Slide Unit Series CX2/CXWM/CXWL D-X Individual -X 475 Series CXWM Construction: 10, 16, 25 CXWM10 With end lock CXWM16, 25 16/With end lock 25/With end lock Slide Unit: Built-in Shock Absorber Slide Bearing Type Series CXWM Construction: 10, 16, 25 Component Parts: With End Lock No. 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 Component Parts No. 1 2 3 4 5 6 7 Note Description Description Material Material Aluminum alloy
The recommended bend radius of the lead wire is 6 times the outside diameter of the sheath, or 33 times the outside diameter of the insulation material, whichever is larger. Replace the damaged lead wire with a new one. Wire correctly. Incorrect wiring can break the Pressure switch. Do not perform wiring while the power is on.
Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K
D-X Individual -X 475 Series CXWM Construction: 10, 16, 25 CXWM10 With end lock CXWM16, 25 16/With end lock 25/With end lock Slide Unit: Built-in Shock Absorber Slide Bearing Type Series CXWM Construction: 10, 16, 25 Component Parts: With End Lock No. 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 Component Parts No. 1 2 3 4 5 6 7 Note Description Description Material Material Aluminum alloy
Wiring and Connection . 33 .. Connection to input power supply . 33 .. Connection to PC . 38 .. Connection to PLCs, etc . 38 . Power ON alarm (error) . 40 . Setup of the operation parameters . 40 . Test run . 41 Operation . 42 . Operation flow . 42 . Procedure for power set up. 43 .. Procedure for power start up . 43 .. Power Supply Startup. 43 . Operation Instructions . 45 ..
Nitrile Seals EP Seals Fluorocarbon Seals Size Kit Number Size Kit Number Size Kit Number -4/-6 RK-4/6N -4/-6 RK-4/6E -4/-6 RK-4/6V -8/-10 RK-8N -8/-10 RK-8E -8/-10 RK-8V -12 RK-12N -12 RK-12E -12 RK-12V -16 RK-16N -16 RK-16E -16 RK-16V D Swivels Quick Coupling Division 8145 Lewis Road Minneapolis, MN 55427 www.parker.com/quickcouplings D-33
Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-40-2 65 171 66 39 11 55 41 67 29 XLC-50-2 70 181 79 31 11 75 52 76 29 9 XLC-63-2 88 206 100 39 11 87 95 70 77 33
Size Inch Size Model Model M1 d D1 D2 D3 L1 L2 L3 L4 d D1 D2 D3 L1 L2 L3 L4 M1 AS1001F-01T 1/8" 11.4 9.3 8.4 70.8 64.4 59 59.8 54.4 52.2 52.2 50 40.7 40.7 48.7 39.2 38 5.2 4.5 26.6 26 AS1001F-23T 3.2 20.9 18.5 20.9 18.5 15.2 12.8 15.2 12.8 11.6 9.3 11.6 9.3 8.4 76 71.6 64.4 59 59.8 53.2 44.8 40.7 40.7 39.2 38 9.8 8.2 7.4 8.1 6.7 6.3 5.2 6.2 5.2 4.5 56.4 55.4 48.5 47.3 45.8 45 36.5 35.2 33
LED display.32 10. 1 LED display.32 10. 2 Controller IF communication status and LED display.33 11. Mode.34 11. 1 Outline.34 11. 2. Step data input mode .34 11. 3. Numerical data input mode.34 11. 4. Data writing mode.36 12.
LED display.32 10. 1 LED display.32 10. 2 Controller IF communication status and LED display.33 11. Mode.34 11. 1 Outline.34 11. 2. Step data input mode .34 11. 3. Numerical data input mode.34 11. 4. Data writing mode.36 12.
Electric actuators / Guide rod Slider Common precautions . 32 6.1 Design and selection . 32 6.2 Handling . 32 6.3 Mounting . 33 6.4 Precaution on maintenance . 34 7. Troubleshooting . 35 LEL Series / Guide rod Slider Safety Instructions These safety instructions are intended to prevent hazardous situations and /or equipment damage.
The recommended bend radius of the lead wire is 6 times the outside diameter of the sheath, or 33 times the outside diameter of the insulation material, whichever is larger. Replace the damaged lead wire with a new one. Wire correctly. Incorrect wiring can break the Pressure switch. Do not perform wiring while the power is on.
