Size: 402, Thread: F [G(PF)], Port Size: IN: 1/4; Out: 3/8, Option: Metal Bowl
Size: 402, Thread: F [G(PF)], Port Size: IN: 3/8; Out: 3/8, Option: Metal Bowl
Size: 402, Thread: F [G(PF)], Port Size: IN: 1/2; Out: 3/8, Option: Metal Bowl
Size: 402, Thread: NPT, Port Size: IN: 1/4; Out: 3/8, Option: Metal Bowl
Size: 402, Thread: NPT, Port Size: IN: 3/8; Out: 3/8, Option: Metal Bowl
Body Size: -, Thread: -, Port Size: -, Option: -, Semi-Standard 1: -, Semi-Standard 2: -, Made to Order: -
Body Size: -, Thread: -, Port Size: -, Option: -, Semi-Standard 1: -, Semi-Standard 2: -, Made to Order: -
Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Non-Cassette Type, Opening Window Size: 32x222, Applicable Wafer Size 200mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: -, End Lock: -
Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Non-Cassette Type, Opening Window Size: 46x236, Applicable Wafer Size 200mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: -, End Lock: -
Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Cassette Type Standard, Opening Window Size: 32x222, Applicable Wafer Size 200mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: -, End Lock: -
Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Cassette Type Half MESC, Opening Window Size: 46x236, Applicable Wafer Size 200mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: -, End Lock: -
Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Cassette Type Full MESC, Opening Window Size: 46x236, Applicable Wafer Size 200mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: -, End Lock: -
Type: High Vacuum Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Non-Cassette Type, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: -, End Lock: -
Type: High Vacuum Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Cassette Type Standard, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: -, End Lock: -
Type: High Vacuum Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Cassette Type Half MESC, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: -, End Lock: -
Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Cassette Type Standard, Opening Window Size: 46x236, Applicable Wafer Size 200mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: -, End Lock: -
Display Pressure: 0.2MPa, Connection Thread: R 1/8, M5 Female, Attachment: -
Capacity: 500VA (IDF1E-10 to IDF8E-10, IDU3E10, IDU4E-10, IDU8E-10), Inlet Voltage: 1-phase: 200, 220, 230, 240VAC, 50Hz; 200-260VAC, 60Hz
Capacity: 1kVA (IDF11E-10, IDF15E-10, IDU6E-10, IDU11E-10, IDU15E-10), Inlet Voltage: 1-phase: 200, 220, 230, 240VAC, 50Hz; 200-260VAC, 60Hz
Size: -, Display Pressure: -, Connection Thread: -, Clear Cover Material: -, Attachment: -, Option: -