Body Size: 40, Model Type: Air Filter + Regulator + Lubricator, Thread: N (NPT), Port Size: 02 (1/4), Float Type Auto Drain: D [N.O.

Body Size: 40, Model Type: Air Filter + Regulator + Lubricator, Thread: N (NPT), Port Size: 03 (3/8), Float Type Auto Drain: D [N.O.

Body Size: 40, Model Type: Air Filter + Regulator + Lubricator, Thread: Rc, Port Size: 04 (1/2), Float Type Auto Drain: w/o Auto Drain, Pressure Gauge/Digital Pressure Switch: G (Round Type Pressure Gauge, w/Limit Indicator), Attachment: without Attachment, Set Pressure: 0.05 to 0.85 MPa Setting, Bowl Type + Lubricator: 2 (Metal Bowl), Bowl Guard: None, Air Filter Drain Port: w/Drain Cock

Body Size: 40, Model Type: Air Filter + Regulator + Lubricator, Thread: Rc, Port Size: 03 (3/8), Float Type Auto Drain: D [N.O.

Body Size: 40, Model Type: Air Filter + Regulator + Lubricator, Thread: N (NPT), Port Size: 03 (3/8), Float Type Auto Drain: D [N.O.

Body Size: 40, Model Type: Air Filter + Regulator + Lubricator, Thread: N (NPT), Port Size: 03 (3/8), Float Type Auto Drain: D [N.O.

Series KV2 Fittings

(g) Bag/Box Quantity MB D2 D3 D4 D5 D6 L1 L2 L3 5/32** 5/32 5/32 5/32 1/4** 1/4 1/4 1/4 3/8** 3/8** 3/8 3/8 3/8 1/2** 1/2** 1/2** 1/2 1/2 1/2 5/8** 1/4 5/32 5/32 5/32 3/8 1/4 1/4 1/4 1/4 1/4 3/8 3/8 3/8 1/4 3/8 3/8 1/2 1/2 1/2 5/8 1/4-18 1/16-18 1/8-27 1/4-18 1/4-18 1/8-27 1/4-18 3/8-18 1/4-18 3/8-18 1/4-18 3/8-18 1/2-14 1/2-14 3/8-18 1/2-14 1/4-18 3/8-18 1/2-14 1/2-14 KV2Y03-07-35S KV2Y03

PF2D

(1 L/min flow rate).

IDX-OM-O004C

MAKER MADE IN i.3 HFC i 6 i i.4 / 1 1.5 () i 7 1. 1 1.1 () 1 1 1.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

For Deionized Water and Chemicals Digital Flow Switch Series PF2D How to Order Remote Type Sensor Unit C PF2D5 13 20 1 Option (Refer to page 55.) Flow rate range None e-con connector x 1 pc. Nil C 0.4 to 4 l/min 1.8 to 20 l/min 4 to 40 l/min 04 20 40 The cable and connector are shipped unassembled.

0.01

4, G 1/4 NPT 1/4 Rc 1/4, G 1/4 NPT 1/4 Female thread Rc 1/4, G 1/4, NPT 1/4 Resin Case material Resin Aluminum Stainless steel Air (Nitrogen) Fluid 0.01 m (filtration efficiency: 99.99%) Note) Nominal filtration rating Initial pressure drop 0.03 MPa (at inlet pressure 0.7 MPa, maximum flow) Maximum operating pressure (at 20C) 1.0 MPa (in case of nitrogen: 0.99 MPa) 5 to 45C Operating

Clean Regulator

ITVX Specifications PVQ VY1 SRH30 SRH40 SRH31 SRH41 Model Non-relief Relief Relief mechanism VBA VBAT Rc 1/8, 1/4 URJF 1/4 Rc 1/4, 3/8, 1/2 URJF 3/8 Rc 1/8, 1/4 Rc 1/4, 3/8, 1/2 Port size AP100 Grade A Clean air, N2, Ar, CO2, Pure water Clean air, N2 Fluid Grade B Air, N2, Ar, CO2, Water Air, N2 1.5 MPa Proof pressure 1 MPa Max. operating pressure Low pressure type High pressure type 0.02

ITV

ITV301l 0.005 to 0.1MPa ITV303l 0.005 to 0.5MPa 1.12-1 1/4, 3/8, 1/2 ITV305l 0.005 to 0.9MPa Series ITV209l Controls vacuum pressure steplessly in proportion to an electric signal.

