V

s s e m b l y o f the manifold H O W T O O R D E R NZM V A C U U M E J E C T O R M A N I F O L D (N)ZZM B NUMBER OF STATIONS 01 ... 1 Station 02 ... 2 Stations to 10 ... 10 Stations EXHAUST PORT 04 ... 1/2 06 ... 3/4 PORT THREAD Nil ...PT* Remove (N) when ordering T .NPTF Fitted with an Optional Silencer Series NAN: see section Air Preparation Accessories n 1 2 3 4 5 6 7 8 9 10 L1 28 44 60

Series VQ Metal Seal/Rubber Seal Body Ported

Stations 1 station 01 16 VVQ1000FPG066 stations of manifold VQ1000FPGC4M5D, 3 sets VQ1000FPGC6M5D, 3 sets Double check block 16 stations } 1.10-60 Precautions Be sure to read before handling. Refer to p.0-33 to 0-36 for Safety Instructions and common precautions.

Series VQ Base Mounted Metal Seal/Rubber Seal

S Kit (Terminal box) Kit (Lead wire) Kit (Serial transmission unit) Kit (Flat cable with terminal block) Number of pins: 20 1.10-111 Valve Specifications Configuration Voltage Electrical entry Manual override Effective area mm2 (Cv factor) Push-locking slotted style Non-locking push style Push-locking lever style M plug connector L plug connector 12V 24V DC 100V 110V AC 200V 220V AC 50/60

lPSMt

Supply Ambient Temoerature and Temperature of Working Air 14' 140"F (-10 60'C) Range of Angular Adjustment 0"-90' CW or 0o-90o CCW (adjustable range 0'-60" to 0'-95') Port Size 1/4' (all porls) Raw Material of Main Pafts Aluminum Die-cast, Stainless Steel, Brass, Nitrile Rubber Weight 2.2lbs. (1 kgf) Without Gauges Dimension 4.9' x 3.6" x3.2" (25mm x 92mm x 80mm) Withort Gauqe TE Use clean

lPSMt

Supply Ambient Temoerature and Temperature of Working Air 14' 140"F (-10 60'C) Range of Angular Adjustment 0"-90' CW or 0o-90o CCW (adjustable range 0'-60" to 0'-95') Port Size 1/4' (all porls) Raw Material of Main Pafts Aluminum Die-cast, Stainless Steel, Brass, Nitrile Rubber Weight 2.2lbs. (1 kgf) Without Gauges Dimension 4.9' x 3.6" x3.2" (25mm x 92mm x 80mm) Withort Gauqe TE Use clean

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Ambienr rempeErure 10-60"C(14'-140'F) . Proleclion slruclure IEC spec 1P67, WaleFPrcof(Jlscog2o) x fi 114ln lead wire is r6quned, L is pd at rhe end of model number. (Example) D-r7A1L o (.)

Air Pilot Operated

Bumpsr urethane Maxlmum rubber. amblenl tomperature: 14o.F. (60. c,) 'Nole;Thsss pilot pressures apply only to ctan, well lubricatd valves. HOWTO ORDER This modlnumber isa coded numberwhlch descrlbos altavallabl options.

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

Analog voltage 1 to 5 V Analog voltage 1 to 5 V Or IO-Link hub (Commercially available) Process Data Bit offset 79 78 77 76 75 74 73 72 71 70 69 68 67 66 65 64 Item CH11 measured value: 16-bit signed integer Bit offset 63 62 61 60 59 58 57 56 55 54 53 52 51 50 49 48 Measurement data of sensors for 4 channels are combined and cyclically sent as a process data.

MU

MM NC 7.5Depth4.5 9Depth5.5 10.5Depth6.5 13.5Depth8.5 17Depth10.5 NS 43 45 44 54 53 Model MUB25 MUB32 MUB40 MUB50 MUB63 KA 10 12 14 18 18 N 14 15.5 16 21.5 21.5 ND M5 X 0.8 M6 X 1 M8 X 1.25 M10 X 1.5 NE 4.3 5.1 6.9 8.7 10.5 S 55 58 60 74 75 ZZ 69 72 75 92 96 M10 X 1.25 M8 X 1.25Depth13 M12 X 1.25 M14 X 1.5 M18 X 1.5 M18 X 1.5 M8 X 1.25Depth13 M10 X 1.5Depth15 M10 X 1.5Depth15 M12 X 1.75 2.4

4/5 Port Air Operated Valve SYJA3000 Series

1474 4/5 Port Air Operated Valve SYJA3000 Series Specifications Fluid Air 0.15 to 0.7 100 kPa to 0.7 100 kPa to 0.7 2 position single Operating pressure range MPa 2 position double SYA 3 position 2 position single Operating pressure to 0.7 0.1 to 0.7 0.2 to 0.7 Note 1) Pilot pressure range MPa SYJA SYJA 2 position double 3 position Base mounted VZA Ambient and fluid temperature C 10 to 60

TUS Series Soft Polyurethane Flat Tubing Multi-core, Multi-color Specification

60 85 110 With inner sleeve 80 230 250 300 480 KB Note 1) Min. bending radius is measured as shown in the figure below.

