Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ outputs 100 to 100 kPa/NPN open collector 1 output + analog voltage 100 to 100 kPa/PNP open collector 1 output + analog voltage Specification ZQ1-ZSEA--A ZQ1-ZSEB--A ZQ1-ZSEC--A ZQ1-ZSEE--A ZQ1-ZSFA--A ZQ1-ZSFB--A ZQ1-ZSFC--A ZQ1-ZSFE--A 6 Series ZQ Dimensions Type K1 ZQ1 1U-K1 5 6 23 32 17.6 13.1 4 x 3.5 Mounting hole Vacuum release flow adjusting needle (With L-type plug connector) 25 33
Bore size (mm) 80 NLP-80A PDU-25Z PSD-33 x 25 P75 DSM-30 CA80-1609 CA80-1604 P5 Description Material No. 40 NLP-40A PDU-16Z PSD-22 x 16 P44 DSM-20 CA40-1606 CA40-1601 P3 50 NLP-50A PDU-20Z PSD-27 x 20 P50 DSM-25 CA63-1608 CA50-1602 P3 63 NLP-63A PDU-20Z PSD-27 x 20 P60 DSM-25 CA63-1608 CA63-1603 P3 100 NLP-100A PDU-30Z PSD-38 x 30 P90 DSM-35 CA100-1610 CA100-1605 P5 Piston seal Rod seal A
+ Stroke A + Stroke CE1 CE2 Rod end male thread ML2B H1 C J G5-S Auto switch D-A9, F9 CV MVGQ Rod end nut C1 X L1 CC RB Rod End Male Thread (mm) Bore size (mm) C1 X H1 L1 J 32 20.5 23.5 28.5 M14 x 1.5 D40 20.5 23.5 28.5 M14 x 1.5 50 26 28.5 33.5 M18 x 1.5 -X (mm) Without auto switch With auto switch A B A B 20U Z Bore size (mm) Stroke range (mm) C D E F H I J K L M N O P Q S 5 to 50 40 33
Applicable model A B C D E F G H J K L t AS-10L ZH05/07/10DA 11 14.8 18.3 3.4 27.5 19.5 3.4 4.9 7.3 12 14 1 AS-25L ZH13/15DA 17 19.6 24.6 4.5 38 28 4.5 6.5 9.5 15.5 20 1.2 AS-30L ZH18/20DA 22 24.8 29.8 43 33 22 1.4 230 Body Ported Type Vacuum Ejector ZH Series Body Ported: ZH05D A--to ZH20D A--S L S L DIN rail mounting bracket (Bracket on a single side) ZH05 to 10DA ZK2 H J E F ZQ ZR G ZB
Bore size (mm) 80 NLP-80A PDU-25Z PSD-33 x 25 P75 DSM-30 CA80-1609 CA80-1604 P5 No.
Bit BYTE 64 (Maximum) Value The Bits 49 54 56 32 30 33 30 2D 49 4C 32 42 4E (hexadecimal number) indicate "ITV2030-IL2BN." (ASCII code) 20 - Setting using buttons ! Caution If the incorrect key is pressed or incorrect information is displayed during setting, power must be shut off and the procedure started again.
type. 11 Compact Direct Operated 3 Port Solenoid Valve Series S070 Dimensions Body ported stacking type manifold 01 02 SS073M Stations C 3.8 3.4 P = 7.2 7.7 3.4 6.8 8.3 6 barb fitting 3 (EXH) port n-3.2, 4 barb fitting 2 (OUT) port 6 barb fitting 1 (SUP) port 16.5 5.5 14.5 11.5 6 0.1 W with power saving circuit 1 3 9.5 13.1 16.5 150 (lead wire AWG#26) 5 26.5 31.5 3.5 150 (lead wire AWG#26) 33
(mm) Female thread One-touch fitting AMJ 4 tube 6 tube 8 tube M5 x 0.8 Rc 1/8 Misc. 33 30 32 10 to 16 133 139 128 20 to 32 159 167 158 40, 50 Weight by Stroke (g) Pad dia.
