High Vacuum L Type Valve

Models with auto switch 1.Keep the temperature of the switch below 60 oC. With heater (thermistor) 1. When using a model with a heater, a mechanism to prevent overheating should be installed 2.If using gases that generate a large amount of deposits, it is recommended that the valve body be heated to prevent deposits from sticking to the valve surfaces. Selection Caution All models 1.

HRX-OM-K003

TEMP READY is displayed on the operation display panel 60-sec. after TEMP PV value becomes 18C to start output by communication. Necessary condition is that TEMP PV value after 60sec. is 20+/-2.0C or less. See 5.3.4 Status screen 3on page 5-4 for the details of display position.

MONOSASHI-KUN

Monosashi-kun series CEU5 sensor input part +12V +12V White Blue COM +12V +12V Yellow Brown COM n Red +12V Built-in sensor power supply 12VDC, 60 mA Black Cable with shield .. Earth 4-3 Noise countermeasures Follow the instructions below to prevent malfunction due to noise. 1. Use SMC extension cable CE1-R** for wiring of MONOSASHI-KUN and CEU5. 2.

E-MY2_E_D

external output,Abnormal power supply, Abnormal drive,Abnormal temperature, Abnormal stroke, Abnormality of motor, Abnormality of controller Abnormal detection items Environment specifications Item Specification 5 to 50 C Acutuator Operating temperature range Controller (separated type) 5 to 40 C Operating humidity range 35 to 85%RH (with no condensation) Storage temperature range -10 to 60

REGULATOR

SPECIFICATIONS Model AR20K-B AR25K-B AR30K-B AR40K-B AR40K-06-B AR50K-B AR60K-B Port size 1/81/4 1/43/8 1/43/8 1/43/81/2 3/4 3/41 1 1/8 Gauge port size Note1) Air Fluid Ambient and fluid -5 60 (Should be no freezing) temperature 1.5 MPa Proof pressure 1.0 MPa Max. operating pressure 0.05 0.85 MPa Set pressure range Note2) Relieving type Construction Mass kg 0.16 0.21 0.29 0.44 0.47 1.17

Mechanically jointed rodless cylinder Basic short type (Rubber bumper), Basic standard type (Air cushion) Slide bearing guide type (Air cushion)

MY3A/B/M Series MY3A16 to 63 MY3B16 to 63 MY3M16 to 63 Fluid Air Proof pressure 0.8 MPa 0.7 MPa Max. operating pressure 1.2 MPa 1.05 MPa Min. operating pressure 0.15 MPa +5 to +60 o Ambient and fluid C temperature (No freezing) Lubrication Not required (non-lube) Allowable stroke length tolerance 1000 mm or less +1.8 0 , From 1001 mm +2.8 0 Cushion Rubber bumper Air cushion, shock absorber

MHF2-E

Specifications Specifications Model MHF2-8D MHF2-12D MHF2-16D MHF2-20D Bore size (mm) 8 12 16 20 Fluid Air Operating pressure (MPa) 0.15 to 0.7 0.1 to 0.7 Ambient and fluid temperature (oC) -10 to 60 (No freezing) Note 1) Repeatability (mm) 0.05 Short stroke 120 Maximum operating frequency (c.p.m.)

In-line Air Filter

[MPa] Max. operating pressure [MPa] 1.0 0.8 Operating pressure range -100 kPa to 1.0 MPa (at 20 oC) 0.6 0.4 0.2 0.0 0 10 20 30 40 50 60 [] Operating temperature [oC] Operating temperature range 0 to 60 oC No freezing Filtration 5 m Filtration efficiency 95% With positive pressure: 0.1 MPa Even though the pressure drop does not reach the values indicated on the specifications, replace the

XLG Series

Keep the temperature of the switch below 60 oC With heater (thermistor) 1. When using a model with a heater, a mechanism to prevent overheating should be installed. Selection All models 1. When controlling valve responsiveness, take note of the size and length of piping, as well as the flow rate characteristics of the actuating solenoid valve. 2.

XMA/XYA Series

The switch section should be kept at the temperature no greater than 60 oC. Selection Caution All models 1. When controlling valve responsiveness, take note of the size and length of piping, as well as the flow rate characteristics of the actuating solenoid valve. 2. Actuating press should be kept within the specified range. 0.4MPa to 0.5MPa is recommended. 3.

