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Perform final torque with same numerical order. 18 XL-OMP0001 Revision history 1st Printing :PR 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2009 SMC Corporation All Rights Reserved 19 XL-OMP0001

Tighten the bolts gradually in numerical order (alternately) with bonnet assembly held. 11 XL-OMU0002-A Revision history A 40 size added WU 1st Printing :UX 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer

XGT300-9-7S AS568-177 XGT300-4-9S XGT300-2-5S ASSY 6 XGT300-50AS XGT31*-50336-*C 9 D XGT300-50DS XGT31*-50336-*F XGT0402-9-12S XGT31*-50336-*C C016 30D006 100 12 (AMP) 6. 11 - 7. 0.45MPa O O O O O ,O ASSY ASSY O O 4-3 0.45MPa ASSY ASSY 4-3 0.45MPa ASSY ASSY ASSY ASSY ASSY 12 - A 13 - 14 - 15 - Revision history A : ASSY 2021.11 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

Model Selection 2 Revision 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011 SMC Corporation All Rights Reserved

C 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2018 SMC Corporation All Rights Reserved

) V band tightening 5-6 [Restart and air discharge] (1) When restart the operation after the replacement of the element, follow the procedure of section 4 Operation. (2) When restart the operation, open the upper air relief port to discharge air. 12/12 FGX-OM-L008-A Revision history Revision A Safety instructions added Maintenance Part No. added (Sv) 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

() (P7 1 ) ) 10/12 FGX-OM-L009-B 5-3 (P7 1) ) 2~3 3 3 () FGESAFGELA FGESBFGELB FGESCFGELC 6570L250 6570 L500 6570 L250 6570 L750 6570 L250 (mm) 2630 4045 3338 5155 2744 11/12 FGX-OM-L009-B 5-4 O O ((1)(2)) (1) (2) 5-5 V V O a V b V V (ab) V T (c) () ()V (P7,1) V V V CY-24S T c V 5-6 4. 12/12 FGX-OM-L009-B Revision history A (Sv) 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

When restart the operation, open the upper air relief port to discharge air. 8/8 FGX-OM-L010 URL http://www.smcworld.com Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021,JAPAN Phone: +81 3 5207 8249 Fax: +81 3 5298 5362 Specifications are subject to change without prior notice and any obligation the part of the manufacturer. 2008 SMC Corporation All Rights Reserved

77S 5/8 FGX-OM-L011 2 2. 0.7MPa 80 27L,43L,52L 19.5kg,23kg,30kg 0.1MPa 3 M12 23 4 1 V 2 6 [] 23 6/8 FGX-OM-L011 5 1 INLETOUTLET O (1)(2) (2) AL-25S(:NBR) AL-22S(:FKM) (1) 2 3 23 7/8 FGX-OM-L011 4 O O 1 2 (1) (2) 5 (a)(b) V [(c)] [(c)] O 1 V V V V O (a) V (b) V (c) 6 8/8 FGX-OM-L011 URL http://www.smcworld.com Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

P5:Postscript 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2020 SMC Corporation All Rights Reserved

They can also be referred to in the catalogue. 2Consumables For other consumables such as gasket or seals, see Table 12. 12/12 FGX-OMZ0008 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer

Maintenance space Port size Dimension to draw the element Drain flushing dimension 06,08 290mm from the lower end of the bowl 100mm from the lower end 10,12 380mm from the lower end of the bowl of the bowl 16 430mm from the lower end of the bowl 20,24 540mm from the lower end of the bowl 17 / 17 FGX-OM-F001-A Revision history Revision A: Full scale revision 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

H 27 E110 F110 E195 F275 911:P368010-27 7 9:P368010-26 () 28 () E195 F275 E110 F110 29 ) 911:P368010-27 7 9:P368010-26 () 30 ) 31 () 911:P368010-27 7 9:P368010-26 () 32 () 33 Revision history A 2021.7.30 13-2-37-27-3 B 2022.4.25 8.(3)8.(6) 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications

Drain cock is not closed firmly Tighten drain cock Dust adhere to drain cock seat Remove case to remove dust of seat -9- -10- Revision A Total revision B Change of address C Delete exploded view spare parts list, replace drawing 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change

A: April 2022 (Add average speed data) 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com NOTE: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation All Rights Reserved 22

B: May 2022 (Add Software rev.) 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com NOTE: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation All Rights Reserved 19

This operation manual refers to all standard types and is partially applicable to special models. 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com NOTE: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2021 SMC Corporation All Rights Reserved 35 -

Remove these factors. 16 - Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2019 SMC Corporation All Rights Reserve

[July 2018] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2014-2018 SMC Corporation All Rights Reserved No.PS-OMS0005-E

15No.PS-OMS0004CN-D [mA] [V] A B 01MPa 0 1MPa -100100 kPa -100 kPa 100 kPa 0500 kPa 0 500 kPa -16No.PS-OMS0004CN-D A B PSE57-01 8 R1/8 PSE57-02 12 R1/4 M12 ZS-37-A 1 2 4 3 M12 ZS-37-B 3 4 2 1 M12 -17No.PS-OMS0004CN-D ZS-31-X D E F G H I ZS-31-X188 20 9 R1/8 Rc1/8 14 1.5 ZS-31-X175 29 13 R1/4 Rc1/4 17 1.6 -18No.PS-OMS0004CN-D Revision history A B C D 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101