JXCx-OMY0008

Operation methods 28 8.1 Outline 28 8.2 Operation by Step No. 28 8.3 Position/speed monitor 28 8.4 Operation by numerical instruction 28 9. Memory map 29 9.1 Memory allocation 29 (1) Input Data Area TxPDO Mapping 29 (2) Input data area TxPDO details 29 (3) Output data area RxPDO mapping 33 (4) Output data area RxPDO details 33 (5) Vendor specific area mapping 37 10.

PFxx-OMX0002

NPN output type PF3A7##H-##-L#-## Maximum load current: 80 mA Internal voltage drop 1.5 V max. : The output type (NPN or PNP) can be set using [F 0]. -20No.PF-OMX0002-B NPN + Analogue output type PF3A7##H-##-L3/L4#-## Maximum applied voltage: 28 V Maximum load current: 80 mA Internal voltage drop 1.5 V max.

VM

1 Mechanical Valves Series VM Mechanical Valves Series VM Mechanical Valves SA VA Model VM1000 VM100 VM200 VM400 VZM500 VZM400 VFM300 VFM200 VM800 SA Dimensions (mm) Side ported 11 x 36 x 16 Bottom ported 11 x 28 x 25 Side ported 17 x 44 x 25 Bottom ported 17 x 44 x 30 25 x 40 x 52 21 x 35 x 53 18 x 28 x 87 18 x 30 x 91 26 x 35 x 94 23 x 40 x 115 30 x 40 x 57 VA VM Courtesy of Steven Engineering

Slider Type Ball Screw Drive/11-LEFS Series

950 1000 Product weight [kg] 5.37 5.65 5.93 6.21 6.49 6.77 7.15 7.33 7.61 7.89 8.17 8.45 8.75 9.01 9.29 9.57 9.85 10.13 Additional weight with lock [kg] 0.53 517 11-LEFS Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specication Dimensions: Ball Screw Drive 11-LEFS16 (72) ( ) +0.025 0 3H9 depth 3 40 Body mounting Note 1) reference plane 4 x M4 x 0.7 thread depth 6.4 24 28

High Vacuum Angle Valve

(Red Green Red) Auto switch model D-M9NJ D-M9PJ Output type NPN PNP Power supply voltage 5, 12, 24 VDC (4.5 to 28 V) Current consumption 25 mA or less Load voltage 28 VDC or less Load current 40 mA or less Internal voltage drop 0.8 V or less Leakage current 100 mA or less at 24 VDC Indicator light Operating range . Red LED illuminates Optimal operating range .

LEC-OM038xx

CN1: Controller IF communication connector (CONT)28 8. 1 Connection.28 8. 2 Wiring diagram.30 9. CN2: TB/PC connector.31 9. 1 How to use.31 10. LED display.32 10. 1 LED display.32 10. 2 Controller IF communication status and LED display.33 11. Mode.34 11. 1 Outline.34 11. 2. Step data input mode .34 11. 3. Numerical data input mode.34 11. 4. Data writing mode.36 12.

LEC-OM036xx

CN1: Controller IF communication connector (CONT)28 8. 1 Connection.28 8. 2 Wiring diagram.30 9. CN2: TB/PC connector.31 9. 1 How to use.31 10. LED display.32 10. 1 LED display.32 10. 2 Controller IF communication status and LED display.33 11. Mode.34 11. 1 Outline.34 11. 2. Step data input mode .34 11. 3. Numerical data input mode.34 11. 4. Data writing mode.36 12.

VZ100/300/500

DXT170-34-1B Note With screw (For VZ32) Refer to pages 4-6-18 to 4-6-28 for manifold use.

Nozzle Type Ionizer

Symbol Pitch ES 17.4 mm Symbol Stations 2 2 3 3 4 4 AC adapter AC cord 96 2144105 1820 L2 L1 Ionizer1 (Order it separately.) 17.4 9.6 28 44 Bracket1 (Order it separately.) Hexagon nut Cleaning kit IZS30-M2 Hexagon socket head cap screw Spacer (5 mm) Part no.

Refrigerated Air Dryer

consumption (W) 180/202 180/202 180/202 180/202 180/202 208/236 385/440 100 V 2.4/2.5 2.4/2.5 2.4/2.5 2.4/2.5 2.4/2.5 3.0/3.1 5.7/5.7 Operating current (A) 50/60 Hz 200 V 1.2/1.3 1.2/1.3 1.2/1.3 1.5/1.5 3.4/3.0 (A) Circuit breaker Note 4) 10 (100 VAC), 5 (200 VAC) Condenser Air-cooled type Refrigerant HFC134a JIS Symbol Auto drain AD38 AD37 AD48 Port size 3/8 1/2 3/4 (kg) Weight 16 18 23 28

Digital Gap Checker

(Refer to Page 28) Do not use multiple detection nozzles with one product. If multiple nozzles are to be used, please test them on the actual equipment. It is necessary for the user to verify correct operation. Multiple detection nozzles are used. The Gap cannot be detected correctly.

