Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com S U 16 V W X Approx. 300 Approx. 280 G1/2 33 25 D side Stations 1 2 3 4 5 n U side Y R 44 16 T 5.5 21 H J H OUT port n-1/4, 1/8 (Pitch) 2 (mm) n (stations) Model Dimension 10 9 345 357 369 385 397 409 415 427 439 7 8 310.5 322.5 334.5 346.5 358.5 370.5

Compact Vacuum Unit Ejector/ Vacuum Pump System

The recommended bend radius of the lead wire is 6 times the outside diameter of the sheath, or 33 times the outside diameter of the insulation material, whichever is larger. Replace the damaged lead wire with a new one. Wire correctly. Incorrect wiring can cause malfunction or breakage of the solenoid valve or the pressure switch/sensor. Do not perform wiring while the power is on.

LG1H

limiting RDYCOM 12 25 TLC RA3 Positioning completion READY 11 RD 49 24 INP RA4 PULSE F + 15 PP 10 PULSE F 16 PG 11 10 m or less NP 35 PULSE R + 17 S/S NG 36 PULSE R 18 4 LA A phase pulse detector (Differential line driver) 9 PG0 LZ 8 5 LAR PG0 COM 10 LZR 9 6 LB B phase pulse detector (Differential line driver) LG 3 7 LBR Control common Plate SD 34 LG Control common 10 m or less Note 5) 33

S Couplers

The figures in ( ) indicate the internal diameter of the applicable hose. 14.0 15.0 16.0 18.0 46.0 46.0 46.0 46.0 16 19 19 33 60.9 60.4 59.9 58.9 70 72 73 81 6 (1/4") 8 (1/4") 9 (3/8") 12 (1/2") 6 (1/4") 8 (1/4") 9 (3/8") 12 (1/2") 27.1 27.1 27.1 27.1 4.5 5.0 8.0 8.0 4.5 5.0 7.7 9.0 7.2 9.0 11.3 15.0 7.2 9.0 11.3 15.0 3 S Couplers Series KK130 Plug (KK130P) Socket (KK130S, L) Nut fitting

C95Series

I-B DA DB DL lou number II:, Imm) IDe OX D E DO (>"UN 'u, O S DH Z DDH9-: 32 164 10"" 36 18' 12 ' 45 202 ". . . , 46 31 21 18 5 38 26 51 6.5 6.6 11 7 41 28 54 6.5 6.6 11 9 ' 50 32 65 7.5 9 15 11 52 35 24 22 5.5 65 45 33 30 6 50 222 16' '" 52 40 67 7.5 9 15 11 66 50 86 10 11 16 12.5 ' 75 50 37 35 6.5 95 60 47 40 6,5 63 250 16 ' ." 76 60 96 10 11 18 1 3 5 71 70 20 114 70 55 50 7.5 ~, Rotating

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

Urethane rubber Fluororubber Silicon rubber ZP 40HBN ZP 50HBN ZP 63HBN ZP 80HBN ZP100HBN ZP125HBN 17 EPR N ZCUK NBR 33 40 0 +10 +1 1 40 S 40 Silicon rubber 63 50 0 +19 +1 2 50 U 50 AMJ Urethane rubber 103 63 0 +37 +2 3 63 F 63 Fluororubber 206 80 +61 0 +2 6 80 E 80 AMV EPR 390 100 1 +121 12 +4 100 100 Pad type 125 3 +7 +228 22 125 125 AEP HB Large bellows pad HEP Dimensions Related Equipment

ML2B

ML2B25 ML2B32 ML2B40 Applicable cylinder ML2B25 ML2B32 ML2B40 RS H A RZQ MI W S Stroke Adjusting Unit CEP1 With shock absorber: CE1 ML2B Bore size S Stroke L CE2 TT h ML2B EB FF EA Stroke adjusting unit C J G5-S CV ED MVGQ CC TA FA (Absorber stroke) RB FB FC J Shock absorber Cushion needle EC DFH -X EY 20Data (mm) TT Max. 16.5 Max. 20 Max. 25 TA 7 12 12 FH 12 16 16 FF 6 6 6 FC 13 17 17 FB 33

RQ

Rod Mounting Bracket Dimensions Foot Style Foot style: RQL/RDQL B + Stroke L Bore size (mm) Stroke range (mm) A B LS L L1 LD 32 20 to 100 61.2 37 21 17 38.5 6.6 40 20 to 100 68.2 44 28 17 38.5 6.6 Special cap bolt LH LY 50 30 to 100 75.7 49.5 26.5 18 43.5 9 CUJ LX X X LG Y Y Bore size (mm) 3.2 4-LD LS + Stroke A + Stroke LG LH LX LY LZ X Y LZ CU 32 4 57 57 11.2 30 71 5.8 40 4 64 64 11.2 33

RLQ

Stroke 34 40 60.5 5 52 Retraction locking LOCK 27.5 PL Pc Port thread type Rc NPT G 1/8 1/8 M5 x 0.8 (Manual unlocking unit) PL unlocking port Unlocks when pressurized Dust cover Rod end male threads M14 x 1.5 8 20.5 23.5 28.5 Rod end nut 9-12-12 13 Series RLQ Compact Cylinder with Air Cushion and Lock Dimensions: 40 (Emergency stop) Foot style: RLQL40 34 17 44 + Stroke Special cap bolt 33

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

9 7 19.5 14 6 28 26 14 35.5 50,100,150,200,250,300 CY1F15 52.5 10 16 7 6.5 16 29 9 8 23 17 9 34 32 17 41.5 50,100,150,200,250,300,350,400,450,500 CY1F25 70 13 17 10.5 8 22 40 10 12 33.5 22.5 12 46 44 23.5 55 50,100,150,200,250,300,350,400,450,500,550,600 Model KC KA KB KH KW LA LL LW LZ ML MM N PA PB PC Q QA QB L QW CY1F10 6.5 44 8 19 59 58 20 86 19 5 M3 x 0.5 18.5 40 40 8.5 90 4 12 38 33

Air cylinder

Air Cylinder Speed controller Solenoid valve Regulator Air source Air filter Fig. 17 Basic Circuit 33 6. Construction Fig 18. Standard product: Double acting/single rod Table 12 Parts list No.