PF2D

Flow rate range Output for display unit Note 1) + analog output (1 to 5 V) Output for display unit Note 1) + analog output (4 to 20 mA) 3/8 1/2 3/4 1 2 11 13 19 Port size (inch) 0.4 to 4 l/min 1.8 to 20 l/min 4 to 40 l/min Note 1) Output for the display units of PF2D 300/301 04 20 40 PF2D504 PF2D520 PF2D540 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

to 4l/min 1.8 to 20l/min 4 to 40l/min 04 20 40 Output for display unit Note 1) + analog output (1 to 5V) Output for display unit Note 1) + analog output (4 to 20mA) Output specifications 1 2 Port size: (inch) Note 1) Output for the display units of PF2D 300/301 11 13 19 3/8 1/2 3/4 PF2D504 PF2D520 PF2D540 Specifications for Sensor Unit Model PF2D504 PF2D520 PF2D540 Measured fluid Liquid

VN-OMP0002

(P2) 10(P2) 10(P2) 12(P1)10(P2) 15A 211 420-04 1/2 B(12.7) 20A 311 500-06 3/4 B(19.1) 25A 411 600-10 1 B(25.4) 2 32A 511 800-12 1 1/4 B(31.8) VNA01 VNA02 VNA03 VNA1 40A 611 900-14 1 1/2 B(38.1) (P1) () 12 50A 711 900-20 2 B(50.8) (P2) () 10 (),12(P1) 10(P2) EXH , 6 VN-OMP0002 1 2 3 () 4 P2 5 6 7 8 9 10 11 O O 12 13 14 7 VN-OMP0002 No. 1 2 3 4 5 , 6 7 8 9 10 11 P2N.C.

Speed Controller with Uni One-touch Fitting Series AS Elbow Type/Universal Type 1

Metric size Inch size Type Elbow Universal 2 3 1 8" 5 32" 23 01 3.2 4 6 8 10 12 04 06 08 10 12 03 05 07 09 11 13 3 16" 1 4" 5 16" Control type Meter-out Meter-in 0 1 3 8" 1 2" Use 1/8" tube.

Regulator AR30 to 60

AR30 Option Thread type Port size Symbol Nil B E G P Applicable models AR30 to 60 AR30 to 60 AR30 to 60 AR30 to 40 Contents With bracket With square embedded type pressure gauge (with limit indicator) Round pressure gauge (with limit indicator) Panel mount (with set nut) Metric thread (M5) Rc NPT G Nil Note 1) 1 4 02 03 04 06 10 N F 3 8 Note 2) 1 2 3 4 1 Note 1) Bracket assembly is not

Compact Manometer Series PPA 1

PPA101 for vacuum PPA102 for low press. 10 to 100 kPa 0.1 to 1 MPa Rated pressure range 101 to 10 kPa Pressure display 3 digit LCD back light Pressure display discrimination 1/100 1 1 kPa 0.01 MPa 5 mmHg Note) kgf/cm 2 Mini. display units 0.01 0.01 0.1 0.2 inHg 0.1 0.1 1 PSI 0.01 0.01 0.1 bar Error display Over pressure, Memory data error, Change battery sign Peak/bottom display, Backlight

Compact Manometer Series PPA 1

PPA101 for vacuum PPA102 for low press. 10 to 100 kPa 0.1 to 1 MPa Rated pressure range 101 to 10 kPa Pressure display 3 digit LCD back light Pressure display discrimination 1/100 1 1 kPa 0.01 MPa 5 mmHg Note) kgf/cm 2 Mini. display units 0.01 0.01 0.1 0.2 inHg 0.1 0.1 1 PSI 0.01 0.01 0.1 bar Error display Over pressure, Memory data error, Change battery sign Peak/bottom display, Backlight