ML1C

Port Port Shock Absorber Specifications 25 32 40 Applicable cylinder size (mm) RB1412 RB2015 RB2015 Shock absorber model Max. energy absorption (J) 19.6 58.8 58.8 Stroke absorption (mm) 12 15 15 Max. collision speed (mm/s) 1000 1000 1000 Max. operating frequency (cycle/min) 45 25 25 Extended 6.85 8.34 8.34 Spring force (N) Retracted 15.98 20.50 20.50 DOperating temperature range (C) 5 to 60

ML2B

Theoretical Output CE1 (N) Operating pressure (MPa) Bore size (mm) Piston area (mm2) 0.2 98 161 251 CE2 0.8 0.7 343 563 879 0.6 294 483 754 0.5 245 402 628 0.4 196 322 502 0.3 147 241 377 Stroke Adjusting Unit Specifications 25 32 40 490 804 1256 392 ML2B 643 25 RB1007 5.9 7 1500 70 4.22 6.86 32 RB1412 19.6 12 1500 45 6.86 15.98 40 RB1412 19.6 12 1500 45 6.86 15.98 5 to 60 Applicable bore

MLGP

11 13 16.5 4 7 6.5 10 14 34.5 40 50 63 100 120 148 162 16 20 20 14 44 12 16 16 44 47 50 54 64 78 14 19 19 6.5 6.8 7.5 27 32 39 25, 50, 75, 100, 125, 150 175, 200, 250, 300, 350 M8 11 12 39.5 107 14 44 M10 13.5 16.5 46 115 16.5 49 WA Bore size (mm) ML S T U VA OA OB OL P PA PB PW Q R VB MM NN st 25 25 < st 100 100 < st 200 200 < st 300 300 < st 350 38 47 55 30 40 50 13 9 14 18 104 44 60

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Arm opening angle 30, 45, 60, 90, 105, 120, 135 Switch TURCK/P&F Both TURCK and P&F switches are available. Port thread NPT/G Reduces the effects of impact from unclamping the cylinder. Arm Variation Prevents the infiltration of spatter, dust and other contaminants.

P-E00-1A Models to accommodate a wide variety of applications Electric Actuators CAT. E101 A

Slider guide + Slide screw IX IY High rigidity IX H Low High rigidity achieved by the use of a hollow box type aluminum construction Low High Work load/Allowable moment IY W Model IX IY W H Sectional secondary moment Low noise (slide screw type) Slide screw + Slider guide: 47dB (LJ1S) Linear guide LJ1H10 LJ1H20 LJ1H30 LJ1S10 LJ1S20 LJ1S30 Slider guide 24.7 44.8 55 36 56.3 73.3 7 40 84 15 60

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type 1

25.3 8 15.2 29 (Hexagon width across flats) AS221FE-01-10SK 15 21 40.2 33.1 10 18.5 31 AS221FE-02-04SK 16 34.4 25.2 4 10.4 36 AS221FE-02-06SK 18.2 17 34.4 25.2 6 12.8 37 R 1/4 17 14 41.2 46.2 47.2 52.2 18.5 Applicable tubing O.D. d AS221FE-02-08SK 18.5 36.4 27.2 8 15.2 39 AS221FE-02-10SK 20 21 43.2 33.9 10 18.5 42 AS321FE-03-06SK 16 39.3 27.8 6 12.8 57 AS321FE-03-08SK 18.5 41 29.5 8 15.2 60

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

1 8 3 4 1B N.C. auto drain N.O. auto drain Drain guide 1/4B IN R OUT reversal -T Element service indicator Accessories B 02 03 1 4 3 8 04 1 2 1 1 2 20 2B B B B Options AMD800 to AMD1000 (Self-standing style) AMD801/901 (Piping support style) 20 00 AMD 8 20 01 AMD 8 Port size Port size Body size Body size 8 20 2BFlange 30 3BFlange 20 2BFlange 30 3BFlange 8 9 9 10 40 4BFlange 40 4BFlange 60

AMF

Thread B Rc(PT) F G(PF) N NPT 3 4 1B B Note) Refer to p.4.7-7 regarding How to Order of case assembly. 1 1 2 20 2B B AMF800 to AMF1000 (Standing style) AMF801/901 (Piping support style) 20 80 AMF 0 20 80 AMF 1 Body size Body size 80 90 80 90 Port size Port size 100 With bracket 20 2BFlange 30 3BFlange 40 4BFlange 20 2BFlange 30 3BFlange 40 4BFlange Shape Piping support style Standing style 60

KS/KX

M D2 L A D1 M5 X 0.8 M6 X 1.0 36.5 KSH04-M5 KSH04-M6 KSH04-01S KSH06-M5 KSH06-M6 KSH06-01S KSH06-02S KSH08-01S KSH08-02S KSH08-03S KSH10-02S KSH10-03S KSH10-04S KSH12-03S KSH12-04S 9 12 37 33 8 16 10.4 2.5 4.0 4.0 4 38 37.5 38 39.5 42.5 44 47 48 54 55 57.5 57 60 14 34 33.5 34 35.5 36.5 40 41 41.5 48 48.5 49.5 50.5 52 12 1 8 M5 X 0.8 M6 X 1.0 2.5 3 4.0 4.0 5.6 5.6 12 8 6 17 14 12.8 1 8 1 4

TUH Series

Burst Pressure Characteristic Curve and Operating Pressure How to Order TUH0644 B 20 5 4 Bundle length Burst pressure MPa Tubing model Length 20m bundle 100m bundle Symbol 20 100 3 2 Color Maximum operating pressure 1 Symbol B W BU N Color Black White Blue Translucent 0 -20 0 20 40 60 Operating temperature C F = (1.8 x C) + 32 1MPa = 145 psi 2 High Pressure Type Series TUH Hard Polyurethane