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Piston B Switching Pressure (Open Closed) 0.5 Outlet pressure (MPa) 0.4 0.3 0.2 Type Y DIN terminal 0.1 0 0.6 0.1 0.2 0.3 0.4 0.5 0.7 0.8 0.9 1.0 Inlet pressure (MPa) Needle Valve Flow Characteristics Inlet pressure 0.5 MPa JIS Symbol 2000 1800 AV5000 1600 Air flow rate (/min (ANR)) 1400 2 1(P) 2(A) AV4000 1200 1 1000 800 AV3000 3(R) 600 AV2000 400 Accessory/Pressure Gauge 200 0 Pressure

Battery-less

return to origin has changed Model L A B n D E LEFB32ET-300m 585.6 306 489 6 2 400 LEFB32ET-500m 785.6 506 689 8 3 600 LEFB32ET-600m 885.6 606 789 8 3 600 LEFB32ET-700m 985.6 706 889 10 4 800 LEFB32ET-800m 1085.6 806 989 10 4 800 LEFB32ET-900m 1185.6 906 1089 12 5 1000 LEFB32ET-1000m 1285.6 1006 1189 12 5 1000 LEFB32ET-1200m 1485.6 1206 1389 14 6 1200 LEFB32ET-1500m 1785.6 1506 1689 18 8 1600

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For the maximum allowable load mass for each piston speed, please refer to Graph (1). 1600 26 25 23.5 The above value represents the applicable load at the position where the moment does not work at the time of stop. Factors such as impact, etc. are not in consideration with the value.

1

New Products Guide 1 Directional Control Valves Actuators Vacuum Equipment CAT.E00-6A INDEX New Products Guide 1 Directional Control Valves 5 Port Solenoid Valve Fieldbus System (For Input/Output) 2/3 Port Mechanical Valve Series SY3000/5000/7000 Series EX600 Series VM100/200 P .6 P .264 P .322 Actuators Foot Pedal Type 5 Port Mechanical Valve XT34-60/67 Air Cylinder Air Cylinder Series CJ2

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mm/s) CEP1 Graph (1)-2 Vertical Drive Supply Pressure 0.5 MPa Selection Example: 2 CE1 10 Operating conditions CE2 Vertical drive Graph (1)-2 Load weight M = 50 N Stroke St = 800 mm Time for stroke required To = 0.5 s 5000 ML2B RHC100 196J RHC80 127J C J G5-S 1000 CV RHC63 84J RHC50 47J Estimate of the maximum speed Load weight M (N) 500 MVGQ RHC40 33J Average stroke speed Vm = St/To = 1600

AC Servo Motor Driver (Network card type ）

Low Middle 2 3.6 22 75.6 response response 3 4.9 23 85.2 4 6.6 24 95.9 5 10.0 25 108.0 6 11.3 26 121.7 7 12.7 27 137.1 8 14.3 28 154.4 9 16.1 29 173.9 10 18.1 30 195.9 11 20.4 31 220.6 12 23.0 32 248.5 13 25.9 33 279.9 14 29.2 34 315.3 15 32.9 35 355.1 16 37.0 36 400.0 17 41.7 37 446.6 18 47.0 38 501.2 Middle High 19 52.9 39 571.5 response response 20 59.6 40 642.7 Setting range: 1 to 40 1600

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External pilot Solenoid Orifice size (mm) Model Threaded Note) Flange Av x 10-6 m2 VNC1-6A VNC1-8A VNC1-10A VNC24-10A VNC2-10A VNC24-15A VNC2-15A VNC34-20A VNC3-20A VNC44-25A VNC4-25A VNC54-32A VNC5-32A VNC54-32F VNC5-32F VNC64-40A VNC6-40A VNC64-40F VNC6-40F VNC74-50A VNC7-50A VNC74-50F VNC7-50F 1 8 1 4 30 32 36 95 120 110 140 170 260 220 370 400 560 400 560 630 820 720 960 990 1500 1000 1600

AC Servo Motor Driver

[DMOVP D9 U0 G72 ] [DMOVP D9 U0 G222 ] [DMOVP U0 G222 D9 ] [DMOVP U0 G72 D9 ] [DMOVP D9 U0 1506 ] [DMOVP D9 U0 1606 ] [DMOVP K9003 U0 1500 ] [DMOVP D9 U0 1600 ] [Program configuration] X-axis data set type home position return program (Program in section 14.10.3 (2) (f)) Y-axis data set type home position return program (Refer to the X-axis program and write the Y-axis program) 14 58 14.