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[Foundations bolt set] AB IDF Size Applicable Thermo-cooler Material Quantity per set Symbol HRG001HRG002HRG005500 Stainless steel 4 HRG010HRG015501 Note) Refer to page 33 for dimensions.

1 0 0 0 0 1 33 1 0 0 0 0 1 34 1 0 0 0 1 0 34 1 0 0 0 1 0 35 1 0 0 0 1 1 35 1 0 0 0 1 1 36 1 0 0 1 0 0 36 1 0 0 1 0 0 37 1 0 0 1 0 1 37 1 0 0 1 0 1 38 1 0 0 1 1 0 38 1 0 0 1 1 0 39 1 0 0 1 1 1 39 1 0 0 1 1 1 40 1 0 1 0 0 0 40 1 0 1 0 0 0 41 1 0 1 0 0 1 41 1 0 1 0 0 1 42 1 0 1 0 1 0 42 1 0 1 0 1 0 43 1 0 1 0 1 1 43 1 0 1 0 1 1 44 1 0 1 1 0 0 44 1 0 1 1 0 0 45 1 0 1 1 0 1 45 1 0 1 1 0 1 46

Communication setting screen 35.Contact output 1 to 3 34.Contact input signal 31.Contact input signal operation 33.Analog output 32.Serial communication setting screen detail setting screen setting screen setting screen setting screen 11. Temperature waveform 11.

Refer to Communication Function of Operation Manual for details. (1) (2) (3) (4) Ethernet communication setting screen Table 5.4-33 Setting of ethernet communication No.

side fluid temperature C 5 to 35 Automatic fluid fill port Rc1/2 (Symbol F: G1/2, Symbol N: NPT1/2) Overflow port Rc1 (Symbol F: G1, Symbol N: NPT1) Fluid contact material Stainless steel, Copper (Heat exchanger brazing), Brass, Bronze, PTFE, PU, EPDM, PVC, NBR, PE, NR, PBT, PP , POM, Carbon, Ceramic Temperature range C 5 to 40 Pressure range MPa 0.3 to 0.5 Required flow 50/60 Hz L/min 33

Fig. 33 No.DIG-31900-OM002 39 Parameter Setting Procedure This parameter is fixed when shipped out of the factory. User can not change it. (000) Actuator type (200) Operation direction Customer can select direct (dir) or reverse (rvs).

Note 5) Leave an interval of 15ms (the recommendation is 30ms) or more between input signals and maintain the state of the signal for 15ms (the recommendation is 30ms) or more, because PLC processing delays and controller scanning delays can occur. 29 - 2) Signals when Stopped: In the event when EMG is used / See 5.1 Warning (9) on p. 33 The operating sequence is 1. Stop 2.

For details, refer to pages 3-7-35 and 3-7-36. 3-7-32 33 5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VZS3000 Plug-in type Manifold With D-sub connector: VV5ZS2-51FStation 1Port size Manual override Indicator light 2-4.5 mounting hole U side VK (n) VZ VF (2) VFR (1) Stations VP4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080

Therefore, to operate the cylinder, make sure to use an SMC speed controller and adjust the piston speed to 500 mm/s or less. d L (mm) 25 20 32 40 Size 30 29 L 33 36 8 5 d 5 5 Retaining Ring Installation/Removal Caution 2.

ML2B25 ML2B32 ML2B40 Applicable cylinder ML2B25 ML2B32 ML2B40 RS H A RZQ MI W S Stroke Adjusting Unit CEP1 With shock absorber: CE1 ML2B Bore size S Stroke L CE2 TT h ML2B EB FF EA Stroke adjusting unit C J G5-S CV ED MVGQ CC TA FA (Absorber stroke) RB FB FC J Shock absorber Cushion needle EC DFH -X EY 20Data (mm) TT Max. 16.5 Max. 20 Max. 25 TA 7 12 12 FH 12 16 16 FF 6 6 6 FC 13 17 17 FB 33

A JOG operation is performed only while one of these buttons is pressed. 33 - 5.3 Program JOG Operation This function allows automatic operation determined by the preset pattern of operation. WARNING Using the program JOG operation function while the motor is running is dangerous. Be sure to check the users manual before using this function.

