temperature (C) Note 1)Ambient temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG50ACompressed air0.3 to 1.0 5 to 50 5 to 50 20586500860.72525251 L/min [ANR] {In case

temperature (C) Note 1)Ambient temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG50ACompressed air0.3 to 1.0 5 to 50 5 to 50 20586500860.72525251 L/min [ANR] {In case

air pressure (MPa)Inlet air temperature (oC) Note 1)Ambient temperature (oC) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG60LACompressed air0.3 to 1.0 5 to 50 5 to 50 40224170540.72525251

(oC) Note 1)Ambient temperature (oC) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG75SACompressed air0.3 to 1.0 5 to 50 5 to 50 60140100400.72525251 L/min [ANR] {In case of Inlet

(oC) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG100LACompressed air0.3 to 1.0 5 to 50 5 to 50 404003001000.72525251 L/min [ANR] {In case of Inlet air pressure 0.7 MPa}3/8, 1/

(C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG100Compressed air0.3 to 1.0 5 to 50 5 to 50 20119010001900.72525251 L/min [ANR] {In case of Inlet air pressure 0.7 MPa}1/21.55(

(oC) Note 1)Ambient temperature (oC) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG60SACompressed air0.3 to 1.0 5 to 50 5 to 50 607550250.72525251 L/min [ANR] {In case of Inlet

(C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG75Compressed air0.3 to 1.0 5 to 50 5 to 50 209007501500.72525251 L/min [ANR] {In case of Inlet air pressure 0.7 MPa}1/21.50(1.65

(C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG75Compressed air0.3 to 1.0 5 to 50 5 to 50 209007501500.72525251 L/min [ANR] {In case of Inlet air pressure 0.7 MPa}1/21.50(1.65

25 to 85C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M or more (500 VDC Mega) between external terminal and case.10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, in each X, Y, Z direction for 2 hrs, whichever is smaller. (de-energized)490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?s, Rise time 1 ns

25 to 85C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M or more (500 VDC Mega) between external terminal and case.10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, in each X, Y, Z direction for 2 hrs, whichever is smaller. (de-energized)490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?s, Rise time 1 ns

25 to 85C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M or more (500 VDC Mega) between external terminal and case.10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, in each X, Y, Z direction for 2 hrs, whichever is smaller. (de-energized)490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?s, Rise time 1 ns

25 to 85C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M or more (500 VDC Mega) between external terminal and case.10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, in each X, Y, Z direction for 2 hrs, whichever is smaller. (de-energized)490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?s, Rise time 1 ns

25 to 85C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M or more (500 VDC Mega) between external terminal and case.10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, in each X, Y, Z direction for 2 hrs, whichever is smaller. (de-energized)490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?s, Rise time 1 ns

(oC) Note 1)Ambient temperature (oC) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG60LACompressed air0.3 to 1.0 5 to 50 5 to 50 40224170540.72525251 L/min [ANR] {In case of Inlet

(oC) Note 1)Ambient temperature (oC) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG100HCompressed air0.3 to 1.0 5 to 50 5 to 50 15111010001100.72525251 L/min [ANR] {In case of Inlet

air pressure (MPa)Inlet air temperature (oC) Note 1)Ambient temperature (oC) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG60LACompressed air0.3 to 1.0 5 to 50 5 to 50 40224170540.72525251

air pressure (MPa)Inlet air temperature (oC) Note 1)Ambient temperature (oC) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG60LACompressed air0.3 to 1.0 5 to 50 5 to 50 40224170540.72525251

air pressure (MPa)Inlet air temperature (oC) Note 1)Ambient temperature (oC) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG30HACompressed air0.3 to 1.0 5 to 50 5 to 50 15329300290.72525251

air pressure (MPa)Inlet air temperature (oC) Note 1)Ambient temperature (oC) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG50HACompressed air0.3 to 1.0 5 to 50 5 to 50 15550500500.72525251