High Vacuum Slit Valve

Precautions 9 to 10 5. Replacement Part List 11 6. Maintenance 12 7. Troubleshooting 12 AttachmentProcedure for Maintenance 13 to 15 1 - SLIT VALVE Safety Instructions C These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

XMC/XYC Series

Conductance l/s Note 2 5 14 45 80 160 200 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Leakage Pa m3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type XMC KF(NW),CF KF(NW) KF(NW),CF KF(NW) KF(NW),K(DN) ,CF KF(NW),K(D N) XYC KF(NW) KF(NW) KF(NW) KF(NW) K(DN) KF(NW

Jxx-OMT0084

Spanner size and tightening torque Model Stud (male thread side) Socket (female thread side) Spanner size Tightening torque Spanner size Tightening torque JT20 Width: 22 mm 12 Nm Width: 10 mm 8 to 12 Nm JT32 Width: 27 mm 24 Nm Width: 12 mm 15 to 24 Nm JT40 Width: 36 mm 68 Nm Width: 17 mm 40 to 68 Nm Floating Joint Tighten with the rod end nut attached to the cylinder.

SI unit

Description and Functions 9 5-1 LED indication 9 5-2 Terminal board 9 5-3 Address setting 10 5-4 Setting of Hold/Clear 11 6. Wiring 12 6-1 Communication wiring 12 6-2 Terminal resistance 13 6-3 Cable for communication line 13 6-4 Wiring to power supply 13 7. Troubleshooting 14 -1No.EX-OMF0012-B 1.

VFR4000-OMH0003

Replace pilot valve assembly. (10) Protect the valve so that water does not splash the coil. Replace pilot valve assembly. (11) To remove foreign matter, clean the pipe by air blow. Replace valve. (12) Repair or replace actuators.

10-SYJ3000

(Example) 10-SYJ3120-5M-M3 VJ3000-13-1 DC AC (50/60 Hz) CE-compliant CE-compliant 5 6 V S R 1 2 3 4 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] For type W, only DC voltage is available. Note) CE-compliant: For DC only.

Activated Carbon Filter

Construction / Options / Replacement parts 10 6. Bowl assembly specifications 11 to 13 7. Assembly of Optional parts 14 8. Troubleshooting 15 9. Replacement work procedure 16 to 22 1) Element assembly (AMK20) 16 to 17 2) Bowl assembly (AMK20) 18 1) Element assembly (AMK30/AMK40) 19 to 20 2) Bowl assembly (AMK30/AMK40) 21 to 22 10. Exploded Drawing 23 11.

SY3000/5000/7000 Series Plug-in Type

Valve and Manifold Combination The SY series plug-in valve has the common configuration of the valve mounting surface between base mounted type (SY3/5/70) and top ported type (SY3/5/73), therefore, it can be mounted to all manifolds of the side ported type (type 50 and type 10), the bottom 0ported type (type 51 and type 11) and the top ported type (type 52 and type 12).

I

._ I 10, 22o, 12, 24, 48' 24ov sodoHz DC -24,6,12, 48, 100, 1 10v Voltag6 allowance 15.' + 10% of rated voltage lrcUlailon-Class B or equivalent Power consumptim AC Inrush-5.6VA(soHz)' 5.0VA(6OHZ) Hotdino-3.4VA(5OHz), 2.3VA(6OHz) DC_ 1.8W/2W (With LED) Indicator light Surg voltage supp(Gsor circuil AC ZNR (Varistor) ,Neon lamp (LED 10OV or le6s) DCDiode.

Vacuum Ejector Body Ported Type/Box Type (Built-in Silencer)

ZH-OM00401 Contents Safety Instructions 2 How to Order 4 Operating Environment 6 Mounting 6 Piping 9 Air Supply 10 Model Selection 11 Ejector Characteristics 11 When Operating the Ejector 12 Identification 12 Construction 13 Specifications 13 Exhaust Characteristics / Flow Rate Characteristics (Representative Value) 14 Circuit Examples 16 Maintenance 18 Trouble shooting (Vacuum Adsorption

EX600-SEN_eng

(PCI) 12 11 10 9 8 Joint bracket Bracket for joining to adjacent units. 6 3 1 5 Connector (PCI) Connects the cable of the handheld terminal. 7 4 2 Direct mounting (1)When joining six or more units, fix the middle part of the complete EX600 unit with an intermediate reinforcing brace (EX600-ZMB1) before mounting using 2-M4x5 screws. Tightening torque: 0.7 to 0.8 Nm.

