MXW

Auto switches are shipped together (not assembled). 150 Series MXW Air Slide Table Specifications Model MXW8 MXW16 MXW20 MXW12 MXW25 12 x 2 17 or its equivalent 16 x 2 23 or its equivalent 20 x 2 28 or its equivalent 25 x 2 35 or its equivalent ( ) ( ) ( ) ( ) 8 x 2 11 or its equivalent ( ) Bore size (mm) Rc 1/8 M5 x 0.8 Piping port size Fluid Air Action Double acting MXH Operating pressure

Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series

) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 DNil A B C Sealmaterial XSA 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Symbol Nil N1 Seal material FKM EPDM Barrel Perfluoro Compound no. 1349-80 2101-80 1.3 x 10-10 (FKM) XVD Note 1) Values at ambient temperatures, excluding gas permeation.

Low-Speed Compact Rotary Actuator Rack & Pinion Type CRQ2X Series Size: 10, 15, 20, 30, 40

Symbol Specifications/Content Applicable shaft type Shaft type variation X,Y,Z,T,J,K S,W XA1 to XA24 Shaft pattern sequencing I X,Y,Z,T,J,K XA31 to XA59 XC7 Shaft pattern sequencing II Weight S,W,X,T,J Reversed shaft XC8 to XC11 Change of rotating range (g) Change of angle adjustable range (0 to 100)" Size Standard weight XC12 to XC15 90 180 S,W,Y Change of angle adjustable range (90 to

Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal XMA, XYA Series

1.3 x 10-9 1.3 x 10-8 CYV Kalrez Q1 R1 R2 R3 S1 T1 U1 4079 SS592 SS630 SSE38 1232-70 3310-75 1.3 x 10-10 (FKM) Note 1) Values at ambient temperatures, excluding gas permeation.

ZQ-OM01301

Mounting hole (2 parts) 3.1.2 Standalone product (Mounting with a bracket) 1) Mount the optional bracket (ZQ1-BK1-A) to the mounting holes (2 x 3.2) on the product body side using the round head combination screws and hexagon nuts included in the accessories, and mount the product on the floor, etc. using the mounting holes on the bracket (4 x 3.2). 2) Use the recommended tightening torque

Vacuum Gripper

Center of gravity (ZXP7A-ZPB25JN-X1-ASSISTA) Z Y X X Z (Unit: mm) Center of gravity X Y Z -2.5 -1.63 58.28 Y -17No. TQ1230001-OM105-A 5.3. Suction cup with adapter *It is shown here for representative model only. See the suction cup catalog for the other models.

Vacuum Gripper

Center of gravity (ZXP7A01-ZPB25JN-X1) Y Y Z X (Unit: mm) Center of gravity Z X Y Z 0.01 0.68 56.48 X -22No. TQ1230001-OM101-D 5.3. Suction cup with adapter *It is shown here for representative model only. See the suction cup catalog for the other models.

High-precision Digital Pressure Switch ( compatible)

Remarks Bracket A ZS-50-A With 2 mounting screws M4 x 6 Bracket B ZS-50-B With 2 mounting screws M4 x 6 Orifice ZS-48-A ZS-31-B Straight: 5 m Lead wire with M12 connector ZS-31-C Right angle: 5 m -9No.PS-OMY0007-A Summary of Product parts Names of individual parts Body Power supply/output connectors: Connects the power supply/output lead wire.

Quick Exhaust Valve Series AQ

Description AQ2000 AQ3000 AQ5000 AQ1500 AQ1510 AS Valve 4 NBR 30073 30053 30063 30083 30093 O-ring 5 NBR CA40-1601 CA50-1602 30066 9 x 7 x 1 ASP JISB2401P-7 ASN Dimensions AQ AQ1500/1510 AQ2000/3000/5000 ASV AK VCHC ASS ASR ASQ 3 x port size KE (Mounting hole) 2 x D TMH 3 x port size L1 L2 L3 L4 L5 L6 L7 L8 L9 D L1 L2 L3 L4 Model Port size Model Port size 1 8 1 4 AQ2000 , M5 x 0.8 AQ1500

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Flow rate range None e-con connector x 1 pc. Nil C 0.4 to 4 l/min 1.8 to 20 l/min 4 to 40 l/min 04 20 40 The cable and connector are shipped unassembled.