ML2B

ML2B25 ML2B32 ML2B40 Applicable cylinder ML2B25 ML2B32 ML2B40 RS H A RZQ MI W S Stroke Adjusting Unit CEP1 With shock absorber: CE1 ML2B Bore size S Stroke L CE2 TT h ML2B EB FF EA Stroke adjusting unit C J G5-S CV ED MVGQ CC TA FA (Absorber stroke) RB FB FC J Shock absorber Cushion needle EC DFH -X EY 20Data (mm) TT Max. 16.5 Max. 20 Max. 25 TA 7 12 12 FH 12 16 16 FF 6 6 6 FC 13 17 17 FB 33

Compact Cylinder with Air Cushion and Lock Series RLQ

Rod end nut 850 Compact Cylinder with Air Cushion and Lock Series RLQ Dimensions: 40 (Emergency stop) Foot style: RLQL40 34 17 44 + Stroke Special cap bolt 64 33 CLJ2 4 64 78 11.2 11.2 4 x 6.6 3.2 CLM2 7 7 62 + Stroke 102.2 + Stroke CLG1 CL1 MLGC Rod end nut 38.5 CNG Rod flange style: RLQF40 MNB CNA 40 54 CNS 8 4 x 5.5 62 72 17 34 44 + Stroke CLS 95 + Stroke CLQ RLQ Rod end nut 38.5 MLU MLGP

Compact Cylinder with Air Cushion Series RQ

RQ Mounting Bracket Dimensions Foot Style Foot style: RQL/RDQL mm L B + Stroke Bore size (mm) Stroke range (mm) A B LS L L1 LD Special cap bolt 32 20 to 100 37 6.6 61.2 21 17 38.5 LH LY 40 20 to 100 44 6.6 68.2 28 17 38.5 50 30 to 100 49.5 9 75.7 26.5 18 43.5 mm Y X Y X LS + Stroke A + Stroke 3.2 LX LZ 4 x LD LG Bore size (mm) LG LH LX LY LZ X Y 32 4 57 57 11.2 30 71 5.8 40 4 64 64 11.2 33

LX Series Compact Electric Actuators

Table Deflection ..,. .page 20 Working Range & Operating Conditions .pa9e 21 How To Order. .pages 22 & 23 How to Mount .Page 24 Dimensions. .pa9es 25 & 26 Specif ications/Construction/Parts List .page 27 Selection Chart & Duty Ratio .page 28 Kinetic Moment Allowance/Iable Deflection. ...,.page 29 Criteria of Accelerating Speed . .page 30 How To Order,. .pages 31 & 32 How to Mount .Page 33

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

SY7000 Response time ms (at 0.5MPa) Type of actuation Without light/surge voltage suppressor With light/surge voltage suppressor Types S, Z Types R, U 38 or less 2 position single 33 or less 31 or less 30 or less 2 position double 28 or less 27 or less 56 or less 3 position 50 or less 50 or less Solenoid Specifications Grommet (G), (H), L type plug connector (L), M type plug connector (M)

1.1

[Foundations bolt set] AB IDF Size Applicable Thermo-cooler Material Quantity per set Symbol HRG001HRG002HRG005500 Stainless steel 4 HRG010HRG015501 Note) Refer to page 33 for dimensions.

High performance type Step Motor Controller (Servo/24 VDC)

1 0 0 0 0 1 33 1 0 0 0 0 1 34 1 0 0 0 1 0 34 1 0 0 0 1 0 35 1 0 0 0 1 1 35 1 0 0 0 1 1 36 1 0 0 1 0 0 36 1 0 0 1 0 0 37 1 0 0 1 0 1 37 1 0 0 1 0 1 38 1 0 0 1 1 0 38 1 0 0 1 1 0 39 1 0 0 1 1 1 39 1 0 0 1 1 1 40 1 0 1 0 0 0 40 1 0 1 0 0 0 41 1 0 1 0 0 1 41 1 0 1 0 0 1 42 1 0 1 0 1 0 42 1 0 1 0 1 0 43 1 0 1 0 1 1 43 1 0 1 0 1 1 44 1 0 1 1 0 0 44 1 0 1 1 0 0 45 1 0 1 1 0 1 45 1 0 1 1 0 1 46

HRX-OM-W060

Communication setting screen 35.Contact output 1 to 3 34.Contact input signal 31.Contact input signal operation 33.Analog output 32.Serial communication setting screen detail setting screen setting screen setting screen setting screen 11. Temperature waveform 11.

HRX-OM-Y098

Refer to Communication Function of Operation Manual for details. (1) (2) (3) (4) Ethernet communication setting screen Table 5.4-33 Setting of ethernet communication No.