HRX-OM-S004

5.21.1 Communication function . 5-70 5.21.2 Setting/checking of communication function . 5-70 Chapter 6 Alarm Notification and Troubleshooting . 6-1 6.1 Alarm Notification . 6-1 6.2 Alarm buzzer stop . 6-3 6.3 Troubleshooting . 6-4 6.3.1 Alarm contents, causes, and troubleshooting. 6-4 6.3.2 How to release the thermal relay trip and circuit protector . 6-8 6.3.3 How to release the pump thermal

7ND9071en

For ambient temperature over 70 C / 158 F use a heat resistant cable and cable gland suitable for at least 90 C / 194 F.

10

75 90 58 110 170 200 50 152 MHL2-16D2Z 90 95 110 78 130 210 240 70 192 J dimension is at fully closed.

CRB2/CRBU2/CRB1

(mm) C2 F2 D1 G C3 A1 A2 B1 B2 B3 C1 D2 E1 E2 F1 R Model (size) CVRB1BW 50 CVRB1BW 63 CVRB1BW 80 CVRB1BW100 120 (136.5) 104 (120.5) 12 25 60 (61) 78 67 18 36 2.8 82.5 24 11.5 30 52 (53) 1/8 102 (136.5) 104 (120.5) 16 27.5 60 (61) 98 82 18 36 2.8 82.5 24 11.5 30 52 (53) 1/8 140 (155) 124 (139) 17 36 70 (71) 110 95 22 48 4 100 29 14 38 62 (63) 1/8 140 (155) 124 (139) 23.5 42.5 70 (71) 140 125

IDG

70 0 0 40 80 120 160 200 100 200 300 Outlet air flow rate (l/min (ANR)) Outlet air flow rate (l/min (ANR)) IDG100L (Type B products group) Refer to pages 14-19-28 to 29.

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 39 39 40 40 41 41 43 45 47 54 54 55 55 56 60 65 68 70 70 71 71 72 77 78 82 84 87 89 91 93 96 97 98 99 99 100 101 102 Series MSUB Rotary Table: Basic Type Vane Style Size: 1, 3, 7, 20 . How to Order . Specifications. Construction. Dimensions .

JA/JAH/JB/JS

70 70 19 25 25 32 32 32 65 65 75 90 90 100 150 0.08 0.12 0.12 0.28 0.28 0.28 0.63 0.63 1.15 2.07 2.07 2.8 9 1100 2500 2500 4400 4400 4400 11000 11000 18000 28000 28000 28000 55000 1 1.5 1 1.25 1.5 1.75 1.5 2 2.5 3 1.5 2 2 0.5 0.5 0.5 0.75 0.75 0.75 1 1 1.25 2 2 2 3 8 10 10 12 12 12 16 16 20 24 27 27 33 32.5 36 36 49 49 49 61.5 61.5 76.5 94 94 106 152 19 20.5 20.5 27 27 27 34.5 34.5 43.5

Compact Cylinder

75 80 85 90 95 100 110 130 150 55 60 65 70 75 80 85 90 95 100 110 130 150 M6 x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 110 l x 130 l x 150 l M5 x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 110 l x 130 l x 150 l 45 50 55 60 65 70 75 80 85 90 M4 x 45 l x 50 l x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l Courtesy of Steven

ARM10/11

Handle position 56 Handle position Top Handle position Bottom Handle position Front A B C Top Front Bottom 84 42 84 70 70 6 P 26(Max.28) U S SMC SMC H L O C 6 K F.R.L. SMC SMC 28.5 AV 6 51.5 80 51.5 AU 13 OUT IN 13 3 28 OUT IN 13 AF OUT IN 3 3 5. Option 4. Accessory 6. Unit representation 2.

JA/JAH/JB/JS

70 70 19 25 25 32 32 32 65 65 75 90 90 100 150 0.08 0.12 0.12 0.28 0.28 0.28 0.63 0.63 1.15 2.07 2.07 2.8 9 1100 2500 2500 4400 4400 4400 11000 11000 18000 28000 28000 28000 55000 1 1.5 1 1.25 1.5 1.75 1.5 2 2.5 3 1.5 2 2 0.5 0.5 0.5 0.75 0.75 0.75 1 1 1.25 2 2 2 3 8 10 10 12 12 12 16 16 20 24 27 27 33 32.5 36 36 49 49 49 61.5 61.5 76.5 94 94 106 152 19 20.5 20.5 27 27 27 34.5 34.5 43.5

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

Bore size (mm) Bore size (mm) FT FY FX E E MM A MA D K G H ZZ MM A MA D K G H ZZ 32 32 34 M16 x 1.5 25 22 18 7 14 55 207 0.2 0.18 0.13 0.025 0.064 40 40 40 36 M20 x 1.5 30 27 22.4 9 19 60 212 M16 x 1.5 25 22 18 7 14 55 207 0.025 0.064 50 50 46 40 M24 x 1.5 35 32 28 11 24 65 233 M20 x 1.5 30 27 22.4 9 19 60 228 0.15 63 63 55 46 M30 x 1.5 45 42 35.5 13 30 80 258 M24 x 1.5 35 32 28 11 24 70

Vacuum

(M) zsE40 (F) rsE40N-70 (LHrr) Wilh ado shitt input With auto shift inpul 91 zsE4o(DnsE4F9i 2-[t3 x 0-5 it]r6ad dep$ 4 . Fo. sla*' FEol use (1P65), ins.t n air tn ino the alnGpherc rele*e porl.