Shock absorber Steel ball Chromate (25) Bearing steel Carbon tool steel Hard steel wire Stainless steel Stainless steel Piston 6 C type snap ring for hole Nickel plated (15) (10, 25) Electroless nickel plated (10, 15) (Only for 25) Piston nut 7 8 C type snap ring for shaft Snap ring 29 Shaft Zinc chromated (15, 25) Zinc chromated (10) Zinc chromated (15, 25) Zinc chromated (10) 30 31 32 33
Compressed air inlet Rc 3/8 Inspection grill G Ventilation air inlet Ventilation direction C F [100VAC specification] Power cord (900) J H L Drain tube N M K [200 to 240VAC specification] Power cord outlet [200 to 240VAC specification] Terminal block N M L H J K G F E D C B Port size A Model 36 247 74 59 395 198 38 132 34 328 200 IDF1D Rc 3/8 138 232 125 51 410 217 24 150 38 328 226 IDF2D 103 33
.: 3.5 to 7 (Lead wire length) 300 300 (Lead wire length) : With light/surge voltage suppressor 4-6-32 33 3 Port Solenoid Valve Rubber Seal, Body Ported/Base Mounted Series VZ500 Base Mounted (With sub-plate) Grommet (G), (H) VZ54G H 01 02 V100 SY SYJ VK X port External pilot port (Mounting hole) Manual override (Non-locking) VZ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San
P reduced pressure ARB350-00-P A B A B A reduced pressure ARB350-00-A B reduced pressure ARB350-00-B 3-10-32 33 ISO Standard Solenoid Valve: Size 2 Metal Seal/Rubber Seal Series VQ7-8 Manifold Option Parts Main EXH back pressure check plate AXT512-25A Interface regulator ARB350-00P A B Interface regulator Main EXH back pressure check plate (AXT512-25A) 282 ARB350-00P A B 146 VK VZ SMC SMC
outputs 100 to 100 kPa/NPN open collector 1 output + analog voltage 100 to 100 kPa/PNP open collector 1 output + analog voltage Specification ZQ1-ZSEA--A ZQ1-ZSEB--A ZQ1-ZSEC--A ZQ1-ZSEE--A ZQ1-ZSFA--A ZQ1-ZSFB--A ZQ1-ZSFC--A ZQ1-ZSFE--A 6 Series ZQ Dimensions Type K1 ZQ1 1U-K1 5 6 23 32 17.6 13.1 4 x 3.5 Mounting hole Vacuum release flow adjusting needle (With L-type plug connector) 25 33
Bore size (mm) 80 NLP-80A PDU-25Z PSD-33 x 25 P75 DSM-30 CA80-1609 CA80-1604 P5 Description Material No. 40 NLP-40A PDU-16Z PSD-22 x 16 P44 DSM-20 CA40-1606 CA40-1601 P3 50 NLP-50A PDU-20Z PSD-27 x 20 P50 DSM-25 CA63-1608 CA50-1602 P3 63 NLP-63A PDU-20Z PSD-27 x 20 P60 DSM-25 CA63-1608 CA63-1603 P3 100 NLP-100A PDU-30Z PSD-38 x 30 P90 DSM-35 CA100-1610 CA100-1605 P5 Piston seal Rod seal A
+ Stroke A + Stroke CE1 CE2 Rod end male thread ML2B H1 C J G5-S Auto switch D-A9, F9 CV MVGQ Rod end nut C1 X L1 CC RB Rod End Male Thread (mm) Bore size (mm) C1 X H1 L1 J 32 20.5 23.5 28.5 M14 x 1.5 D40 20.5 23.5 28.5 M14 x 1.5 50 26 28.5 33.5 M18 x 1.5 -X (mm) Without auto switch With auto switch A B A B 20U Z Bore size (mm) Stroke range (mm) C D E F H I J K L M N O P Q S 5 to 50 40 33
Applicable model A B C D E F G H J K L t AS-10L ZH05/07/10DA 11 14.8 18.3 3.4 27.5 19.5 3.4 4.9 7.3 12 14 1 AS-25L ZH13/15DA 17 19.6 24.6 4.5 38 28 4.5 6.5 9.5 15.5 20 1.2 AS-30L ZH18/20DA 22 24.8 29.8 43 33 22 1.4 230 Body Ported Type Vacuum Ejector ZH Series Body Ported: ZH05D A--to ZH20D A--S L S L DIN rail mounting bracket (Bracket on a single side) ZH05 to 10DA ZK2 H J E F ZQ ZR G ZB