SMC CORPORATION OF JAPAN

Function Block Programming .2-1 2.1 Types of Blocks and the FBD base . 2-1 2.1.1 Inputs . 2-1 2.1.2 Front Panel Keys . 2-1 2.1.3 System Memory Bits . 2-1 2.1.4 Function Blocks . 2-2 2.1.5 Outputs . 2-2 2.1.6 Function Block Diagram (Fbd) base . 2-2 2.2 Programming Methods for the Alpha Controller . 2-3 2.2.1 Direct Programming . 2-3 2.2.2 AL-PCS/WIN-E Programming Software . 2-3 3.

Fluoropolymer Piping Equipment

Body Needle V seal Lock nut Adjustment handle Insert bushing Nut Collar A 1 2 3 4 5 6 7 8 PFA PCTFE PTFE PVDF PVDF PFA PFA PFA Body class 2 y u y u B Dimensions A (B) (max.S) D H Port A 2 x G SMC (J) SMC C E F K Port B E A B C D E F G H J K S Model 48 60 72 LVN20 LVN30 LVN40 24 30 36 12 18 22 88 110 124 34.5 43 52 6 9 11 4 5 6 14 25 25 20 26 33 18 24 30 2.4 7.5 8.0 940 LQ1/LQ3/LVN/LQHB Series

Hand Valve Series VH

) 2-A +0.3 0 C +0.5 0 4-Rc 1/4, 3/8 4 (B) B 0.1 Max. panel thickness D (mm) A 3.2 3.2 3.2 Model B 40 51 64 C 35 41 51 D 3.5 6 8 VH200 VH300 VH400 3.6-12 Series VH Panel Mounted/Dimensions VH41l-02 to 04 VH41l-06 2 (A) 4 (B) 4 (B) 2 (A) 25 25 3 (R) 1 (P) 3 (R) 1 (P) 107.5 19 l102 102 89 88 4-6.6 4-6.6 88 81 94 148 144 97 97 67 1.5 65 1.5 125 123 105.5 3 (R) 3 (R) 1 (P) 1 (P) 25 17 2

33

HRS PF001 W075 H Table 2 Symbol Accessory Nil None H With handle u Table 1 Symbol Nominal filtration accuracy (m) Replacement element part no. for L125 (individual part) Nil Without element W005 5 EJ202S-005X11 W075 75 EJ202S-075X11 y e 204 R1/2 r i NPT1/2 NPT1/2 NPT1/2 t Mounting view Rc1/2 w q Parts List No.

VNH

-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com V: Female thread for bracket mounting Same as back side 8 locations Main port Bracket U: Long hole for mounting 4 positions Flow indicator for 2 port valve Dimensions (mm) Model Main port 2 Port 2-Rc 2-Rc Pilot port A B C D E F G H I 3 Port 3-Rc 3-Rc 3 8 3 8 Rc 1 8 VNH1 -10A VNH2 -15A VNH3 -20A VNH4

VH Series, 4 Way Hand Valve

(A) 3 (R) 2 VH300/400 5 6 4 3 1 8 7 4 (B) 3 (R) 1 (P) 2 (A) 2 VH600 6 5 4 1 7 1 (P) 2 (A) 4 (B) 2 3 (R) Component parts Material VH200 300 400 Zinc die-casting Aluminum die-casting Description No. / / VH600 Cast iron Cast iron 1 2 Cover Body / Spare parts Seals kit Part No.

AMPSeries

Flow direction Right Down With element service indicator AMP220 Rc NPT AMP320 AMP420 G 2 Exhaust Cleaner for Clean Rooms Series AMP How to Order AMP 2 0 2 03 Optional specifications Body size None Flow direction RightDown With element service indicator Nil R T 2 3 4 1/4 standard 3/8 standard 1/2 standard Element construction Accessories (optional) Nil None 2 2 stage B With bracket

IZ-OMU0031-CN

L(2) ZS-27-01 -7No.IZ*-OMU0031 LCD (OUT1)() (OUT2)() (OUT1)() OUT1ON (OUT2)() OUT2ON LCD 4 ON/OFF ON/OFF -8No.IZ*-OMU0031 (2 m)ZS-28-A (1 )ZS-28-C 0.140.2mm 0.81.0 (M3X5 L(2))ZS-28-B (M3X8 L (2 ))ZS-27-C (M38 L(2))ZS-27-D ZS-27-01 -9No.IZ*-OMU0031 M3X5 L(2) 0.50.7 Nm M3X5L (ZS-28-B) M3X5L M3X8 L(2 ) M3X8L ( ZS-27-01) (ZS-27-C) 90 2 -10No.IZ*-OMU0031 ,FG 20mm () SMC 3M

SGC200-OMJ0004

4) 4) , , , , 1)-10-20 2) 1) 1) 1) 1) 50mm 2/s 2) 2) 2) 2) 3) 3) 3) 3) 4) 5), 6) 4 SGC200*-OMJ0004-A SGC/SGH Series SGC/SGH Series SGC/SGH Series SGC/SGH Series 2 2 2 2 / / / / Nm Rc1/8 79 Rc1/4 1214 Rc3/8 2224 Rc1/2 2830 Rc3/4 4550 Rc1 6570 , , , , 1.5~2 1) 2) 3) 2 5 SGC200*-OMJ0004-A SGC/SGH Series SGC/SGH Series SGC/SGH Series SGC/SGH Series 2 2 2 2 / / / / 30 1 1) 2)1 0.1MPa

Gun Type Ionizer

Refer to the AC adapter image below under Accessories. *2 The AC cord has a rated voltage of 125 V.

