q"s

*r-r-r --r| | | a High-speed | | | response time I I I specifications t t l | | t---{ Pressure display unit | | t--fMfi--l | | f--fkof/cm, l I I [s-f b "t| | I-+-fEr_--] | | tsT kp " ] t l t l I I Cable connector type I S I Straiqht tvpe 3 m I I L I Riqht anqle tvpe 3 m I I j N lWithout cable connector I l L-Bracket Model 7 . l00O tvoe v : 2000 tvoe Pressure [rPa 2 kqf/cm, 3 bar 4 PSI kPa

MNB

l m H B Bore size (mm) Clevis Knuckle Part No. d Bore size (mm) Part No.

LEH_C

-4 M30.5 0.9 6 LEHZ(J)16(L)K2-6 M40.7 1.4 6 LEHZ(J)20(L)K2-10 M50.8 3.0 8 LEHZ(J)25(L)K2-14 M61 5.0 10 LEHZ32K2-22 M61 5.0 10 LEHZ40K2-30 M81.25 12.0 14 17 - LEHF [Nm] LEHZ(J)10(L)K2-4 M30.5 0.9 LEHZ(J)16(L)K2-6 M30.5 0.9 LEHZ(J)20(L)K2-10 M40.7 1.4 LEHZ(J)25(L)K2-14 M50.8 3.0 LEHZ32K2-22 M50.8 3.0 LEHZ40K2-30 M61 5.0 [Nm] L[mm] LEHZ(J)10(L)K2-4 M40.7 1.4 6 LEHZ(J)16(L)K2-6 M40.7 1.4 6

NCA1

Connector type A B D M8-3 pins M8-4 pins M12-4 pins CJP Lead wire length S 0.5 (m)(1.64 ft) CJ2 M 1.0 (m)(3.28 ft) Auto Switch Mounting Bracket Part No.

NCA1

Connector type A B D M8-3 pins M8-4 pins M12-4 pins CJP Lead wire length S 0.5 (m)(1.64 ft) CJ2 M 1.0 (m)(3.28 ft) Auto Switch Mounting Bracket Part No.

Process Pump

min 1 to 20 L/min PA(P) Average discharge pressure 0 to 0.4 MPa 0.2 to 0.5 MPa (for 0 to 60C) Pilot air pressure PAX Air consumption 230 L/min (ANR) or less PB Dry Up to 1 m (inside the pump is dry) Suction lift Wet Up to 4 m (with fluid inside the pump) PAF PAF 80 dB (A) or less (excluding the noise from the quick exhaust and solenoid valve) 80 dB (A) or less (Option: with silencer, AN20

2/3 Port Valve

(No need to add options "S" and "L".)

NCA1

(1.64 ft) L 3 (m) (9.84 ft) Z 5 (m) (16.4 ft) For standard part number please see applicable auto switches on page 44 50 For standard part number please see applicable auto switches on page 44 50 Connector type A M8-3 pins B M8-4 Pins D M12-4 Pins Lead wire length S 0.5 (m) M 1.0 (m) L 3.0 (m) Auto Switch Mounting Bracket/Part No.

Multistage Ejector (N)ZL Series

G H L LN LO M MN MO Lead wire length 0.3m Lead wire length 0.6m Lead wire length 0.3m Without lead wires Without connector Lead wire length 0.3m Without lead wires Without connector Grommet L type plug connector M type plug connector 4 Multistage Ejector Series (N)ZL Ejector Specifications Standard (N)ZL112 Model Nozzle diameter Maximum suction flow rate Air consumption Maximum vacuum pressure

LVQ

Description Body class Symbol LVC LVA Bracket assembly LQ-GBL LVH J, K 1, 2 LVD J type K type LVQ LQ 1, 2, 3, 4, 5, 6 L, M LVN L type M type (for short piping) TI/ TIL Table 1 Tubing size symbols Part No. Description Replacement parts PA Tubing O.D.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Nil (Example) M9N 1 m . M (Example) M9NM 3 m . L (Example) M9NL 5 m .

MXS Series Air Slide Table

Note2) Functional options are not available for MXS L.

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

L plug connector: VQD1151l-lL-M5 M plug connector: VQD1151l-lM-M5 5 5 5.5 SY 4(A) 2(B) SYJ SX VK VZ Lead wire length: 300mm Direct manual override Light 27 VF VFR SMC 17.6 11.2 3(R) VP7 9 3 2-3.5 Mounting hole 10.9 9.1 VP4 5.5 VQ VQ4 33.5 38 37 12 28.5 VQZ 1(P) 1(P) VQD 4-M5 X 0.8 5.5 (P, A, B, R port) 13 VZS L plug connector (L) 49 50.5 VFS M plug connector (M) VS VS7 1.13-7 Series VQD1000

MU

Nil (Example) A73C 3 m L (Example) A73CL 5 m Z (Example) A73CZ None N (Example) A73CN Solid state switches marked with are produced upon receipt of order.

MU

Nil (Example) A73C 3 m L (Example) A73CL 5 m Z (Example) A73CZ None N (Example) A73CN Solid state switches marked with are produced upon receipt of order.

MXW

A F F L = 200 mm F L = 200 mm A L L MX L L = 200 mm MTS A MXW8/12/16 MXW8/12/16 MXW8/12/16 MY 0.03 0.03 0.10 CY MXW12 MXW8 MXW16 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXW12 MXW8 MXW16 0.08 MG MXW12 MXW8 MXW16 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local

MHC2

Lead wire length symbols: 0.5 m Nil (Example) Y59A 3 m L (Example) Y59AL 5 m Z (Example) Y59AZ Auto switches marked with a symbol are produced upon receipt of order. Note) No need to add -X61 at the end of the part number for the flexible lead wire for D-Y type auto switch, because it adopts flexible lead wire as standard.

MHC2

Lead wire length symbols: 0.5 m Nil (Example) Y59A 3 m L (Example) Y59AL 5 m Z (Example) Y59AZ Auto switches marked with a symbol are produced upon receipt of order. Note) No need to add -X61 at the end of the part number for the flexible lead wire for D-Y type auto switch, because it adopts flexible lead wire as standard.

LV50-OMQ0002

Approx. 1.7 mm Colours Brown, White, Black, Blue Sheath Material Lead free heat and oil resistant PVC Finished O.D. 6 -66No.LV50***-OMQ0002-G Characteristics Chart Flow characteristics (pressure loss) LFE1 LFE2 0.02 0.02 P r essur r e l oss[ M P a] 0.015 0.015 P r essur e l oss[ M P a] 0.01 0.01 0.005 0.005 0 0 0 5 10 15 20 0 20 40 60 80 100 Fl ow r at e[ L/ m i n] Fl ow r at e[ L/ m i n]

Series LQ3 High Purity Fluororesin Fitting

Thread Size RNPT A E H L M W LQ3H1A-M LQ3H2A-M LQ3H2B-M LQ3H3A-M LQ3H3B-M LQ3H3C-M LQ3H4A-M LQ3H4B-M LQ3H4C-M LQ3H5A-M LQ3H5B-M LQ3H5C-M LQ3H6A-M LQ3H6B-M LQ3H6C-M 29.5 10 11 33.5 14 10 1/8" 1/8" 1/4" 1/8" 1/4" 3/8" 1/4" 3/8" 1/2" 3/8" 1/2" 3/4" 1/2" 3/4" 1" 1/8" L 37.5 17 16 43.5 20 14 1/4" H (A) W 48.5 21 55 25 18 22.5 3/8" M 1/2" 56 24 64 29 22 24.5 1/4 (E) Thread Size R(NPT) 66.5 32 76