CRB2-OM00001

(2) C is integration constant.

High Vacuum Slit Valve

Specifications Opening angle 50mm336mm Working pressure Pa Atmospheric pressure to 10-6 Operating pressure MPa 0.45 to 0.6 Internal leakage amount O-ring material : FKM 6.510-10 Pam3/sec O-ring material : Kalrez 6.510-9 Pam3/sec C O-ring material : FKM 6.510-8 Pam3/sec Internal leakage amount (At negative pressure 0.1MPa or less) O-ring material : Kalrez 6.510-7 Pam3/sec C External leakage

DeviceNet-E

ITV2OM00080A 10

XLG Series

66 2 11 55 41 63 36 10 XL*-OMI0010-E 4-2Size 50,63,80,100,160 C E D C E E (KF Flange) (K Flange) Fn Fd J K H B A G A Unit: mm Model A B C D E Fn Fd G H J K XLG-50-1 70 183 80 31 10.5 75 52 77 29 10.5 XLG-63-1 88 209 100 39 11 87 95 70 76.5 36 9 XLG-80-1 90 250 117 45.5 11 114 110 83 105 44 9 XLG-100-1 108 270.5 154 55 11 134 130 102 92 58 9 XLG-160-1 138 339 200 65 11 190 180 153 124 62

11-cq2-e

Grease pack part no.: GR-S-010 (10 g) Retaining Ring Installation/Removal Caution 1. For installation and removal, use an appropriate pair of pliers (tool for installing a C retaining ring). 2.

NCA1

JM-10 JM-800 JM-1000 C 1.299 1.732 2.165 F 1 1/8 1 1/2 1 7/8 H 27/64 35/64 23/32 Dimensions per ASME B18.2.2 1987 (1999) Note: Jam nut is included. 13 Series NCA1 Cylinder Large Bore Series NCA1 Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.

Compact Cylinder/Standard Type: Double Acting, Single Rod Series CQ2

Grease pack part no.: GR-S-010 (10 g) Retaining Ring Installation/Removal Caution 1. For installation and removal, use an appropriate pair of pliers (tool for installing a C retaining ring). 2.

Manifold Specifications

: 2 to 10 stations U side: 2 to 10 stations Nil Standard length (Specify a longer rail than the standard length.)

MHF2-E

If a workpiece is still being held, there is a danger of it being dropped. 10 - 3-2. Disassembly Drawing 1 11 - Disassembly Drawing 2 12 - 3-3. Seal Replacement Procedure1 (Applicable models: MHF2-8D,MHF2-8D1) 1. Loosen the guide bolts and remove the finger assembly. 2. Remove the clips, cap B assemblies, and cap C assemblies. 3. Remove the pinion.

q"s

models are not Applicabl model Specitications 6 E Sel orergur max. 0.1 MPa ,o o Sel pressure ma-x. 0.5 MPa 3 o o Set pressure max. 0,9 MPr 5 O_l o Connection Rc 1/4 02 o o, Connection Rc 3/8 03 r) o Connectlon Rc 'l12 o4 o Bracket B O ,l Brackel c c :l: 6 A Connection NPTI/4 N02 _l ., connection NPT3/8 N03 C c co$nection NPT1/2 N04 a) Connection G 1/4 F02 o ll Connection G 3/8 F03 C al Connection

Flow Sensor Series PFMV

PFM PFMV PF2A PF2W PF2D IF 959 Series PFMV3 Dimensions 30 3 31 Thread depth 4 2 x M3 x 0.5 20 0.1 Power supply / Output connector 1.5 10 Sensor connector 3.2 1.5 8.2 Sensor connector (ZS-28-C) Terminal name DC (+) N.C.

LEKF-OMZ0035

Cable type Cable length[m] Grease application (Seal band part) Nil Without cable Nil Without cable Nil With 3 3 S Standard cable N Without (Roller specification) 5 5 R Robotic cable A 10 (Flexible cable) C 20 Driver type I/O cable length Compatible Power supply Nil Without cable drivers voltage [V] H Without cable Connector only Nil Without driver 1 1.5 [m] M2 LECYM2-V 200 to 230 U2 LECYU2

VP3145/3165/3185

In the case of -X80, VF3240(Pilot valve) will be mounted. 4-10-10

IDX-OM-W034

Specification for Option S 10 1 Safety instructions . 10 1 10 2 Specifications . 10 1 Chapter 11 Specification for Option T 11 1 Safety instructions . 11 -1 11 2 Specifications . 11 -1 11 3 Remote operation . 11 -2 11 4 How to connect the power supply and signal cable . 11 -2 11 5 How to re-start the operation . 11 -3 11 6 Electric wiring diagram . 11 -4 Chapter 12 Specification for Option

Digital Pressure Switch

C: Modified errors in text. D: Contents revised in several places. [July 2018] E: Contents are added.

Clean Rodless Cylinder Series CYP

Cleaned, assembled, inspected and double packaged in a clean room 10 Particle concentration (particles/m) Class M3.5 [Class 100] 10 10 Long strokes Class M2.5 [Class 10] 10 Long strokes are made possible by a special cylinder tube that does not bend.

ISO Interface

Operating Note 3) 2-position 8-6:5, 8-8:6, 8-10:5 8-6:20, 8-8:15, 8-10:10 frequency cycle/sec. 3-position 8-6:3, 8-8:3, 8-10:2 8-6:10, 8-8:10, 8-10:20 Lubrication Not Required Manual override Non-locking push type Protection structure Dust Proof Coil rated voltage 100VAC, 110VAC, 200VAC, 220VAC, 24VDC Allowable voltage range % -15~ +10% of rated voltage Coil insulation Class B or equivalent

PSxx-OMV0008CN

No.3 No.4 No.5 No.6 -77No.PS-OMV0008CN-E No.7 No.8 No.8 No.9 No.10 No.11 No.12 No.13 No.14 -78No.PS-OMV0008CN-E No.

FGD-E

1/13 FGX-OM-L005-C Product Name Industrial Filter Model / Series / Product Number FGD series 2/13 FGX-OM-L005-C Contents Safety Instructions 3 Parts Descriptions and Functions 6 Product Specifications 7 How to Order 7 Dimensions 8 Installation and Piping 9 Maintenance 9 Maintenance parts 10 3 3/13 FGX-OM-L005 FGX L005-C Industrial Filter Safety Instructions Industrial Filter Industrial Filter

Large Capacity Compressed Air Filters Series AFW

* 7,000 58.10 42.60 18 12 28 778 AFW8400-N100FGM-E* 8,400 59.40 42.80 20 14 28 936 AFW9800-N100FGM-E* 9,800 10 61 43.20 24 16 33 1,214 AFW11200-N100FGM-E* 11,200 61 43.20 24 18 33 1,214 AFW12600-N100FGM-E* 12,600 C C/F C/F C/F 23 C/F C/F 12 AFW16100-N120FGM-E* 16,100 1) Specify filtration grade by replacing; *: 5 = 5m; 1 = 1m; A = 0.01 m; C = activated carbon Technical Notes Correction Factor