Vacuum Unit

Ejector Exhaust Characteristics/Flow Rate Characteristics (Representative value) ZK212 Exhaust Characteristics Flow Rate Characteristics 100 100 100 Vacuum pressure [kPa] 80 Suction flow (Port exhaust) 90 90 60 80 80 40 Vacuum pressure 70 70 Port exhaust 20 Suction flow [L/min (ANR)] Air consumption [L/min (ANR)] Suction flow [L/min (ANR)] Air consumption [L/min (ANR)] Silencer exhaust/Complex

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

10.5 91.7 44 35.8 70.8 M42 x 1.5 50 33.8 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 3/4 3 33.8 1/8 30.4 75 8 93.2 44 35.8 70.8 M42 x 1.5 50 33.8 54 55.5 8.5 10.5 70 2.3 37 42.5 21 7 3/4, 1 3.2 43.3 1/8 40 90 7 125.2 44 43 80.3 70 43.3 66 65.8 11 13 90 3.2 1 3.2 43.3 1/8 44.5 95 4.5 129.6 44 46 80.3 70 43.3 66 65.8 11 13 90 3.2 Note 1) The dimension of B is the length when the filter regulator

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

60 70 Gripping point L (mm) Gripping point L (mm) MHR2-30/MDHR2-30 MHR2-30/MDHR2-30 80 80 Pressure 0.6 MPa 0.6 MPa Pressure 70 70 F F 0.5 MPa 0.5 MPa Gripping force (N) Gripping force (N) 60 60 50 50 0.4 MPa 0.4 MPa 40 40 0.3 MPa 0.3 MPa 30 30 0.2 MPa 0.2 MPa 20 20 10 10 0 10 30 50 0 10 30 50 70 90 90 70 Gripping point L (mm) Gripping point L (mm) 12-5-7 8 Series MHR2/MDHR2 Construction

MHR2/MDHR2, MHR3/MDHR3 Rotary Actuated Air Gripper (2 Finger) (3 Finger)

(F: Thrust of one finger) 50 50 Pressure 0.6MPa MHS Pressure 0.6MPa 40 40 Holding force (N) 0.5MPa 0.5MPa Holding force (N) 30 30 0.4MPa 0.4MPa MHC2 0.3MPa 0.3MPa 20 20 MHT2 0.2MPa 0.2MPa 10 10 MHY2 0 10 20 30 40 50 0 10 20 30 40 50 60 70 60 70 MHW2 Holding point L (mm) Holding point L (mm) MRHQ MHR2-30/MDHR2-30 MHR2-30/MDHR2-30 F F Auto switch 80 80 Pressure 0.6MPa 0.6MPa Pressure 70 70

SV

SY 600 300 50% Stroke (mm) Stroke (mm) Stroke (mm) Stroke (mm) Stroke (mm) 70% 30% AS2201F -02-10 AS3201F -02-12 SYJ 400 200 SX 200 100 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 50% 30% 10% 70% 50% 70% 10% 0 0 800 400 MB 80 MB 63 300 600 Stroke (mm) AS5000-

Table of Contents

SY 600 300 50% Stroke (mm) Stroke (mm) Stroke (mm) Stroke (mm) Stroke (mm) 70% 30% AS2201F -02-10 AS3201F -02-12 SYJ 400 200 SX 200 100 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 50% 30% 10% 70% 50% 70% 10% 0 0 800 400 MB 80 MB 63 300 600 Stroke (mm) AS5000-

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

With brake: 150 Without brake: 115 Housing 36.5 32 Thread size M4 x 0.7 6 4 70 M5 x 0.8 6 4 70 Effective thread length (mm) Quantity P.C.D. B 89 A A B Section BB Coupling P.C.D.

LEC-OM02704CN

A B C L AERSBAN-DSET 100 86 30 2 A 70 AERSBAN-ESET 70 56 1 B 45 13 23 13 (d) (FR-BSF01FR-BLF()) ( )0.5MHz5MHz (L1L2 L3)(UVW) 4 4 2 FR-BSF01() (3.52(AWG12)) (110) 950.5 2-5 (22.5) 11.250.5 (65) 33 (65) NFB 1 MC 4.5 L 1 L 2 L 3 FR-BLF() (5.52(AWG10)) ( 4 NFB 2 MC 7 L 1 31.5 L 2 7 130 85 L 3 2 35 80 2.3 (4 ) 160 180 13 24 13 (e) (FR-BIF-(H)()) 10MHz [mm] FR-BIF 4mA

