CV/MVGQ

Leakage Voltage Caution 0.2 to 0.33 mm2 Max. cover O.D. : 1.7mm Be aware that there is an increase in the leakage voltage particularly if a C-R element (surge voltage protector) is used for protecting the switching element, because the leakage current flows through the C-R element. w Crimping the lead wire into the socket OPeel approximately 3.2 to 3.7mm of insulation from the tip of the

Related Products: Heavy Duty Auto Drain Series ADH4000 1

Accessory C is available only with Rc thread.

Guide Table Series MGF ø40, ø63, ø100 1

3 Hard anodized Nickel plated Tube Hexagon socket head cap screw C Carbon steel Aluminum alloy w !4 20Clear anodized Rod cover Magnet Magnetic material Aluminum alloy e !5 Chromated Piston Plug Carbon steel Aluminum alloy r !6 Data Electroless nickel plated Piston rod Element Resin Carbon steel t !7 Anodized Plate Snap ring Spring steel Aluminum alloy y !

ITV2-OM00118_(PR-E)

ITV2-OM00118-A P R O D U C T N A M E E/P Regulator (PROFIBUS DP type) MODEL/ Series/ Product Number ITV1000/2000/3000/2090-PR* Series Install and operate the product only after reading the Operation Manual carefully and understanding its contents. Specifically, read the safety instructions carefully. Keep this operation manual available whenever necessary.

RS-232C-E

ITV2-OM00116 P R O D U C T N A M E E/P Regulator (For RS-232C) MODEL/ Series/ Product Number ITV1000/2000/3000/2090-RC* Series Install and operate the product only after reading the Operation Manual carefully and understanding its contents. Specifically, read the safety instructions carefully. Keep this operation manual available whenever necessary.

ITV2-OM00114

ITV2-OM00114-B P R O D U C T N A M E E/P Regulator (CC-Link type) MODEL/ Series/ Product Number ITV1000/2000/3000/2090-CC* Series Install and operate the product only after reading the Operation Manual carefully and understanding its contents. Specifically, read the safety instructions carefully. Keep this operation manual available whenever necessary.

3 Port Direct Operated Solenoid Valve Rubber Seal Series SY100 For details about certified products conforming to international standards, visit us at www.smcworld.com.

SY1 4, SY1 4A only 1 2 1 2 4-3-6 Series SY100 Construction SY114, SY114A (A) 2 3 (R) i q y e r w V100 SY SYJ VK VZ VT VP A R P !1 o u t !0 VG VP S070 VQ VKF Part no. Material Replacement Parts Material Note Component Parts VQZ No. q w e r t y No. !0 !

Clamp Cylinder Series CK1

9 @0 t q @2 w @3 e @4 @1 !5 !4 !6 y !7 !0 i u !8 MK CKQ CLKQ o CK1 !3 CLK2 !1 !2 @1 @4 Component Parts No.

E/P Pressure Regulator

Noblesville, IN 46060 (800) SMC.SMC1 (762 7621) www.smcusa.com e-mail: sales@smcusa.com For International inquires: www.smcworld.com SMC Pneumatics (Canada) Ltd. www.smcpneumatics.ca All reasonable efforts to ensure the accuracy of the information detailed in this flyer were made at the time of publishing.

Rotary Actuator Vane Type CRB2 Series Size: 10, 15, 20, 30, 40

Rotary Actuator Vane Type CRB2 Series Size: 10, 15, 20, 30, 40 RoHS How to Order B S E 20 180 S Z CRB2 u Z L M9B CDRB2 B W 20 180 S With auto switch q r e !1 i o !

IR1000-A/2000-A/3000-A

Precision Regulator IR1000-A/2000-A/3000-A Series How to Order 0 0 0 IR 1 01 BG r t y u e w q A ARJ Option/Semi-standard: Select one each for a to e. Option/Semi-standard symbol: When more than one specication is required, indicate in alphanumeric order.

IR1200-A/2200-A/3200-A

Regulator IR1200-A/2200-A/3200-A Series How to Order 0 2 0 IR 1 01 BG r t y u e w q A ARJ Option/Semi-standard: Select one each for a to e. Option/Semi-standard symbol: When more than one specication is required, indicate in alphanumeric order.

KFx-OM00002

Caution (1) Be certain to wear safety glasses at all times during periodical inspections. (2) During regular maintenance, check for the following and replace any components as necessary. a) Scratches, gouges, abrasion, corrosion b) Leakage c) Flattening or distortion of tubing d) Hardening, deterioration or softness of tubing e) Loosening of the union nut (3) Do not repair the fittings or

30

thread depth P Model Nominal size Pitch Allowable eccentricity U Maximum operating tensile and compressive force N Center of sphere R M A B D E F G H Weight kg JC20-8-125 JC30-10-125 JC40-14-150 JC63-18-150 30.5 34 38 47.5 0.03 0.05 0.12 0.23 300 800 1250 3100 13 17 22 27 8 9 13 15 0.5 0.5 0.75 1 7 8 11 13.5 21 24 31 41 4.5 5 6 7.5 7 8 11 14 17.5 19.5 20 25 8 10 14 18 1.25 1.25 1.5 1.5 44

Unit Manifold Valve

Positioning hole Positioning hole Caution e One-touch fitting Tightening torque: 0.12 Nm q Unit Assembly Part No. r Bracket Assembly Part No. 00 VV061 08 5 H Description Part no.

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Sft{; ~RE E S ITt -380 Non-corrosive stainless steel is used for diaphragm (SUS630) and fitting (SUS304) . ~Hg ~ PRESSURE SWITCH rt3 , Po Atmospheric pressure detection and vacuum pressure measurement for load lock chamber in semiconductor production equipme~ nt ~ .

MXH

3 @4 e !5 !1 r u @2 @3 !3 @4 e !2 MXH16/20 (16, 20) @0 y @1 !7 w q!9 t !8 i !0 !1 r u @2 @3 !3 @4 e !2 Component Parts Description Material Note Description Material No. q w No. !2 !3 !4 !5 !

Unit Size: 7 (75mm), Cup Flange Shape: A (42mm x 42mm), Manufacturer: 01 [UR: 3(e), 5(e), 10(e), 16(e)], Cup Series: ZP (Basic), Cup Diameter: 25 (ø25), Cup Form: C (Flat with Rib), Cup Material: N (NBR), Attachment: with (Guide) Attachment

Unit Size: 7 (75mm), Cup Flange Shape: A (42mm x 42mm), Manufacturer: 01 [UR: 3(e), 5(e), 10(e), 16(e)], Cup Series: ZP (Basic), Cup Diameter: 20 (ø20), Cup Form: C (Flat with Rib), Cup Material: N (NBR), Attachment: with (Guide) Attachment

Unit Size: 7 (75mm), Cup Flange Shape: A (42mm x 42mm), Manufacturer: 01 [UR: 3(e), 5(e), 10(e), 16(e)], Cup Series: ZP (Basic), Cup Diameter: 25 (ø25), Cup Form: C (Flat with Rib), Cup Material: U (Urethane Rubber), Attachment: with (Guide) Attachment