VCC

SUS316L Stainless Steel Fitting Specifications Applicable tubing Nylon/Fluoro tubing Fluid Water/Chemical base paint, Ink, Cleaning solvent (Water, Butyl acetate), Air Max. operating pressure (at 20C) (MPa) 1.0 (C) Ambient and fluid temperature 0 to 60 Weight VCC12 (2 port) 37 g Valve VCC13 (3 port) 48 g For 2 port 29 g Blanking plug assembly For 3 port 45 g For 2 port (2 stations, one-piece

Valve Single Unit

(External pilot port) 2-M5 x 0.8 (Lead wire length) (Mounting hole) (Pitch) 2-M5 x 0.8 (Pilot EXH port) Stations (1) (2) (n) (P , EA, EB port) (Pitch) (A, B port) L plug connector (L) M plug connector (M) (Lead wire length) 300 300 (Lead wire length) 104.5 (3 position) 92 (3 position) 2 stations 47.5 39.5 3 60 52 4 72.5 64.5 5 85 77 6 97.5 89.5 7 110

TL/TIL

Max. operating pressure (at 20C) Burst pressure (at 20C) Min. bending radius (mm) Max. operating temperature (Fixed use) Material Note 1) 1 MPa 1 MPa 0.7 MPa 0.9MPa 0.7 MPa 0.6 MPa 0.5 MPa 4.9 MPa 6.9 MPa 4.7 MPa 3.6MPa 2.9 MPa 2.6 MPa 6.4 MPa 9.9 MPa 6.7 MPa 7.9 MPa 6.7 MPa 4.6 MPa 2.8 MPa 2.0 MPa Note 2) 160 290 20 40 65 110 12 20 6 30 60 160 260C Super PFA Note 1) The maximum operating

How to Order MGQ M Cylinder stroke (mm) Refer to “ Standard Stroke ” on page 339. Slide bearing Ball bushing bearing Bearing type M L 12 mm 16 mm 20 mm 25 mm 32 mm Bore size 12 16 20 25 32 40 mm 50 mm 63 mm 80 mm 100 mm 40 50 63 80 100 M9BW 2 pcs. 1 pc. n

51 43 34 IN 26 17 85 MGF 201 181 161 141 121 101 80 0UT 60 40 201 Symbol Specifications 16 8 XA MGZ 151 136 121 106 91 76 60 IN 45 30 151 Change of rod end shape Heat resistant cylinder (10 to 150C) XB6 314 283 251 220 188 157 126 0UT 94 63 314 20 10 MGT XB9 Low speed cylinder (10 to 50 mm/s) 236 212 189 165 142 118 94 IN 71 47 236 XB10 Intermediate stroke (Using exclusive body) 491 442

AZ1000

flow Series AZ1000 For UHP gas delivery High inlet pressure type: Max. 3500 psig (24.1 MPa) Flow capacity Standard: to 30 slpm HF (option): to 120 slpm Body material: 316L SS Hastelloy internals available for corrosion resistance How to Order Port Number q w e r AZ10 S FV4 FV4 01 2PW Delivery pressure Delivery pressure 1 to 10 psig (0.007 to 0.07 MPa) 1 to 30 psig (0.007 to 0.2 MPa) 2 to 60

CLJ2

8 Fine Lock Cylinder Double Acting, Single Rod Series CLJ2 16 How to Order 16 60 R E L CLJ2 Without auto switch 60 R E H7BW L 16 CDLJ2 With auto switch Number of auto switches Built-in magnet Nil S n 2 pcs. 1 pc. n pcs.

Bag Filter FGF Series

Specifications FGF1B-20 FGF3A-40 Note 7) FGF3B-40 Note 7) FGF5A-60 Note 7) FGF5B-60 Note 7) Model FGF1A-20 Operating pressure Operating temperature Maximum flow rate Note 1) Max. 0.5 MPa Max. 80C (For with pressure gauge: 60C or less) Common Approx. 400 L/min Approx. 1200 L/min Approx. 2000 L/min Applicable fluid Note 2) Water-soluble coolant, Weak alkali-based cleaning fluid, Industrial

Thermo-chiller

Thermo-chiller Dual Channel Refrigerated Thermo-chiller for Lasers HRL Series How to Order HRL A 20 100 Power supply Cooling capacity CH1 CH2 100 9 kW 1 kW 200 19 kW 1 kW 300 26 kW 1 kW 20 3-phase 200 VAC (50 Hz) 3-phase 200 to 230 VAC (60 Hz) Pipe thread type Nil Rc F G (with Rc-G conversion tting) N NPT (with Rc-NPT conversion tting) Cooling method A Air-cooled refrigeration Specications

21- AF-A 10- Series Air Filter

Note 2) Drain guide is G1/8 (applicable to size 20), and G1/4 (applicable to size 30 to 60). Note 3) Bracket is not assembled and is supplied loose at the time of shipment. Note 4) Without a valve function. Note 5) For NPT thread type. This product is for overseas use only according to the new Measurement Law. (The SI unit type is provided for use in Japan).