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. : . l ' s s i 1070 lN=OlO2kql r(N.m) Bore size Modd to 20 r 3 B ' .50 75 .t( P , 0.29 o.24 o.21 0.18 0.16 0.48 o.39 0.31 o.37 0.33 -^ I McoM 0.51 o.43 0.35 o.31 o.27 MGaL 0.73 o.58 o.48 o.71 0.64 2 0 . .

-- NCM seies

o 0.62 322 1.28 14 oaa {4) 250 u-24 0.50 .621 .621 0.25 0.93 0.38 1t-1E .251 .250 0.75 0.25 0.34 0.75 o.75 o.1a cts16 0.75 120 o.62 3.19 3.8:t 343 t06 {17-l _312 6t-21 0.50 .621 .621 0.38 1 . 1 2 0.38 5t-i E .25r .250 0.75 0.25 o.3a 3.97 o.8a o_aao.24 qi-14 o.75 1.30 0.62 334 1.25 125 t 2 5 t 1 k ) 375 \-24 o.aE .749 .749 o.11 r.32 0.50 .251 o.25 0.41 rt.4 1.06 r.06 0.25 sa-l6 0.46 r.62 0.78

25

E 21 SN LQ1 LQ1 fittings Nut (including insert bushing), 1 location removed Fitting type E Union elbow T Union tee Applicable tube size Metric Inch Applicable tube size (mm) Applicable tube (inch) Reducing Reducing Size No.

10

A Applicable absorber B SR Dimensions RBC08C RBC10C RBC14C RBC20C RBC27C RJ08U 6.5 6.8 6 RJ10U 9 8.7 7.5 X RJ14U 12.5 12 10 16 18 20 RJ2015U 21 25 25 RJ2725U H B T 2 x D MM L Part no.

MXU

The auto switch could activate unintentionally if a shield plate is not used. 20Data Table (1) L d Bore size (mm) MXU6 MXU10 MXU16 21 5 25 5 35 10 Other than the applicable auto switches listed in How to Order, the following auto switches can be mounted. For detailed specifications, refer to page 8-30-1.

17

4 #0 Component Parts Description Material Note No. 1 2 3 4 5 6 7 8 9 10 11 12 13 16 21 22 Description Material Note No. 23 24 25 26 27 29 Cylinder tube Head cover Cushion boss Piston yoke Piston End cover Wear ring Head plate Cushion needle Stopper Belt separator Guide roller Parallel pin Belt clamp Bearing Spacer Spring pin Seal magnet Aluminum alloy Aluminum alloy Polyacetal Aluminum alloy

New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542  Compact and light

C2SiH8 Nitric Oxide Perfluoro-butadiene NO C4F6 Phosphorous Pentafluoride Octafluorocyclopentene PF5 C5F8 Phosphine Halocarbon 12B2 PH3 CBr2F2 Sulfur Tetrafluoride Trimethylsilane SF4 (CH3)3SiH Sulfur Hexafluoride Methyl Chloride SF6 CH3Cl Disilane Methyl Fluoride Si2H6 CH3F Silicon Tetrachloride Methanol SiCl4 CH3OH Silicon Tetrafluoride Methylsilane SiF4 CH3SiH3 Dichlorosilane Halocarbon 21

DOT/J844 Nylon Tubing

Green Gray Tan Symbol B R G BU W Y YR N S PU BR GD GR T S S S S S S S S S S = Standard, all other length color combinations are available by special order Tube Sizes 1/8 5/32 3/16 1/4 5/16 3/8 1/2 5/8 3/4 21

Polyurethane Tubing TU/TIUB Series

KS KX Tubing size Metric size (TU series) Inch size (TIUB series) KM TU0212 TU0425 TU0604 TU0805 TU1065 TU1208 TU1610 TIUB01 TIUB05 TIUB07 TIUB11 TIUB13 Model Additional 21 new colors. Tubing O.D. (mm) 2 4 6 8 10 12 16 3.18 4.76 6.35 9.53 12.7 KF Tubing I.D. (mm) 1.2 2.5 4 5 6.5 8 10 2 3.18 4.23 6.35 8.46 Max.

VCHR

7 20 Hexagon socket head cap screw Carbon steel t 21 Hexagon nut Carbon steel @1 22 Hexagon bolt Carbon steel y 23 Spring washer Carbon steel 24 O-ring !

