Cylinder Inner Diameter: D(φ): 80, Stroke: L(mm): 80, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -, End Locking: No, Valves: No, Operating Pressure(MPa): 0.05～1, Auto Switches: Without auto switch (built-in magnet), Lead

Cylinder (Tube) Inner Diameter(φ): 80, Stroke(mm): 80, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Pressure(MPa): -, Cushion: Air cushion, Operating Pressure(MPa): 0.05 to 1.0, Specification: Without magnet, Port thread type: Rc, Auto Switches

Cylinder (Tube) Inner Diameter(φ): 80, Stroke(mm): 80, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Pressure(MPa): -, Cushion: Air cushion, Operating Pressure(MPa): 0.05 to 1.0, Specification: Built-in magnet, Port thread type: Rc, Auto Switches

Valve Type: Smooth Exhaust, Normally Closed, Bellows, O-ring Seal, Flange Size: 80, Flange Type: D [K (DN)], Valve Direction: w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface, Auto Switch: M9N--Solid State, Gen.

Valve Type: Smooth Exhaust, Normally Closed, Bellows, O-ring Seal, Flange Size: 80, Flange Type: D [K (DN)], Valve Direction: w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface, Auto Switch: M9N--Solid State, Gen.

Cylinder (Tube) Inner Diameter(φ): 80, Stroke(mm): 80, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -20～70, Operating Pressure(MPa): 0.05～1, Cushion: Air cushions on both sides + with damper cushions, Specification: Without

Cylinder (Tube) Inner Diameter(φ): 80, Stroke(mm): 80, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -20～70, Operating Pressure(MPa): 0.05～1, Cushion: Air cushions on both sides + with damper cushions, Specification: Without

Cylinder (Tube) Inner Diameter(φ): 80, Stroke(mm): 80, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -20～70, Operating Pressure(MPa): 0.05～1, Cushion: Air cushions on both sides + with damper cushions, Specification: Built-in

Cylinder (Tube) Inner Diameter(φ): 80, Stroke(mm): 80, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -20～70, Operating Pressure(MPa): 0.05～1, Cushion: Air cushions on both sides + with damper cushions, Specification: Built-in

Cylinder (Tube) Inner Diameter(φ): 80, Stroke(mm): 80, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -20～70, Operating Pressure(MPa): 0.05～1, Cushion: Air cushions on both sides + with damper cushions, Specification: Built-in

Cylinder (Tube) Inner Diameter(φ): 80, Stroke(mm): 80, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -20～70, Operating Pressure(MPa): 0.05～1, Cushion: Air cushions on both sides + with damper cushions, Specification: Built-in

Cylinder (Tube) Inner Diameter(φ): 80, Stroke(mm): 80, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -20～70, Operating Pressure(MPa): 0.05～1, Cushion: Air cushions on both sides + with damper cushions, Specification: Built-in

Cylinder (Tube) Inner Diameter(φ): 80, Stroke(mm): 80, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -20～70, Operating Pressure(MPa): 0.05～1, Cushion: Air cushions on both sides + with damper cushions, Specification: Without

Cylinder (Tube) Inner Diameter(φ): 80, Stroke(mm): 80, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -20～70, Operating Pressure(MPa): 0.05～1, Cushion: Air cushions on both sides + with damper cushions, Specification: Without

Cylinder (Tube) Inner Diameter(φ): 20, Stroke(mm): 80, Cylinder Operation Method: [Single Action Retraction] Single Acting, Spring Extend, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -20～80, Operating Pressure(MPa): 0.05～1.0, Specification: Without magnet, Support bracket: None,

Cylinder (Tube) Inner Diameter(φ): 25, Stroke(mm): 80, Cylinder Operation Method: Single Acting, Spring Return, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -20～80, Operating Pressure(MPa): 0.05～1.0, Specification: Without magnet, Support bracket: None, Body Options: Boss cut, Auto

Cylinder (Tube) Inner Diameter(φ): 16, Stroke(mm): 80, Cylinder Operation Method: Single Acting, Spring Return, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -20～80, Operating Pressure(MPa): 0.05～1.0, Specification: Without magnet, Support bracket: None, Body Options: Boss cut end

Cylinder (Tube) Inner Diameter(φ): 16, Stroke(mm): 80, Cylinder Operation Method: [Single Action Retraction] Single Acting, Spring Extend, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -20～80, Operating Pressure(MPa): 0.05～1.0, Specification: Built-in magnet, Support bracket: None

Cylinder (Tube) Inner Diameter(φ): 20, Stroke(mm): 80, Cylinder Operation Method: [Single Action Retraction] Single Acting, Spring Extend, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -20～80, Operating Pressure(MPa): 0.05～1.0, Specification: Built-in magnet, Support bracket: None

SMC Pneumatic Clean Series

Ejector Vacuum regulator Outside of clean room Outside of clean room Vacuum pump Duct piping Front matter 10 System Circuit in Clean Room Clean blow system Example of equipment to suit each clean blow grade 100 Line A Particle diameter: 0.1 m or more Valve operating frequency: 0.5Hz Particle generation Particles/min 80 Line A: For oil-free air blow Line B: For clean blow Line C: For clean