Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 2 (Cassette Type Standard), Opening Window Size: 46236 (46x236, Applicable Wafer Size 200mm), Gate O-ring Material: 1 (FKM), Auto Switch & Connector: F (2 pcs D-A93 w/D-sub Connector)
Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 3 (Cassette Type Half MESC), Opening Window Size: 46236 (46x236, Applicable Wafer Size 200mm), Gate O-ring Material: 1 (FKM), Auto Switch & Connector: C (2 pcs D-A93 w/Multiple Connector)
Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 3 (Cassette Type Half MESC), Opening Window Size: 46236 (46x236, Applicable Wafer Size 200mm), Gate O-ring Material: 1 (FKM), Auto Switch & Connector: F (2 pcs D-A93 w/D-sub Connector)
Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 4 (Cassette Type Full MESC), Opening Window Size: 46236 (46x236, Applicable Wafer Size 200mm), Gate O-ring Material: 1 (FKM), Auto Switch & Connector: F (2 pcs D-A93 w/D-sub Connector)
Body Class: 6 (Orifice Dia. ø22), Valve Type: 0 (N.C.), Applicable Tubing Size: 25 (25 x 22 or 1" x 7/8"), Pilot Port Thread Type: N (NPT 1/8), Pilot Port Position: None (Position 1), Material: F (Body: PFA; End Plate: PVDF; Diaphragm: PTFE; Seal, Buffer: FKM)
Body Size: 22, Pilot Type: 1 (External Pilot Solenoid), Port: 02 (1/4), Thread: N (NPT), Voltage: 3 (110 VAC, 50/60 Hz), Electrical Entry: H (Grommet Lead Wire 600mm), Light/Surge Voltage Suppressor: Z (w/light surge voltage suppressor), Manual Override: Non-locking Push Style or None
Handle Position: A (Upper), Piping: 3 (IN:Bottom/OUT:Top), Stations: 6 Stations, Fitting: 22 (IN Elbow Ø8, OUT Elbow Ø6), Accessory: J (Pressure Gauge, Common SUP Block L Side), Option: 1 (0.35MPa), Unit: Name Plate, Gauge & Pressure Switch (Fixed Display) MPa, Digital Pressure Switch Output Specifications: P (PNP Open Collector)
SI Unit: QW (DeviceNet), Input Block Stations: 22 (2 Stations/M12: 4 Inputs), Input Block COM: N (-COM), Stations: 2 Stations, SUP/EXH Block Mounting: U (U Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: N7 (1/4" One-touch Fitting), Mounting Method: D (DIN Rail Mounting)
SI Unit: QW (DeviceNet), Input Block Stations: 22 (2 Stations/M12: 4 Inputs), Input Block COM: N (-COM), Stations: 4 Stations, SUP/EXH Block Mounting: U (U Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: N7 (1/4" One-touch Fitting), Mounting Method: D (DIN Rail Mounting)
SI Unit: ZEN (EtherNet/IP), Input Block Stations: 22 (2 Stations/M12: 4 Inputs), Input Block COM: +COM, Stations: 8 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: Internal Pilot, A, B Port: N7 (1/4" One-touch Fitting), Mounting Method: D (DIN Rail Mounting)
SI Unit: ZEN (EtherNet/IP), Input Block Stations: 22 (2 Stations/M12: 4 Inputs), Input Block COM: +COM, Stations: 2 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: Internal Pilot, A, B Port: C6 (ø6 One-touch Fitting), Mounting Method: D (DIN Rail Mounting)
SI Unit: ZEN (EtherNet/IP), Input Block Stations: 22 (2 Stations/M12: 4 Inputs), Input Block COM: +COM, Stations: 7 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: Internal Pilot, A, B Port: N7 (1/4" One-touch Fitting), Mounting Method: D (DIN Rail Mounting)
SI Unit: ZEN (EtherNet/IP), Input Block Stations: 22 (2 Stations/M12: 4 Inputs), Input Block COM: +COM, Stations: 6 Stations, SUP/EXH Block Mounting: U (U Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: N7 (1/4" One-touch Fitting), Mounting Method: D (DIN Rail Mounting)
SI Unit: ZEN (EtherNet/IP), Input Block Stations: 22 (2 Stations/M12: 4 Inputs), Input Block COM: N (-COM), Stations: 8 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: S (Internal Pilot, Built-in Silencer), A, B Port: N7 (1/4" One-touch Fitting)
SI Unit: ZEN (EtherNet/IP), Input Block Stations: 22 (2 Stations/M12: 4 Inputs), Input Block COM: +COM, Stations: 7 Stations, SUP/EXH Block Mounting: D (D Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: N7 (1/4" One-touch Fitting), Mounting Method: D (DIN Rail Mounting)
Model: 22, Orifice Size: 3 (4.5mm), Configuration: 0 (N.C./Single Unit), Solenoid Valve Option: Brass Body, NBR Seal, Class B, Suffix: Standard, Port Size: 02 (1/4), Thread Type: N (NPT), Voltage: 3 (110VAC 50/60HZ), Electrical Entry: D (DIN Connector), Full-wave Rectifier: R (w/Full-wave Rectifier)
Model: 22, Orifice Size: 5 (8mm), Configuration: 0 (N.C./Single Unit), Solenoid Valve Option: Brass Body, NBR Seal, Class B, Suffix: Standard, Port Size: 02 (1/4), Thread Type: N (NPT), Voltage: 5 (24VDC), Electrical Entry: DZ (DIN Terminal w/Surge Voltage Suppressor and Light), Full-wave Rectifier: None
Model: 22, Orifice Size: 2 (3mm), Configuration: 0 (N.C./Single Unit), Solenoid Valve Option: Brass Body, NBR Seal, Class B, Suffix: Standard, Port Size: 02 (1/4), Thread Type: N (NPT), Voltage: 5 (24VDC), Electrical Entry: DZ (DIN Terminal w/Surge Voltage Suppressor and Light), Full-wave Rectifier: None
Model: 22, Orifice Size: 2 (3mm), Configuration: 0 (N.C./Single Unit), Solenoid Valve Option: Brass Body, NBR Seal, Class B, Suffix: Standard, Port Size: 03 (3/8), Thread Type: N (NPT), Voltage: 5 (24VDC), Electrical Entry: DZ (DIN Terminal w/Surge Voltage Suppressor and Light), Full-wave Rectifier: None
Model: 22, Orifice Size: 4 (6mm), Configuration: 0 (N.C./Single Unit), Solenoid Valve Option: Brass Body, NBR Seal, Class B, Suffix: Standard, Port Size: 02 (1/4), Thread Type: N (NPT), Voltage: 5 (24VDC), Electrical Entry: DZ (DIN Terminal w/Surge Voltage Suppressor and Light), Full-wave Rectifier: None