Thermo-con

CORPORATION 4-14-1,Sotokannda,Chiyoda-ku, Tokyo 101-0021,Japan HEC 13.7 (347) 11.8 (300) 10.6 (270) MADE IN JAPAN 11.1 (281) 6.2 (157) H OUT Air Air 3.8 (97) 1.2 (30) L 10.6 (270) IN DRAIN 12.6 (321) 0.5 (12) Circulating fluid drain port (with plug) Rc1/4 14.3 (364) Circulating fluid level gauge Foot (Accessory) Filter cover Circulating fluid inlet Rc1/4 Filter 6.0 (152) 1.1 (29) 14.1 (358) 0.8 (21

2-Color Display

.: ZS-27-C) 7.2 17.8 8 9.5 47.8 34.5 R4.5 R4.5 34.5 21 8.5 Panel thickness 0.5 to 6 D Panel mount adapter + Front protection cover (Option unit part no.: ZS-27-D) 42.4 11 17.8 8 9.5 33.5 33.5 Panel thickness 0.5 to 6 8 2-Color Display High-Precision Digital Pressure Switch Series ZSE30A(F)/ISE30A Panel-cut dimensions 1 pc. mounting Multiple (2 pcs. or more) horizontal mounting 31 0 0.4 31

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

(For details, refer to pages 20 and 21.) Accessories Mounting Basic Axial foot Rod flange Head flange Single clevis Double clevis Center trunnion Standard Rod end nut V V V V V V V Clevis pin V Single knuckle joint V V V V V V V Double knuckle joint (with pin) V V V V V V V Option With rod boot V V V V V V V 2 B

VX21/22/23

S Conduit 24 VDC 5 Aluminum With surge voltage suppressor 8 3/8 T 100 VAC 10 (N.C. only) U 110 VAC 10 (N.C. only) 1/2 V 200 VAC 5 W 230 VAC 8 10 10 (N.C. only) Flat terminal Resin (With bracket) 5 Y 24 VDC 8 12 10 (N.C. only) Z Other voltages For special options, refer to pages 21 to 23. 24 VAC Low concentration ozone resistant (Seal material: FKM) 48 VAC Special voltage Seal material: EPDM

Clamp Cylinder with Lock with Magnetic Field Resistant Auto Switch Rod Mounting ø 40, ø 50, ø 63 Series CLK2G/CLK2P CLK2G

B F Retraction locking Extension locking Applicable Magnetic Field Resistant Auto Switches (Refer to page 21 through to 25 for detailed auto switch specifications.)

How to Order MGQ M Cylinder stroke (mm) Refer to “ Standard Stroke ” on page 339. Slide bearing Ball bushing bearing Bearing type M L 12 mm 16 mm 20 mm 25 mm 32 mm Bore size 12 16 20 25 32 40 mm 50 mm 63 mm 80 mm 100 mm 40 50 63 80 100 M9BW 2 pcs. 1 pc. n

For MGQM20-21 st, MGQM20-30 st is provided with a 5 mm + 4 mm 9 mm width spacer. 2. For MGQM50-40 st, MGQM50-50 st is provided with a 10 mm width spacer.

Vacuum Module: Ejector System Series ZX

Vacuum digital pressure switch unit (ZSE3) Solenoid valve rated voltage 21 22 23 24 2 outputs/without analog output 2 outputs/with analog output 1 output (with trouble detection)/without analog output 1 output (with trouble detection)/with analog output Caution 1 Note) 100 VAC 50/60 Hz 110 VAC 50/60 Hz 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC Air operated (K6, K8, J3, J4, D3, D4) D 3 Note) Surge

Compact Manifold Regulator Common Supply Type ARM11A Series Made to Order (Refer to page 746 for details.)

Straight 6 8 10 8 6 10 4 6 4 6 Elbow Straight Elbow Note) OUT side Mounting position IN side Straight Elbow Straight Elbow Note) OUT side Mounting position 1 2 3 4 5 6 7 8 9 M 1 station 2 stations 3 stations 4 stations 5 stations 6 stations 7 stations 8 stations 9 stations 10 stations Fitting type Symbol Fitting type Symbol 1/4 5/16 3/8 5/16 1/4 3/8 5/32 1/4 5/32 1/4 07 08 09 10 11 12 19 20 21

AP500

Delivery pressure (MPa) Delivery pressure (psig) A 25 0.17 m1.12 (m28.4) 20 0.14 45 15 0.10 10 0.07 1.00 (25.4) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) 5 0.03 0 0.00 0 10 20 30 40 50 60 70 80 Flow Rate (slpm, N2) A Connections AP501A Input pressure : 2 psig (14 kPa) inch (mm) FV4 MV4 TW4 760 0 2.78 (70.6) 700 -8 2.12 (53.8) Delivery pressure (mmHg abs) Derivery pressure (kPa) 600 -21

Compact Manifold Regulator Centralized Supply Type ARM5A Series

Metric size Inch size Stations Symbol 1 2 3 4 5 6 7 8 9 M Elbow Straight Elbow OUT side Mounting position Elbow Straight Elbow OUT side Mounting position IN side Straight 6 IN side Straight 1/4 1 station Fitting type Fitting type 2 stations 8 6 8 6 4 6 4 1/4 1/4 1/4 Symbol Symbol 5/16 5/16 5/32 5/32 3 stations 07 08 09 10 19 20 21 22 26 27 28 29 33 34 35 36 57 58 59 60 69 70 71 72 76