/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) ( C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) ( C)Pump capacity Note 5) (50/60 Hz)(MPa)Rated flow Note 6) ( l/min)Main tank capacity Note 7) ( l )Sub-tank capacity Note 8) ( l )Port sizeWetted
capacity Note 8) ( l )Port sizeWetted parts materialTemperature range (C)Pressure range (MPa)Required flow Note 9) (50/60 Hz) (l /min)Power supplyBreaker capacity (A)Rated current (A)AlarmCommunicationsHRZ001-LWater-cooled refrigerationR404A (HFC)PID controlTemperature: 10 to 35C, Humidity: 30 to 70%RHFluorinertTM FC-3283/GALDEN?
/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) (C)Note 5)(MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l )Sub-tank capacity Note 8) ( l
/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) ( C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) ( C)Note 5)(MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l )Sub-tank capacity Note 8) ( l )Port sizeWetted parts materialTemperature
min)Main tank capacity Note 7) ( l)Sub-tank capacity Note 8) ( l )Port sizeWetted parts materialTemperature rangePressure rangeRequired flow Note 9) (50/60 Hz) (l/min)Power supplyBreaker capacityRated currentAlarmCommunicationsHRZ001-L2Water-cooled refrigerationR134a (HFC)PID controlTemperature: 10 to 35C, Humidity: 30 to 70%RHClear water, Deionized
capacity Note 8) ( l )Port sizeWetted parts materialTemperature range (C)Pressure range (MPa)Required flow Note 9) (50/60 Hz) (l /min)Power supplyBreaker capacity (A)Rated current (A)AlarmCommunicationsHRZ002-LWater-cooled refrigerationR404A (HFC)PID controlTemperature: 10 to 35C, Humidity: 30 to 70%RHFluorinertTM FC-3283/GALDEN?
capacity Note 8) ( l )Port sizeWetted parts materialTemperature range (C)Pressure range (MPa)Required flow Note 9) (50/60 Hz) (l /min)Power supplyBreaker capacity (A)Rated current (A)AlarmCommunicationsHRZ002-LWater-cooled refrigerationR404A (HFC)PID controlTemperature: 10 to 35C, Humidity: 30 to 70%RHFluorinertTM FC-3283/GALDEN?
/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) (C)Note 5)(MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l )Sub-tank capacity Note 8) ( l
/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) (C)Note 5)(MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l )Sub-tank capacity Note 8) ( l
min)Main tank capacity Note 7) ( l)Sub-tank capacity Note 8) ( l )Port sizeWetted parts materialTemperature rangePressure rangeRequired flow Note 9) (50/60 Hz) (l/min)Power supplyBreaker capacityRated currentAlarmCommunicationsHRZ002-L2Water-cooled refrigerationR134a (HFC)PID controlTemperature: 10 to 35C, Humidity: 30 to 70%RHClear water, Deionized
min)Main tank capacity Note 7) ( l)Sub-tank capacity Note 8) ( l )Port sizeWetted parts materialTemperature rangePressure rangeRequired flow Note 9) (50/60 Hz) (l/min)Power supplyBreaker capacityRated currentAlarmCommunicationsHRZ002-L2Water-cooled refrigerationR134a (HFC)PID controlTemperature: 10 to 35C, Humidity: 30 to 70%RHClear water, Deionized
/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) (C)Note 5)(MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l )Sub-tank capacity Note 8) ( l
/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) ( C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) ( C)Note 5)(MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l )Sub-tank capacity Note 8) ( l )Port sizeWetted parts materialTemperature
/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) (C)Note 5)(MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l )Sub-tank capacity Note 8) ( l
min)Main tank capacity Note 7) ( l)Sub-tank capacity Note 8) ( l )Port sizeWetted parts materialTemperature rangePressure rangeRequired flow Note 9) (50/60 Hz) (l/min)Power supplyBreaker capacityRated currentAlarmCommunicationsHRZ008-L2Water-cooled refrigerationR134a (HFC)PID controlTemperature: 10 to 35C, Humidity: 30 to 70%RHClear water, Deionized
min)Main tank capacity Note 7) ( l)Sub-tank capacity Note 8) ( l )Port sizeWetted parts materialTemperature rangePressure rangeRequired flow Note 9) (50/60 Hz) (l/min)Power supplyBreaker capacityRated currentAlarmCommunicationsHRZ008-L2Water-cooled refrigerationR134a (HFC)PID controlTemperature: 10 to 35C, Humidity: 30 to 70%RHClear water, Deionized
capacity Note 8) ( l )Port sizeWetted parts materialTemperature range (C)Pressure range (MPa)Required flow Note 9) (50/60 Hz) (l /min)Power supplyBreaker capacity (A)Rated current (A)AlarmCommunicationsHRZ008-WWater-cooled refrigerationR404A (HFC)PID controlTemperature: 10 to 35C, Humidity: 30 to 70%RH?
sResponse timeHysteresisPower supply voltageResistancePF2A750Air, Nitrogen2.5 to 52.5 l/min2.5 to 52.5 l/min5 to 50 l/min0.5 l/min0.5 l/pulsel/min, CFM x 10-2l, ft3 x 10-10 to 50C?5% F.S. or less?1% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)150 mA or less250 g1/8, 1/4Heater type3-digit, 7-segment LED?
sResponse timeHysteresisPower supply voltageResistancePF2W720Water1.7 to 17.0 l/min1.7 to 17.0 l/min2 to 16 l/min0.1 l/min0.1 l/pulse0 to 50C?5% F.S. or less?3% F.S. or less?5% F.S. or less (0 to 50C, based on 25C)70 mA or less520 g3/8, 1/2Karman vortex3-digit, 7-segment LEDl/min, gal(US)/minl, gal(US)0 to 1 MPa1.5 MPa0 to 999999 lOperating: 0 to 50C, Stored: ?
sResistanceConnectionMaterialWeightPF2A200/201PF2A510- -10.5 to 10.5 l/min0.5 to 10.5 l/min0.1 l/min0.1 l/pulseReal-time flow rateAccumulated flow0 to 999999 l, 0 to 999999 ft3 x 10-224 VDC (ripple ?