ZPT/ZPX

H A 30 ZPNA-M22 34.6 Bolts Dimensions (mm) A 11 d M3 x 0.5 12 7 M4 x 0.7 B 5.5 L 8 8 10 15 8.5 M5 x 0.8 13-11-82

KFx-OMY0034

Chamfer dimension D Connection female Thread size (Recommended value) (mm) M5 5.1 to 5.4 10-32UNF 5.0 to 5.3 Rc1/8 10.2 to 10.4 Rc1/4 13.6 to 13.8 Rc3/8 17.1 to 17.3 Rc 1/2 21.4 to 21.6 NPTNPTF1/8 10.5 to 10.7 NPTNPTF1/4 14.1 to 14.3 NPTNPTF3/8 17.4 to 17.6 NPTNPTF1/2 21.7 to 21.9 G1/8 10.2 to 10.6 G1/4 13.6 to 14.0 G3/8 17.1 to 17.5 G1/2 21.4 to 21.8 Precautions for use with non-SMC Caution

Remodeled

Precautions on Selection 3 9 10. Precautions on Design 3 10 11. Mounting Methods 4 11 12. Piping 5 13 13. Operating Environment 6 15 14. Speed Control 15 15. Troubleshooting 7 16 16. How to exchange seals 8 17 17. Construction 21 18. Auto Switch 25 1 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

CRB2-OM00001

If a load that exceeds the allowable values is applied to the product, it could lead to equipment malfunction, a hazard to humans, and damage to the machinery and equipment. (10) Place an external stopper in a position away from the rotating shaft.

MHx-OMZ0003

M6x23 JMHZ2-16D D-M9N-5 M3X7 M-5ALHU-2 2 ASN2-M5-X937 M-5ALHU-2 3 V114-5LU KQ2S04-M5N 3x6 ISO9409-1 M4x25 M8 8 () 6x10 M6x10 5 - 3 3-1. 6 - 3-2. mm 16 MPa 0.1~0.7 (oC) -10~50 (mm) 0.01 (c.p.m.) 120 32.7 (N) 43.5 (mm) 10 (g) 430 M8 8 (www.smcworld.com)JMHZ2 Series P .15 M8 8 7 - 3-3. 2 1 F 8 - 3-4.

MHR2/MDHR2

Rotary Actuated Air Gripper/2-Finger Type Series MHR2/MDHR2 Size: 10, 15, 20, 30 How to Order MHR 2 10 R Without auto switch With auto switch (Built-in magnet) MDHR 2 10 R M9N S Made to Order Refer to page 492 for details.

How to Order MGQ M Cylinder stroke (mm) Refer to “ Standard Stroke ” on page 339. Slide bearing Ball bushing bearing Bearing type M L 12 mm 16 mm 20 mm 25 mm 32 mm Bore size 12 16 20 25 32 40 mm 50 mm 63 mm 80 mm 100 mm 40 50 63 80 100 M9BW 2 pcs. 1 pc. n

For MGQM50-40 st, MGQM50-50 st is provided with a 10 mm width spacer.

Series CXSJ 11-/12- ø6, ø10 21-/22- Dual Rod Cylinder/Compact Type

M L Bearing type Compact type Slide Bearing Ball bushing bearing Bore size/Stroke (mm) Standard stroke 10, 20, 30, 40, 50 10, 20, 30, 40, 50 Bore size 6 10 Auto Switch Specifications (Refer to the WEB catalog for detailed specifications and auto switches not in the following table.)

AS

1/8" 03 5/32" 07 1/4" 09 5/16" 11 3/8" 13 1/2" -X214 Restrictor (Without check valve) 04 4 06 6 08 8 10 10 12 12 With One-touch ttings Example) AS2002F-04A-X214 10Clean Series Example) 10-AS2002F-04A 1 For selecting applicable tubing O.D., refer to the Model shown above. 2 Use 1/8" tubing. 1 Fluorine grease is used. 2 The cleanliness class (ISO class) is 5.

AS_FS Inline

Flow Rate and Sonic Conductance Model AS1002FS AS2002FSAS2052FS AS3002FS AS4002FS Metric size 3.2 4 6 4 6 6 8 6 8 10 12 10 12 Tubing O.D.

Air Operated Type Integral Fitting Type (Hyper Fittings) Series LVC How to Order Valves (Single Type) LVC LVA LVC 2 0 06 S LVH Option Body class Nil None LVD 1 With flow rate adjustment Body class Orifice dia. Symbol 2 With bypass ø4 2 2 Valve type LQ2

Symbol Body class 2 3, 4, 5, 6 3, 4, 5, 6 Thread type M5 Rc 1/8 NPT 1/8 Nil N Variations Model LVC20 LVC30 LVC40 LVC60 LVC50 Orifice diameter 4 8 10 22 16 Tubing O.D. Inch sizes Metric 3, 4, 6 6, 8, 10 10, 12 19, 25 12, 19 03 05 07 11 13 19 25 1/8 3/16 1/4 3/8 1/2 3/4 1 Inch Valve type Symbol Type 1/4, 3/8 3/8, 1/2 3/4, 1 1/2, 3/4 1/8, 3/16, 1/4 Basic type N.C. PB PA PA N.O.