MXQ

12 16 20 25 6 mm 8 mm 12 mm 16 mm 20 mm 25 mm 8-5-10 11 Air Slide Table Series MXQ Shock Absorber Specifications Table Accuracy RB0805 RB0806 RB1007 RB1411 RB1412 Shock absorber model MXQ8 MXQ12 MXQ16 MXQ20 MXQ25 Applicable slide table B C Radial clearance 19.6 14.7 5.88 0.98 2.94 Max. energy absorption (J) 12 11 7 5 6 Stroke absorption (mm) 50 to 500 Max. collision speed (mm/s) M 45 45 70

Air Catch Sensor

When the Hysteresis exceeds 10m use the Air-Catch Sensor as a confirmation of position of work piece. : Stable adjustment range Detection side nozzle: 1.0 Detection side piping: 6 X 4 tubing Detection side nozzle: 2.0 Detection side piping: 6 X 4 tubing Detection side nozzle: 1.5 Detection side piping: 6 X 4 tubing 70 70 70 60 60 60 Supply pressure Supply pressure Detection not possible 50

IR1000/2000/3000

55.0 50 Set point 60 55.5 70 56.0 80 56.5 90 100 0 20 40 60 80 100 120 57.0 100 95 90 85 80 75 70 65 60 Flow rate (l/min (ANR)) VAC side pressure (kPa) IRV3000 IRV3000 0 53.0 10 53.5 20 54.0 SET side pressure (kPa) 30 Set pressure (kPa) 54.5 40 55.0 50 Set point 60 55.5 70 56.0 80 56.5 90 57.0 100 95 90 85 80 75 70 65 60 100 0 20 40 60 80 100 120 140 160 VAC side pressure (kPa) Flow rate

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(mm ) . 100 125 150 I 50 75 100 125 150 75 ~ 50 I 75 50 100 125 150 107 40 70 B3 83 97 11 5 128 128 194 52 62 204 212 225 225 1 83 107 50 70 83 ! 97 115 128 I 128 52 62 204 19' 212 2.?

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(71) 100 110 95 22 48 4 17 29 14 38 62 (63) 124 (139) 36 1/8 140 (155) 70 (71) 100 140 125 22 48 4 23.5 29 14 38 62 (63) 124 (139) 42.5 1/8 11-4-6 72 Series CRB1 Rotary Actuator Vane Style Rotary Actuator: Replaceable Shaft A shaft can be replaced with a different shaft type except for standard shaft type (W).

RB/RBL/RBQ

6.86 15.30 15.98 20.50 20.01 Basic type 15 15 23 23 65 65 150 350 With cap Weight (g) 16 16 25 25 70 70 165 400 It denotes the values at the maximum energy absorption per one cycle.

C85

Check the detecting position again and tighten the mounting screw to fix the auto switch definitely (the tightening torque of M3 screw should be about 50 to 70 N/cm). 5. Modification of the detecting position should be made following step #3. C76 C85 C95 Auto Switch Mounting Band Part No.

CNG

M10 x 1.25 35.5 Rc 1/8 26.5 2.5 73 154 (162) 11 10 (11) 99 15 (16) 28.5 6 3 12 20 M10 x 1.25 M6 x 1 depth 12 6 14 M14 x 1.5 44 Rc 1/8 28 2.5 81 169 (178) 12 10 (12) 107 15 (16) 33 8 4 12 Without rod boot With rod boot Bore size (mm) 20 25 32 40 l ZZ e f h ZZ H 35 178 (186) 30 16 55 198 (206) 0.25 x Stroke 40 193 (201) 30 17 62 215 (223) 40 196 (204) 35 17 62 218 (226) 50 221 (230) 35 17 70

HRS100/150

70 Waterproof specification IPX4 Accessories Alarm code list stickers 2 pcs.

Slider Type Ball Screw Drive/11-LEFS Series

Selection Example Workpiece mounting condition: Operating conditions 70 Workpiece mass: 45 [kg] Lead 10: LEFS40B 60 Speed: 300 [mm/s] W 50 Acceleration/Deceleration: 3000 [mm/s2] Work load: W [kg] 100 40 Stroke: 200 [mm] Lead 20: LEFS40A 30 Mounting position: Horizontal upward 20 10 Step 1 Check the work loadspeed.

Compact Manifold Regulator

Knob Position Symbol Position Knob position Knob position Knob position Front Top Bottom 56 A B C Top Front Bottom 84 42 84 70 70 6 26 (Max.28) P U S SMC SMC H L 6 O C K SMC SMC 28.5 51.5 6 51.5 80 13 OUT IN 3 28 13 13 OUT IN OUT IN 3 3 2. OUT Piping Position 3.

HRX-OM-X071

/ 70 Dimensions 18 mm W483xD550xH710 Accessory19 Power supply connector,Maintenance handle for particle filter10, Operation manual,Particle filter element10 Weight 20 kg 74 67 1: No condensation should be present.