CLQ

Counter bore depth 8 4-6.6 through 8 35 B + Stroke A + Stroke 7 80 Retraction locking LOCK 28 A, B dimensions (mm) Without auto switch With auto switch A 73.5 83.5 Bore size (mm) Stroke range (mm) A B B 30.5 40.5 10 to 50 75, 100 50 83.5 40.5 Dust cover (manual unlocking unit) Rc 1/8 unlocking port (unlocks when pressurized) Rod end male threads M18 x 1.5 33.5 28.5 26 11 Rod end nut Note)

E-P HYREG ® Series VY1 1

5 7.5 10 0 2.5 5 7.5 10 0 2.5 5 7.5 10 VY1D00-7 VY1B0-7 VY120-7 1 A 2 2 2 mA mA mA 4 0 8 12 16 20 4 0 8 12 16 20 4 0 8 12 16 20 VY1D00-8 0 5 10 15 20 VY1B0-8 0 5 10 15 20 VY120-8 0 5 10 15 20 1 3 3 3 A mA mA mA Command signal Command signal Command signal VY11300 1 VY1400 1 VY1500 1 1 1 1 0.8 0.8 0.8 A port pressure (MPa) A port pressure (MPa) A port pressure (MPa) 0.6 0.6 0.6 0.4 0.4 0.4

51

A A1 E1 L1 MM R1 U1 NX NDH10 U1 L1 A A1 L1 U1 A1 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10 16 20 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 0.2 0.4 0.2 0.4 0.3 0.5 0.3 0.5 0.3 0.5 0.3 0.5 34 41 42 56 71 79 8.5 25 30 30 40 50 55 M8 x 1.25 10.3 11.5 8 10 10 14 18 22 8 10 18 22 28 32 M10 x 1.25 10.5 12.8 14 A M14 x 1.5 22 14 12 14 (mm) M18 x 1.5 28 18 16 20 Applicable bore size (mm) Included

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Refer to each graph on page 8-14-8 regarding the maximum allowable moment and maximum load weight for a particular piston speed.

Vacuum Unit Ejector / Vacuum Pump System

ZK2-VA1S 8 -A One-touch fitting size 6 6 One-touch fitting Metric size 8 8 One-touch fitting 7 1/4 One-touch fitting Inch size 9 5/16 One-touch fitting (10) Filter element (10 pcs. per set) ZK2-FE1-3-A Nominal filtration rating 3 30m (11) Body gasket Note) (10 pcs. per set) ZK2-BG5 -A Specification One check valve type (All specifications other than vacuum switch with energy saving function

7.4

fitting N1 1/8" One-touch fitting N3 5/32" One-touch fitting A 4-position dual 3-port (N.C. + N.C.)

Title not found

1/4 Bracket AF3000 1/4, 3/8 5 AF4000 1/4, 3/8, 1/2 Float style auto drain AF4000-06 3/4 Pressure differential auto-drain 3/4, 1 AF5000 AF6000 1 Mist Separator Series AFM AFM2000 1/8, 1/4 Bracket AFM3000 1/4, 3/8 0.3 Float style auto drain AFM4000 1/4, 3/8, 1/2 Pressure differential auto-drain AFM4000-06 3/4 Micro Mist Separator Series AFD AFD2000 1/8, 1/4 Bracket AFD3000 1/4, 3/8 0.01 Float

JXCx-OMT0002

9 S Standard cable B B-6 Black 8 B A-6 3 Actuator side Controller side (14.2) (b) 2 1 (8) (a) B 1 A1 (14) B1 (17.7) 6 5 (c) 2 1 (18) A6 B6 15 16 L (11) (30.7) 12.4 Actuator cable (8-20m) (a) (b) L E C P Signal name Terminal Cable colour Terminal number number Brown 2 A B-1 Red 1 A A-1 Cable length [L] Orange 6 B B-2 8 8mNote) Yellow 5 B A-2 Green 3 COM-A/COM B-3 A 10mNote) Blue 4 COM-B/ A

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

MTS Auto Switch Proper Mounting Position (Detection at Stroke End) and Its Mounting Height 8 D-A9 D-M9 D-M9W D-A9V D-M9V D-M9WV A B A B Hv C Operating Range Auto switch model Bore size (mm) D-A9/A9V 40 32 25 20 16 12 8 D-F8 8 7 8 7.5 7.5 6 5 D-M9/M9V D-M9W/M9WV 5.5 4.5 5 4.5 4 4.5 3.0 A B D-F8 5 4.5 4.5 4.5 4.5 4 2.5 Since this is a guideline including hysteresis, not meant to be guaranteed

ZP3

fitting U4 For 4 soft tubing U6 For 6 soft tubing B5 M5 x 0.8 8 M5 x 0.8 Effective thread depth 4 8 0 0.1 M5 x 0.8 Model A B C2 Vacuum inlet direction q Pad dia.