Integral Fitting Type (Hyper Fittings) Series LVD How to Order LVC LVA LVD 1 0 03 S LVH Body class Option LVD Orifice dia. Body class Nil None Symbol 1 Valve type 1 1 ø2 With flow rate adjustment LVQ 2 2 2 ø4 With bypass 0 N.C. 3 3 With flow rate adjus

Refer to the applicable tubing table to the left Variations Basic size With reducer Model LVD10 LVD20 LVD30 LVD40 LVD50 Orifice diameter 2 4 8 10 16 Tubing O.D. Metric 3, 4 3, 4, 6 6, 8, 10 10, 12 12, 19 Valve type Inch Symbol Type 1/8 1/4, 3/8 3/8, 1/2 1/2, 3/4 1/8, 3/16, 1/4 Basic type N.C. PB PA PA N.O. PB B A B A B A N.C. N.O.

range: 0.1MPa - 0.7MPa (high pressure style 0.8MPa), Effective area mm 2 (Cv): metal seal 3.6 (0.2); rubber seal 5.4 (0.3), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, H 1.5W: 2 position metal seal 12 or less; 2 position rubber seal 15 or less 3 position metal seal 20 or less; 3 position rubber seal 25 or less, Ambient and fluid temperature: -10

range: 0.1MPa - 0.7MPa (high pressure style 0.8MPa), Effective area mm 2 (Cv): metal seal 3.6 (0.2); rubber seal 5.4 (0.3), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, H 1.5W: 2 position metal seal 12 or less; 2 position rubber seal 15 or less 3 position metal seal 20 or less; 3 position rubber seal 25 or less, Ambient and fluid temperature: -10

range: 0.1MPa - 0.7MPa (high pressure style 0.8MPa), Effective area mm 2 (Cv): metal seal 3.6 (0.2); rubber seal 5.4 (0.3), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, H 1.5W: 2 position metal seal 12 or less; 2 position rubber seal 15 or less 3 position metal seal 20 or less; 3 position rubber seal 25 or less, Ambient and fluid temperature: -10

Finger Valve

JIS symbol 2 port valve 3 port valve 10 4. Construction (2) VHK2A(R) VHK3A(R) (9) (4) (1) (5) (3) (11) (10) (7) (8) (6) No.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CBA2 Standard type CA2 Standard type CA2W Standard/Non-rotating rod CA2K Standard/Non-rotating rod CA2KW Low friction CA2
Q End Lock Cylinder

Minimum operating pressure Without auto switch: 10 to 70C Ambient and fluid temperature (With no freezing) With auto switch: 10 to 60C Piston speed 50 to 500 mm/s Same dimensions as those of the standard cylinder (Series CA2) Cushion Interchangeable Thread tolerance JIS class 2 To 250 st : 251 to 1000 st : 1001 to 1500 st : +1.0 0 +1.4 0 +1.8 0 Stroke length tolerance Lubrication Not required

MXF

Auto switches are shipped together (not assembled). 136 Low Profile Slide Table Series MXF Specifications 8 12 16 20 Bore size (mm) Piping port size M3 x 0.5 M5 x 0.8 Air Fluid Double acting Action 0.15 to 0.7 MPa Operating pressure 1.05 MPa Proof pressure 10 to 60 Ambient and fluid temperature MXH 50 to 500 mm/s Piston speed Rubber bumper on both sides Cushion MXU Non-lube Lubrication Auto

Slit Valve

10 O-ring: FKM Internal leak Note 2) (Pam3/s) O-ring: Kalrez 6.5 x 10 9 6.5 x 10 8 Internal leak Note 2) (Pam3/s) at reversed pressure [Reversed pressure: 0.1 MPa (abs) or less] O-ring: FKM O-ring: Kalrez 6.5 x 10 7 6.5 x 10 11 External leak Note 2) (Pam3/s) Gate part 5 to 150 Operation temperature Note 3) (C) Actuator part 5 to 60 Inert gas Fluid 0.6 to 1 Operating time Note 4) (s) FKM,

XMC/XYC Series

Conductance l/s Note 2 5 14 45 80 160 200 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Leakage Pa m3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type XMC KF(NW),CF KF(NW) KF(NW),CF KF(NW) KF(NW),K(DN) ,CF KF(NW),K(D N) XYC KF(NW) KF(NW) KF(NW) KF(NW) K(DN) KF(NW