: °C), Bracket: R (w/Bracket), Calibration Certificate: A (w/Calibration Certificate), Series: Z (Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min)

Bracket: R (w/Bracket), Calibration Certificate: A (w/Calibration Certificate), Series: Z (Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min)

The series is available in 12, 16, 20, 25, 32, 40, 50, 63, 80, and 100mm bore sizes. Non-rotating accuracy is 0.2 or less. Series CQM allows a workpiece to be mounted directly to the tooling plate.

The series is available in 12, 16, 20, 25, 32, 40, 50, 63, 80, and 100mm bore sizes. Non-rotating accuracy is 0.2 or less. Series CQM allows a workpiece to be mounted directly to the tooling plate.

The series is available in 12, 16, 20, 25, 32, 40, 50, 63, 80, and 100mm bore sizes. Non-rotating accuracy is 0.2 or less. Series CQM allows a workpiece to be mounted directly to the tooling plate.

Bracket: R (w/Bracket), Calibration Certificate: None, Series: Z (Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min)

The series is available in 12, 16, 20, 25, 32, 40, 50, 63, 80, and 100mm bore sizes. Non-rotating accuracy is 0.2 or less. Series CQM allows a workpiece to be mounted directly to the tooling plate.

: °C), Bracket: R (w/Bracket), Calibration Certificate: None, Series: Z (Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min)

The series is available in 12, 16, 20, 25, 32, 40, 50, 63, 80, and 100mm bore sizes. Non-rotating accuracy is 0.2 or less. Series CQM allows a workpiece to be mounted directly to the tooling plate.

The series is available in 12, 16, 20, 25, 32, 40, 50, 63, 80, and 100mm bore sizes. Non-rotating accuracy is 0.2 or less. Series CQM allows a workpiece to be mounted directly to the tooling plate.

The series is available in 12, 16, 20, 25, 32, 40, 50, 63, 80, and 100mm bore sizes. Non-rotating accuracy is 0.2 or less. Series CQM allows a workpiece to be mounted directly to the tooling plate.

The series is available in 12, 16, 20, 25, 32, 40, 50, 63, 80, and 100mm bore sizes. Non-rotating accuracy is 0.2 or less. Series CQM allows a workpiece to be mounted directly to the tooling plate.

The series is available in 12, 16, 20, 25, 32, 40, 50, 63, 80, and 100mm bore sizes. Non-rotating accuracy is 0.2 or less. Series CQM allows a workpiece to be mounted directly to the tooling plate.

80

C R E (AC type) [mm] Model Port size P B B1 C D E F B B1 2 x P Port size VDW1 M5(M6) 20 10 46.1 15 9.5 11 VDW2 M5(M6) 22 11 50.9 20 9.5 13.5 Mounting bracket dimensions Electrical entry Model Port size P U W X Y Grommet Q R VDW1 M5(M6) 28 11 34 17 15.5 30.35 VDW2 M5(M6) 33 14 39 20 17 33.9 464 A Compact Direct Operated 2 Port Solenoid Valve VDW Series Air Medium vacuum Water Dimensions

FQ1

Filtration accuracy (m) 5 10 20 40 74 105 No.

CUJ

5 5 M3 x 18l 18 5 With Auto Switch For Axial Mounting For Lateral Mounting B 27 29 31 33 38 27 29 31 33 38 43 27 29 31 33 38 43 C D Model Mounting bolt CDUJB6-4 -6 -8 -10 -15 CDUJB8-4 -6 -8 -10 -15 -20 CDUJB10-4 -6 -8 -10 -15 -20 Model Mounting bolt CDUJB6-4 -6 -8 -10 -15 CDUJB8-4 -6 -8 -10 -15 -20 CDUJB10-4 -6 -8 -10 -15 -20 A M3 x 27l M3 x 29l M3 x 31l M3 x 33l M3 x 38l M3 x 27l M3 x 29l

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

25 30 40 35 0 2 4 6 8 10 12 16 14 18 20 Flow rate (l/min) Flow rate (l/min) Flow rate (l/min) Construction PF2D504/520 Parts list Material Number Parts o !

IDX-OM-O004C

IDF15E1-20 L PE N TB CM ILS FM OLR PTC OLR ILS PTC PTC CM PRS TB C11 C11 FM PRS P 6.4 2 6 3 7.A A 7.1 7.2 A (10) 7.3 7.4 IDF15E1-10/20-A m 3/min(ANR) 1) 50Hz 1.2 60Hz 1.3 10 1) ANR 65% 2) 7 1 8.C C 8 8.1 8.2 8.3 1) 2) 81 9.K K 9 9.1 ( ) 9.2 1.6MPa AD48-8-X2110 KQ2H10-02S 10 IDF15E1-10-K IDF15E1-20-K 1) IDF-S0086 N.O. () 1) IDF-S0002 1 9 1 10.L L 10 10.1

IDX-OM-W023

IDX-OM-W023-B / Series IDU8E-10(-C,K,L,M,R,S,T) IDU8E-20(-C,K,L,M,R,T) IDU11E-10(-C,K,L,M,R,S,T) IDU11E-20(-C,K,L,M,R,T) IDU15E1-10(-C,K,L,M,R,S,T) IDU15E1-20(-C,K,L,M,R,T) IDU8E-23(-C,K,L,R,T,V) IDU11E-23(-C,K,L,R,T,V) IDU15E1-23(-C,K,L,R,T,V) URLhttps://www.smcworld.com/ English instruction manual can be downloaded from our URLhttps://www.smcworld.com/ SMC ISO4414 * 1) JIS B8370 *2 )

Speed Controller with One-touch Fittings

Inch size 3/8" 5/16" 1/4" 1/4" 3/8" 5/32" 1/2" Symbol Flow rate (L/min (ANR)) Sonic conductance dm3/(sbar) Controlled flow Free flow 0.2 0.25 290 0.81 920 2.6 660 1.8 390 1.1 230 0.64 920 2.6 20 0.06 130 0.36 1390 3.9 Controlled flow Free flow Critical pressure ratio Note) Flow rate values are measured at 0.5 MPa and 20C.