Air Slide Table ø 4, ø 6, ø 8 Series MXJ

Model Grade Intake flow l/min (ANR) Model Adjuster option DWithout adjuster Grade 3 (Class 100 or equivalent) 11-MXJ4(L) Metal stopper Grade 4 (Class 1000 or equivalent) -X Without adjuster Grade 3 (Class 100 or equivalent) 11-MXJ6(L) 1 Metal stopper Grade 4 (Class 1000 or equivalent) Individual -X Without adjuster Grade 3 (Class 100 or equivalent) Vacuum port 11-MXJ8(L) Metal stopper Grade

5 Port Pilot Operated Solenoid Valve Series VFR2000 Rubber Seal, Plug-in/Non Plug-in How to Order Option Port size (P, A, B port) Thread type Electrical entry Rc Nil Nil Nil None Without sub-plate F: Plug-in type 01 1 8 F Z G With light/surge voltage supp

VQC 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 3 Electrical entry VQZ 110 to 120 VAC, 50/60 Hz G: Grommet E: Grommet terminal T: Conduit terminal D, Y: DIN terminal 4 3 position exhaust center 220 VAC, 50/60 Hz 5 6 24 VDC 12 VDC SQ 4 7 240 VAC, 50/60 Hz Note) VFS 9 Other 3 position pressure center Option Note) L and M plug connectors: Max. 220 VAC VFR 5 L: L plug connector M: M plug

VQD1000

4 Port Solenoid Valve Direct Operated Poppet Type Series VQD1000 How to Order Valves 5 1 5 L 1 VQD1 Type of actuation Made to Order Fluid-contact part: Oil-free X16 (A) 4 (B) 2 Single type Port size 1 M5 Nil M5 M5 thread Without sub-plate (Manifold) M5 thread Body ported 1 (P) 3 (R) Base mounted (A) 4 (B) 2 Latching type Electrical entry 2 L: Plug lead type L plug connector, With lead wire

sResponse timeHysteresisPower supply voltageResistancePF2W740Water3.5 to 45 l/min3.5 to 45 l/min5 to 40 l/min0.5 l/min0.5 l/pulse0 to 50C?5% F.S. or less?3% F.S. or less?5% F.S. or less (0 to 50C, based on 25C)70 mA or less700 g1/2, 3/4Karman vortex3-digit, 7-segment LEDl/min, gal(US)/minl, gal(US)0 to 1 MPa1.5 MPa0 to 999999 lOperating: 0 to 50C, Stored: ?

sResponse timeHysteresisPower supply voltageResistancePF2W740Water3.5 to 45 l/min3.5 to 45 l/min5 to 40 l/min0.5 l/min0.5 l/pulse0 to 50C?5% F.S. or less?3% F.S. or less?5% F.S. or less (0 to 50C, based on 25C)70 mA or less700 g1/2, 3/4Karman vortex3-digit, 7-segment LEDl/min, gal(US)/minl, gal(US)0 to 1 MPa1.5 MPa0 to 999999 lOperating: 0 to 50C, Stored: ?

sResponse timeHysteresisPower supply voltageResistancePF2W740Water3.5 to 45 l/min3.5 to 45 l/min5 to 40 l/min0.5 l/min0.5 l/pulse0 to 50C?5% F.S. or less?3% F.S. or less?5% F.S. or less (0 to 50C, based on 25C)70 mA or less700 g1/2, 3/4Karman vortex3-digit, 7-segment LEDl/min, gal(US)/minl, gal(US)0 to 1 MPa1.5 MPa0 to 999999 lOperating: 0 to 50C, Stored: ?

Exhaust Cleaner for Clean Rooms AMP Series

Particle density for particle of 0.3m or larger is less than 3.5 particles/l Since it is possible to release exhaust air from pneumatic equipment directly into a clean room, piping to exhaust ducts is unnecessary.

: °C), Bracket: R (w/Bracket), Calibration Certificate: None, Series: Z (Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min)

°C), Bracket: R (w/Bracket), Calibration Certificate: None, Series: Z (Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min)

: °C), Bracket: None, Calibration Certificate: None, Series: Z (Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min)

Certificate: None, Series: Z (Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min)

: R (w/Bracket), Calibration Certificate: None, Series: Z (Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min)

: °C), Bracket: None, Calibration Certificate: None, Series: Z (Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min)

: None, Calibration Certificate: None, Series: Z (Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min)

None, Calibration Certificate: None, Series: Z (Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min)

), Bracket: None, Calibration Certificate: A (w/Calibration Certificate), Series: Z (Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min)

, Calibration Certificate: None, Series: Z (Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min)

, Bracket: None, Calibration Certificate: A (w/Calibration Certificate), Series: Z (Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min)

, Calibration Certificate: None, Series: Z (Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min)

°C), Bracket: R (w/Bracket), Calibration Certificate: A (w/Calibration Certificate), Series: Z (Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min)