PA300/500/700

2(A) 2(A) 47.5 VHS 13.5 (A port) Rc 3/8 Individual exhaust: VV3PA5-42Station 3-03 28.5 3(R) 3(R) (R port) Rc 3/8 PA NO NC 87 (PA port) Rc 1/8 (Mounting hole) 2-7.2 30 PA 41.5 91.4 84.4 91.4 60 16.5 1(P) 41.5 PA (P port) Rc 3/8 (Pitch) 88 31 33 7.5 L2 L1 (PA port) Rc 1/8 PA 61.5 66 2(A) 2(A) 47.5 13.5 (A port) Rc 3/8 n: Station n L L1 L2 Formula L1 = 33 x n + 29 L2 = 33 x n + 14 6 227 212

CRBU

Single vane type Double vane type +4 0 9 0 a a r r n n e n n g g g o o e e n i i t t 1 2 a a a 8 7 r t t 0 -5 +4 0 o o 0 0 n R R +4 0 +4 0 o 0 i 0 0 t a 9 1 t o e e R g g n n a a r r n n o o i i t t a a Chamfer Chamfer t t o o Chamfer A port B port Chamfer A port Chamfer R R A port B port B port A port B port A port B port For size 40 actuators, a parallel keyway will be used instead

Environment

8* A 10* B 15* C 20* LEPY LEPS LER *1 The standard cable should be used on fixed parts.

Rotary Actuator

Single vane Double vane 90, 100D 270S 180S 90S 0 5o g e n a 2 0o r 7 +4o 0 n +4o o o g n e o 0 a ti r 1 0 0 8 0 n a 9 0 o 1 +4o o t ti +4o e o a 0 g e t R n 0 o g a R o r n 0 n 9 ra o ti e a n g t io o n R at a r ot n R o (90o) (90o) ti a t o R Chamfer Chamfer (45o) Chamfer (45o) B port Chamfer A port B port A port B port (40o) B port A port A port For size 40 actuators, a parallel key will

Mechanically Jointed Rodless Cylinders

M5 x 0.8 1/8 Port size (Rc, NPT, G) Note) The tolerance of the MY3A is a value with no pressurization.

CG5-S

(mm) Bore size (mm) Stroke range A P AL B1 B2 BM BZ C D E1 F1 GA GB H H1 I J K KA M MM NA S ZZ 20 to 350 1/8 18 15.5 13 7 M4 x 0.7 9 16.5 8 15 3 18 12 35 5 31 M4 x 0.7 depth 7 5 6 3 M8 x 1.25 29 83 118 25 to 400 1/8 22 19.5 17 8 M5 x 0.8 9.5 18.5 10 17 3 18 12 40 6 33 M5 x 0.8 depth 8 5.5 8 3.5 M10 x 1.25 29 83 123 32 to 450 1/8 22 19.5 17 8 M5 x 0.8 9.5 20 12 19 3 18 12 40 6 38 M5 x 0.8

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

plating 14 O-ring FKM Fluoro coating 15 O-ring FKM Fluoro coating 18 PF2M7(-L) Series Dimensions PF2M7m-C4/C6/C8/N7(-L) A 48 A 48 18 18 OUT2 OUT1 OUT2 OUT1 10.2 DC() DC(+) 1.4 10.2 DC() DC(+) 1.4 38.5 (30.9) 38.5 (30.9) 13 3 13 3 2 x One-touch fitting Applicable tubing O.D.: 4, 6, 8, 1/4" 18 2 x 3.4 2 x One-touch fitting Applicable tubing O.D.: 4, 6, 8, 1/4" 18 2 x 3.4 28 [mm] 28 Model A

New

Body material Port size Orifice diameter e VXZ2 3 A w A 0 Body material Aluminum e Port size 1/8 A 10 Orifice diameter Select electrical specification. Step 3 Item Selection item Symbol Voltage 24 VDC VXZ2 3 0 A A r Select electrical specification. r A Electrical entry Grommet For other special options, refer to pages 20 and 21.

IZx-OMT0049

(1:1) (Recommended screw: Cross recessed pan head screw M4 x 5) (Recommended screw: Cross recessed round head screw M4 x 8) (Recommended screw: Cross recessed pan head screw M4 x 8) (Recommended screw: Cross recessed pan head screw M4 x 8) Section A-A (1:1) AC adapterIZT40/41/42 IZT40-CG1( with AC cord) AC cord AC adapter IZT40-CG2 (without AC cord) Inlet IEC60320-C6 AC adapter 7.

CLQ

4-11 Counterbore depth 8 Counterbore depth 9.5 4-6.6 through 8 35 B + Stroke A + Stroke With flat washer 4 pcs. 7 80 Retraction locking LOCK 28 A, B Dimensions Without auto switch With auto switch A 73.5 83.5 Bore size (mm) Stroke range (mm) A B B 30.5 40.5 10 to 50 75, 100 83.5 40.5 50 Dust cover (Manual unlocking unit) Rc 1/8 unlocking port (Unlocked when pressurized) Rod end male thread