ARM10/11

Handle position 56 Handle position Top Handle position Bottom Handle position Front A B C Top Front Bottom 84 42 84 70 70 6 P 26(Max.28) U S SMC SMC H L O C 6 K F.R.L. SMC SMC 28.5 AV 6 51.5 80 51.5 AU 13 OUT IN 13 3 28 OUT IN 13 AF OUT IN 3 3 5. Option 4. Accessory 6. Unit representation 2.

Series SV

II Air Cylinder Drive Systems Total Stroke Time and Speed at the End Series SV Series SV1000 Applicable bore size: 20, 25, 32, 40 Applicable related components Total stroke time s Solenoid valve Tubing Speed controller Silencer 0.0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 200 CM2 20 50% 70% 10% 30% 150 Stroke mm AS2201F -01-06 AS2200-01 70% 100 50 10% 30% 50% 0 200 CM2 25 150 Stroke mm AS2201F

Vacuum

(M) zsE40 (F) rsE40N-70 (LHrr) Wilh ado shitt input With auto shift inpul 91 zsE4o(DnsE4F9i 2-[t3 x 0-5 it]r6ad dep$ 4 . Fo. sla*' FEol use (1P65), ins.t n air tn ino the alnGpherc rele*e porl.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

70 70 76 LS 95 95 95 101 LS 120 120 120 126 160 185 145 145 151 135 2-LC (Knock pin position) 165.5 190.5 215.5 140.5 LS + Stroke 167.5 192.5 217.5 142.5 ZZ + Stroke 185 210 235 160 Other dimensions are the same as basic style. 6-5-26 27 Series CG1 Air Cylinder: Standard Type Single Acting, Single Rod, Spring Return/Extend With Mounting Bracket Rod side flange style: CG1FN Bore size (

Refrigerated Air Dryers

[C] Correction factor 5 to 45 1.15 50 1.07 55 1 60 0.95 65 0.9 70 0.86 75 0.82 80 0.79 Inlet air temp. [C] Correction factor 5 to 45 1.21 50 1.10 55 1 60 0.87 65 0.76 70 0.74 75 0.72 80 0.70 Inlet air temp. [C] Correction factor 5 to 30 1.3 35 1 40 0.82 45 0.68 50 0.57 Inlet air temp. [C] Correction factor 5 to 30 1.35 35 1.25 40 1 45 0.8 50 0.6 Inlet air temp.

Fluoropolymer Piping Equipment

67.5 37 16 LQ3T6A-R2 1/2" 1" 24.5 22.5 24 64.5 62.5 29 9.5 LQ3T6A-R3 3/8" 1" 22.5 19.5 21 60 57 25 6.4 LQ3T6A-R4 1/4" 1" 17 16 16 50 49 20 4 LQ3T6A-R5 1" 3/4" 30 26 26.5 24 41 32 78 74 70 67.5 49 37 16 LQ3T6A-R6 1" 1/2" 30 26 24.5 22.5 24 64.5 62.5 29 9.5 LQ3T6A-R7 3/4" 3/4" 26.5 24 26.5 24 32 32 70 67.5 70 67.5 37 37 16 LQ3T6A-R9 3/4" 1" 3/4" 26.5 24 32 3/4" 1" 30 26 78 74 49 41 30 26 78

Thermo-chiller/Rack Mount Type

Required ventilation rate [m3/min] Model Heat radiation amount [kW] Differential temp. of 3C between inside Differential temp. of 6C between inside and outside of installation area HRR010-A Approx. 2 40 20 HRR012-A Approx. 2 40 20 HRR018-A Approx. 4 70 40 HRR024-A Approx. 5 90 50 HRR030-A Approx. 6 100 60 HRR050-A Approx. 10 140 70 and outside of installation area Voltage dV dt = Voltage

Series AP500

1.00 (25.4) 5 0.03 Max. 3.32 (84.3) 0 0.00 0 2 4 6 8 10 Flow rate (slpm, N2) 0.82 (20.8) 0.44 (11.2) AP500HF 75 psig (0.52 MPa) 30 psig (0.21 MPa) Inlet pressure: 45 psig (0.31 MPa) 35 0.24 30 0.21 Delivery pressure (MPa) Delivery pressure (psig) A 25 0.17 m1.12 (m28.4) 20 0.14 45 15 0.10 10 0.07 1.00 (25.4) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) 5 0.03 0 0.00 0 10 20 30 40 50 60 70