Compact Electric Actuator Series LG1

1 thread depth 10 67 4-M8 x 1.25 thread depth 10 20 0.02 8H10 depth 10 Encoder signal line Motor power line 8H10 depth 8 85 130 A (Table movement range) 77.3 (77) 107 10 95 Work mounting reference plane 55 Body mounting reference plane 52.5 D 1 125 8(4)-M6 x 1 thread depth 10 3(2)-8H10 depth 10 30 95 C 100 95 8(4)-6.2 (160) () () 110 95 20 95 B (140) () () Dimensions A Stroke Model B C

One-touch Fittings Series KQ2

O e b u t ) m m ( . n i M e l o h . a i d t h g i e W ) g ( . o N t r a P T ) M ( H ) . x e H ( L g n i t n u o M e l o h M 6 1 / 3 M 0 0 5 0 E 2 Q K 1 X 4 1 M 7 1 4 3 5 1 5 . 6 1 5 . 3 0 3 4 / 1 M 0 0 7 0 E 2 Q K 1 X 4 1 M 7 1 5 . 4 3 5 1 7 1 6 . 4 0 3 6 1 / 5 M 0 0 9 0 E 2 Q K 1 X 6 1 M 9 1 8 3 7 1 5 . 8 1 6 8 4 8 / 3 M 0 0 1 1 E 2 Q K 1 X 0 2 M 4 2 5 . 2 4 1 2 1 2 7 2 6 2 / 1 M 0 0 3 1

5 Port Solenoid Valve, Series VQC

Communication connector (PROFIBUS-DP): M12, 5 pins (plug) 3 2 5 R 1 4 0 0 0 0 BUS 3 Description Function No. 1 1 12 1 1 Terminal +5V VP X 1 2 2 P PWR Signal N R x D/T x D(N) 2 3 3 1 GND terminal DGND 3 Signal P R x D/T x D(P) 4 Shield ground SHIELD 5 Power connector: M12, 5 pins (Boss configuration differs from plug and communication connector.)

High-precision Digital Pressure Switch ( compatible)

Remarks Bracket A ZS-50-A With 2 mounting screws M4 x 6 Bracket B ZS-50-B With 2 mounting screws M4 x 6 ZS-31-B Straight: 5 m Lead wire with M12 connector ZS-31-C Right angle: 5 m -8No.PS-OMV0004-H Summary of Product parts Names of individual parts Body Power supply/ output connectors: Connects the power supply/ output lead wire. Operation/Display: Refer to the table below.

High-precision Digital Pressure Switch

Remarks Bracket A ZS-50-A With 2 mounting screws M4 x 6 Bracket B ZS-50-B With 2 mounting screws M4 x 6 Orifice ZS-48-A ZS-31-B Straight: 5 m Lead wire with M12 connector ZS-31-C Right angle: 5 m -9No.PS-OMV0009-E Summary of Product parts Names of individual parts Body Power supply/output connectors: Connects the power supply/output lead wire.

NA-080-INFLW

NA-080-INFLW 97 Power 73 54 30 15 Alarm 2 x 6 Mounting Holes Tube O.D. 1/4 In Port Alarm 50 73 54 30 15 Tube O.D. 1/4 Out Port 4 x M4 x 4 Mounting Holes LLD2A-02-Z07-X31 4 x M4 x 4 Mounting Holes (Includes controller & connectors) 20 Indicator 96 13 30 40 50 20 73 115.5 1/4HyperFlare with flow to 3000 ml/min 1/4HyperFlare 3/8Soundpipe 2000 2000 Minimum flow 2 ml/min 35 35 Measurement Range

3-Screen Display High-Precision Digital Pressure Switch Air 1.0 MPa/1.6 MPa ISE70 ISE71

Note Bracket A ZS-50-A Interchangeable with ISE70 With 2 mounting screws (M4 x 6L) Bracket B ZS-50-B With 2 mounting screws (M4 x 6L) Lead wire with M12 connector: Straight ZS-31-B Lead wire length: 5 m Lead wire with M12 connector: Right-angled ZS-31-C Lead wire length: 5 m 6 ISE70/71 Series For pressure switch precautions and specific product precautions, refer to the Operation Manual on

ITVH

Right angle type cable connector 3 m 52 10 ARJ (33) Straight type cable connector 3 m AR425 to 935 52 12.5 ARX AMR Setting part ARM 10 M12 x 1 Cable connection thread (Plug type) 5.5 8 ARP 111 11 Digital pressure display IR-A M5 x 0.8 Solenoid valve EXH Breathing IR M4 x 0.7 depth 8 F.G.

Filter Regulator IW Series

2 x Rc1/4 76 7 46 Gauge port 2 x Rc1/4 (20) 4 x M6 x 1 depth 10 IP 40 Drain IW IW Turn counterclockwise to open, clockwise to close.

Pulse Valve

P Port size 2 x P Port size F E F E D D C B C B Port size: Size 14 A A ( 52) ( 52) (20) (20) Silencer (Option) Silencer (Option) Pilot port 1/8, 1/4 (Rc, NPT, G) Pilot port 1/8, 1/4 (Rc, NPT, G) Exhaust port 3/8 Exhaust port 3/8 2 x P Port size 2 x P Port size F E F E G G D C B D C B 20 20 Dimensions [mm] Model Port size P A B C D E F G JSXFAF-06 3/4 74 55.5 92.5 36 19.3 48.8 JSXFAF-10 1