TQ1230001-OM106-B ModelZPG16J-7A-X2 ModelZPG(B25,B30)J-7A-X2 (Suction cup formMultistage bellows type 2.5-Stage) (Suction cup formMultistage bellows type 3.5-Stage) Dimensions Model A B D E F G H ZPGB25J-7A-X2 25 26 27 10.2 32.5 48 52.5 ZPGB30J-7A-X2 30 33 32 13.8 38 54.5 59 Note1) D and (st) indicate the reference value during gripping at vacuum pressure: -85[kPa]. -18No.

Usable stroke by buckling strength Usablestroke by Mounting style buckling strength (cm) Pressure Symbol and sketch (MPa) Symbol of bracket Rod side Frang e F Head side flange 103 92 113 Foot: 79 70 86 L G 66 58 72 45 38 47 33 27 34 26 22 27 96 83 106 Center Clevis trunnion 71 61 76 CD T 59 50 62 135 119 147 101 89 111 84 74 91 Rod side Frang e F Head side flange 301

No.D-S-OMG0006-C PRODUCT NAME Trimmer Auto Switch MODEL / Series / Product Number D-M9K/D-F7K/D-Y7K D-RNK/D-RPK Table of Contents Safety Instructions 2 Model Indication and How to Order 9 Summary of Product parts 10 Definition and terminology 12 Mounting and Installation 13 Wiring 13 Internal circuit 15 Offset adjustment 17 Installation 18 Setting 19 Maintenance 32 Troubleshooting 33 Specification

MM M 4.5 (2 locations) M4 x 0.7 (4 locations) (Special cap bolt) FX FZ Arm 5.5 FV (mm) Rod Flange M MM Model Rod state 10 mm Clamp stroke 20 mm 30 mm 10 mm Clamp stroke 20 mm 30 mm Head Flange DModel (mm) Retracted Extended Retracted Extended 23 40.5 26 43.5 33 60.5 36 63.5 17 34.5 17 34.5 43 80.5 46 83.5 27 54.5 27 54.5 37 74.5 37 74.5 MKF12-Z FV FX FZ 25 30 45 45 55 55 MKG12-Z MKG16-Z -

2 P = 25 P = 25 1 50.5 44 X Stations 12 38 26.5 Cable length (600 or 1500 mm) D side 37.5 10.2 12 106.5 43.5 178.5 50.5 59 96.5 Dimensions Formula L1 = 25n + 63, L2 = 25n + 76 n: Station (Maximum 16 stations) L n 9 288 301 8 263 276 L1 L2 7 238 251 6 213 226 5 188 201 4 163 176 3 138 151 1 2 113 126 16 463 476 15 438 451 14 413 426 13 388 401 12 363 376 11 338 351 10 313 326 88 101 2-5-33

filter FLUID OUT AIR SUP FLUID IN Air supply AIR EXH Strainer Silencer Throttle Transfer fluid 14 Series PAX1000 Dimensions 4-M8 (M6 hexagon socket head screw can be inserted) 10.5 105 7.5 Mounting hole detail 69 Reset button 100 125 23 RESET (175) AIR SUP (pilot air supply port) Rc 1/4 FLUID IN Rc 1/4, 3/8 FLUID OUT Rc 1/4, 3/8 PROCESS PUMP AIR SUP 110 45 29 FLUID IN FLUID OUT AIR EXH 33

Grease pack part no.: GR-S-010 (10 g) With End Lock Body gasket #0 #1 #2 33 NBR NBR Rod seal 33 and 34 are non-replaceable parts, so they are not included in the seal kit.

Without indicator light/ surge voltage suppressor R, U types S, Z types 19 or less 26 or less 2 position single 18 or less 18 or less 22 or less 2 position double 32 or less 32 or less 38 or less 3 position 19 or less SY7000 With indicator light/surge voltage suppressor Response time ms (at 0.5MPa) Type of actuation Without indicator light/ surge voltage suppressor R, U types S, Z types 33

port size P Q (mm) H1 H G FL I F CX CI B1 CD AL D A MM L K KA NA NN N Bore size E 20 0 0.033 0 0.033 0 0.033 0 0.039 20 41 8 10.5 28 13 5 12 20 8 15.5 8 18 M8 x 1.25 13 12 5 6 24 M20 x 1.5 15 26 25 45 8 10.5 13 6 12 22 8 19.5 10 22 17 12 5.5 8 30 M26 x 1.5 15 33.5 M10 x 1.25 26 32 45 8 10.5 13 6 20 27 10 19.5 12 22 17 15 M26 x 1.5 5.5 10 15 37.5 34.5 M10 x 1.25 32 40 50 11 13.5 16 8 20 33