Voltage Monitor for PFMV5

If the minimum setting unit is 1 L/min, the flow can be displayed in 1 L/min units, i.e. 10, 11, 12. Minimum. setting unit O Operating hamidity range The ambient hamidity range within which the product will meet all published specifications.

IBV-OMY0015

Designated nozzle: IBG1-12-10: Nozzle length (50, 100, 150, 300) Silencing nozzle: IBG1-12S Set including the designated nozzle and silencing nozzle: IBG1-12-10-S : Nozzle length (50, 100, 150, 300) 4. Impact resistance of the product is 150[m/s2]. Vibration resistance is 30[m/s2]. Avoid applying vibration exceeding the allowable value to the product. Mounting Warning 1.

XLA- ∗ -F7NJ ∗ - ∗ Series

Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 Flange (valve) size 16 25 40 50 63 80 100 160 Actuating type Normally closed Fluid Vacuum of inert gas Operating temperature oC 5 to 150 Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1 5 14 45 80 160 200 300 800 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

Vale specifications Model XLC-25 XLC-40 Flange (valve) size 25 40 Actuating type Double acting/ activated by applying pressure Fluid Vacuum of inert gas Operating temperature oC 5 to 150 Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1 14 45 Leakage Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperature, excluding gas permeation Pam3/

XMH/XYH Series

Specifications Table 4 Model Note 1 XMH-16 XMH-25 XYH-25 XMH-40 XYH-40 XMH-50 XYH-50 Flange (valve) size 16,CF034 25 40,CF070 50 Actuating type Manual Fluid Inactive gas under vacuum Operating temperature oC 5 to 150 Operating pressure Pa (abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 2 5 14 45 80 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures ,

CG1-OM0227

AF AR 1) 5 2) 3) 5 4 4) 1 ( )ISO VG-32 2-2. 1) 2) 3) 4) 5) 6) 7 8) 9) 10) 3 1) 2) 3) 4) 5 5) (40) 2-3. 1) 2) 1) 1 P10[3. ] () (fR)[N] [mm] 1. 6 (MPa)=(MPa)+{(kg) 2)} X /(mm ,, 2) 3) 4) ( ) 5) 6) 7)()1 1 Nm CG120 1.5 1.52.2 CG125 2.9 2.53.5 CG132 2.9 6.08.6 CG140 4.9 10.814.6 CG150 11.8 1925 CG163 24.5 3040 CG180 24.5 --CG1100 42.2 --8) 9) 10) 11) 12) 7

CG1x-OM0006N

AF AR 1) 2 3 1) () 2) 5 3) 4) 5 5) 6) 7 2-2. 1) 2) 3) 4) 5) 6) 7) 8) , 9) 10) 3 11) 12) () 13)/ 14) 8 1 P142. 2 3 4 5 6 7 2-3. 1 2) 3 4 5 9 1 P14[2. ] fR[N] [mm] 1. 2 3 10 4 51 1.

ISG

AC 110 12 2 12 3 q e w e t y 220 10 1 10 1.5 440 6 1 3 1 550 5 0.8 2 0.5 r b contact w a contact r q DC 24 3 2.5 3 2.5 C C 48 1.5 1.2 1.5 1.25 When rising pressure q w = ON e r = OFF When rising pressure q e r y = ON q w r t = OFF 110 0.5 0.25 0.5 0.2 220 0.25 0.1 0.25 0.1 Insulation resistance: 100 M or more at 500 VDC by megameter Voltage resistance: 2000 VAC/1 min. 16-9-5 2 Series

Series SYJA300 3 Port Air Operated Valve

SYJA514 SYJ500-10-3A . SYJ700-10-2A .. Pilot Pressure Range 0.6 Pilot pressure (MPa) Pilot pressure range 0.5 0.4 Caution 0.3 Be sure to read before handing.