VEX-OMV0001

VK300-82-2-07 DC6V 6V VK300-82-4-51 () VEX1300-03 DC12V 12V VK300-82-4-06 G36-4-01 DC24V 24VD VK300-82-3-05 DC48V 48VD VK300-82-3-53 2 AC DC24V DC12V VEX1-11-2 DIN LED NL: LED (VEX110112011301 ) D R R R () (3.57) IP65() 7 VEX-OMV0001 VEX1 Series DIN (VEX110112011301 ) (VEX150117011901 ) 1) (G) DIN (D) () 2) 3) 4) 1) 2) 1)0.5Nm15% 2)68mm 3)Y (+) 1) (-) () 2) 3) 1)0.5Nm20%

PF2A7H.eng

To obtain more detailed information about operating this product, please refer to the SMC website (URL http://www.smcworld.com) or contact SMC directly. 2 Analogue output [F_0] Port size D 50% of max. rated flow Input of Set point 2 3 DC(-) FLOW SWITCH Input of hysteresis 2 [ 0] / 4 OUT1 [oU1_n] Reverse output Selection of switch operation Restrictor D x 8 times Item Description [ UnL] Unlocked

0.4

Manifold base recommended dimensions Lead wire Base mounting hole 1 (IN) 2 (OUT) 1 (IN) 9.5 or more Valve mounting pitch 2 (OUT) A A M3 x 0.5 Thread depth 5 2 (OUT) port 1 (IN) port 3 M3 x 0.5 Thread depth 5 Electrical entry can be on the either side, right or left. 2 (OUT) port 3 11 11 40 Sectional view A-A (2:1) 4 4 46 or more RZ12.5 1 (IN) port 510 High Speed 2 Port Valve SX10 Series Control

PF2x7.eng

Accumulation stop Accumulation starts Unlock Lock SET Restrictor D x 8 times 2 sec. or longer U P + DOWN DOWN 1: Operate only the product with unit selction function (Model indication: without M). 2: Operate only the PF2A7 series. 3: Depend on the setting of switch operation in initialize mode. 4: Displayed in turn. : This drawing is the model of PF2A710/750.

1

In the case of a switch with 2 outputs, the Output 2 is using calibration points P3 and P4. Reversal Mode reverses above operation. Window Comparator Mode can be applied in situations where the supply pressure has to be within a certain range. Vacuum L = Effective area H = Fixed hysteresis (2% F .S.)

Air cooled Thermo-con (Compact type)

SMC Corporation R&D Center Product Development Division-6 Address: 4-2-2, KINUNODAI,TSUKUBAMIRAI-CITY , IBARAKI-KEN 300-2493, JAPAN Phone:+81-297-52-6 Fax:+81-297-20-5007 E-mail:kaihatsu_6_g3@smcjpn.co.jp Notice: The content of this manual can be revised without a previous notice. ii HEF002-A6 Contents Contents 1 PREPARATION FOR COMMUNICATION -1-1 2 OPTIONS OF COMMUNICATION METHOD -2-1 2.1

Uniaxial Electric Actuator Series LJ1

1 2 Figure 2.

2.0

Proper tightening torque: 0.25 to 0.35 Nm 19.5 L1 7.45 L2 26.8 20.3 D 19.5 Recommended panel hole dimensions for valve mounting 2 x M3 x 0.5 Thread length 4 Proper tightening torque for mounting: 0.4 to 0.6 Nm 17 20 14 0.1 14 17 0.1 2 x 3.2 Inscribed number 3, 4, 6 (Refer to How to Order.)

VHS

with a warning tag. 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 Body size 2 3 4 5 1/8 3/8 1/2 1 SMC Interface part is required if attached to a modular FRL.

MR Unit (Regulator with Mist Separator) AMR3000 to 6000 Series

Outlet pressure (MPa) Outlet pressure (MPa) Set point Set point Flow rate (L/min (ANR)) Inlet pressure (MPa) 688 Regulator with Mist Separator AMR3000 to 6000 Series Dimensions AMR4000/5000/6000 M N H ARJ E AR425 to 935 G D ARX F 2 x V 2 x V AMR AMR AMR3000 R A Compact pressure switch ARM (Option) S Bracket ARP Adapter assembly (Option) T IR-A B J B L P C K PT elbow IR 2 x U IRV VEX SRH SRP