Model Selection 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 7, 11, 15, 14, 20, 16, 25, 22, 32, 28, 40, 33, 50 Low vacuum to 1 Pilot pressure: 0.1 to 0.7 Single unit 1/8 to 2 (2B) 17-4-13 VNB N.C./N.O./C.O.

VCC

VCC VCC TQ L1 = n / 2 x 30 + 16 L2 = n / 2 x 30 + 32 n = Number of valves (cleaning valve + gate valve + other valves) n: Stations (mm) 2 n 4 6 8 10 12 14 16 18 20 22 24 26 28 30 32 34 36 38 40 L1 L2 76 106 136 166 196 226 256 286 316 346 376 406 436 466 496 526 556 586 616 46 92 122 152 182 212 242 272 302 332 362 392 422 452 482 512 542 572 602 632 62 651 VCC Series Dimensions SUS316L

Digital Flow Switch (Integrated display type)

NPN (1 output) + Analogue (1 to 5 V) type PF2A7H--28NPN (1 output) + Analogue (4 to 20 mA) type PF2A7H--29Max. 30 V, 80 mA Internal voltage drop: 1 V or less 28: Analogue output: 1 to 5 V Output impedance: 1 k 29: Analogue output: 4 to 20 mA Max.

Digital Flow Switch (Remote type monitor unit)

Definition and terminology 12 Mounting and Installation 14 Installation 14 Wiring 16 Outline of setting 18 List of outputs 19 Initialize mode 20 Default settings 20 Setting procedure of Initialize mode 21 Function selection mode 26 Default settings 26 F_1 Input procedure of the Set value of instantaneous output 27 F_2 Input procedure of the Set value of instantaneous output (Auto-preset) 28

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

to 12 Nm 12/9 13 43.5 33 30.5 10 18.5 17 6 to 9 Nm 10/8 11 42.5 33 30 9 18.5 17 6 to 9 Nm 1075 11 42.5 33 30 9 18.5 14 4 to 9 Nm 8/6 9 40 32 27.5 8 16 12 3 to 8 Nm 6/4 7 38.5 32 27.5 8 16 15 VCC Series Special Tools Tool for Attaching/Detaching Valve VCC-G-A Knurled 8 4 x 1.8 21 For attaching/ detaching valve 25 104 M16 x 1.5 VCC-G-B VCC-G-A VCC-G-B (for socket wrench) Knurled 4 x 1.8 21 28

Fieldbus system Analog unit

Installation 12 Installation 12 Wiring 14 Analog input unit Model Indication and How to Order 15 Names and Functions of Product 15 Mounting and Installation 16 Wiring 16 LED Display 18 Specification 19 Specifications 19 Dimensions 24 Analog output unit Model Indication and How to Order 25 Names and Functions of Product 25 Mounting and Installation 26 Wiring 26 LED Display 27 Specification 28

Space Saving Vacuum Ejector Vacuum Pump System

ZQ-OM00801-D Manifold Products Increasing and Decreasing the Number of Manifold Stations Ejector System 28 - Doc. no. ZQ-OM00801-D Increasing and Decreasing the Number of Manifold Stations Pump system 29 - Doc. no. ZQ-OM00801-D Exhaust from Ejector Avoid back pressure being applied to the exhaust air of the ejector.

10

C +0.030 4H9 0 depth 4 2 x 6.6 through (Body mounting hole) 2 4 3 52 1 Dimensions of auto switch mounting groove (Enlarged view) 4 x M6 x 1 thread depth 12 (Mounting thread) +0.052 27H9 0 depth 1.5 5 +0.030 4H9 0 depth 4 Auto switch mounting groove (4 locations)1 M5 x 0.8 (Finger opening port) 4 x M6 x 1 (Piston rod and rack screw) H 65 M5 x 0.8 (Finger closing port) 28.2 11 1 20 10 10 28

Series KP/KPQ/KPG

Open the inner package of double packaging in a clean room or other clean environment. 12 to 14 R 1/4 22 to 24 R 3/8 28 to 30 R 1/2 Mounting 3. Tightening tools Tighten with an appropriate wrench using the hexagon wrench flats on the body. Position the wrench on the base as close as possible to the threads.