 12 3-2. Power supply cable type/ IZG10-03 . 12 4.