(52) 2.64 (68) 3.31 (84) 3.94 .(1m) 4.57 (116) 5.20 (132) 5.83 (148) 6.46 (164) 7.09 080) 7.72 (96) 8.35 tzz) 8.98 \228) 9.61 \244) 10.24 (260) 10.87 \276) 11.50 \m2) 12.13 (308) 12.76 (324) 13.39 (340) Lz 1.69 (43) (59) 2.95 (75) 3.58 (sr ) 4.21 (107) 4.84 (123) 5.47 (13s)6.10 (156) (1n) 087) 7.39 (20s) 4.62 (49) s.25 (235)9.84 (251) 10.51 (267) 1114 (283) 1.n (2ss) 12.40 (315) 13.0.3 (33
steel @1 Resin case Resin @2 725 Series MRHQ Dimensions MRHQ10 A B 34 41 54.5 4 x M4 x 0.7 depth 6 24.5 0 -0.062 37h9 0 -0.1 4 31 +2.2 0 15.2 opened 0 -0.1 5 0 -0.7 11.2 closed M5 x 0.8 4 x M2.5 x 0.45 (attachment mounting screw ) Finger closing port 3 Max. 6.1 5.7 13.7 12 4 x M4 x 0.7 depth 6 (two on opposite side) 34 M5 x 0.8 22.5 2.5 Finger opening port 4.5 11.5 23 11 2 18 25 15.5 41.5 5 33
P.46 c 31 No.JXC-OMU0004-A 7.2 (1)3 (1) e e (4) [2] i j 3 LED a LED a i j 7 LED f 3 h O g 3 7 LED 0 LED b LED b g h 32 No.JXC-OMU0004-A (4) h NO( 7 LED f 2)7 LED h h *NO NO. 1 2 3 (5 g 7 LED 7 LED f 1 g h * h 4 7 LED f 6 g 2 7 LED f g 33 No.JXC-OMU0004-A (7) i j e 3) g 2 7 LED g j i * 47 e NO. (*) 1 1CW [CW] 2.
Ry00Ry0F Ry10Ry1F CC-Link () Ry20Ry2F Ry30R3yF CC-Link () Ry40Ry4F Ry50Ry5F Ry60Ry6F Ry70Ry7F CC-Link 32 - [IN]() PLC Rx 00 OUT0 DRIVE OFF No.Bit No.DRIVE ON 01 OUT1 No.3 OUT5 OUT 4 OUT 3 OUT 2 OUT 1 OUT 0 02 OUT2 OFF OFF OFF OFF ON ON 03 OUT3 (1) RESET ON OFF (2) (3) () OFF 04 OUT4 05 OUT5 06 07 ON 08 BUSY () BUSY OFF BUSY ON50ms 09 SVRE OFF OFFON ON 0A SETON SETON()ON OFF 33
Dimensions inside are for rubber seal. 6-1/2, 3/4 1, 3, 5 port 32 (35) 32 (35) 35 35 3-11-9 10 Series EVS7Dimensions EVS7-10-FG-S-M0 1/2, 3/4-5 port 1, 4, 2, 5, 3 port 200 124 124 45 (14 port) 76 39 37 2-8.5 mouting hole 45 (12 port) 5 1 3 22 (4 port) 22 (2 port) 22 12 2 4 14 14 80 26 33 80 95 50 B A 4 2 19 19 5 1 3 1/8-2 port 12, 14 port 47 47 Manual override 8 71 65 2-8.5 mounting hole
Correct the setting value. contradicts another. 8 33 8. TROUBLESHOOTING Alarm No.: 3A Name: Inrush current suppression circuit error Alarm content The inrush current suppression circuit error was detected.
Drain cock with barb fitting B B B B B B Dimensions Barb fitting applicable tubing: T0604 Width across flats 17 1/4 Width across flats 17 1/4 Width across flats 17 1/4 Standard specifications Model P1 P2 A B C E F G J K Bracket mount M N Q1 Q2 R S U V AC10-A M5 x 0.8 1/16 87 59.9 25.5 28 35 12.5 25 31 20 27 4.5 6.8 3 24.5 AC20-B 1/8, 1/4 1/8 126.4 87.6 35.9 41.6 60 28.5 2 1 30 43.2 24 33
Refer to Communication Function of Operation Manual for details. (1) (2) (3) (4) Ethernet communication setting screen Table 5.4-33 Setting of ethernet communication No.
Controller Set Up (P.33) Incorrect parameters The actuator is displaced Check that the Basic Parameter Setup in the controller (Card Motor product number and mounting orientation) are correct.
Aluminum alloy 26 Motor 7 Housing Aluminum alloy 27 Lube-retainer Felt 8 Rotation stopper POM 28 O-ring NBR 9 Socket Free cutting carbon steel Nickel plating 29 Gasket NBR 10 Connected shaft Free cutting carbon steel Nickel plating 30 Motor adapter Aluminum alloy Anodized 11 Bushing Lead bronze cast 31 Motor cover Aluminum alloy Anodized 12 Bumper Urethane 32 Seal connector 13 Bearing 33
Take precautions to avoid incorrect wiring. 16-11-33 30 Series PF2A/PF2W Specific Product Precautions 3 Be sure to read before handling. Maintenance Measured Fluid Warning Warning 1. Perform periodical inspections to ensure proper operation of the switch. Unexpected malfunctions may cause possible danger. 2. Take precautions when using the switch for an interlock circuit.
The recommended bend radius of the lead wire is 6 times the outside diameter of the sheath, or 33 times the outside diameter of the wire insulation material, whichever is larger. Replace any damaged lead wire with a new one. Wire correctly. Incorrect wiring can damage the product. Do not perform wiring while the power is on.