1% F.S.30 msAir/Inert gas0 to 50C (With no condensation)0.88 MPa0.05 MPa to supply pressureSet pressure to 0.88 MPa (VY1 01)1 to 5 VDC, 0 to 10 VDC, 4 to 20 mA DC, 0 to 20 mA DC12 VDC ? 10%, 24 VDC ? 10%, 1.8 W or lessDIN terminalCable O.D. ?

Angular Style Air Gripper Standard Type Series MHC2 Size: 10, 16, 20, 25 2

Model Bore size (mm) Gripping moment (Nm) (Effective value) (1) Opening/closing angle (Both sides) Weight (2) (g) Action Model MHC2-10D MHC2-16D MHC2-20D MHC2-25D 39 91 180 311 0.10 0.39 0.70 1.36 10 16 20 25 30 to 10 Double acting MHC2-10S MHC2-16S MHC2-20S MHC2-25S 0.070 0.31 0.54 1.08 39 92 183 316 10 16 20 25 MHC2-16S 30 to 10 Single acting Note 1) At the pressure of 0.5 MPa.

How to Order ø 6, ø 8, ø 12, ø 16, ø 20, ø 25 MXQ  A Series Air Slide Table Double-ported Type

buffer, axial piping 6 Centralized adjuster 7 Centralized adjuster (Symmetric) 8 Buffer, Centralized adjuster 9 Buffer, Centralized adjuster (Symmetric) Nil 2 S 1 n n Port Switch mounting groove Port Switch mounting groove 8 10, 20, 30, 40, 50, 75 12 10, 20, 30, 40, 50, 75, 100 For details, refer to the next page. i Made to order 16 10, 20, 30, 40, 50, 75, 100, 125 Port Switch mounting groove

Wide Type Parallel Style Air Gripper ø 10, ø 16, ø 20, ø 25 MHL2 Series

Wide Type Parallel Style Air Gripper 10, 16, 20, 25 MHL2 Series How to Order M9BW 16 2 MHL D Z Wide type Made to order Refer to page 4 for details. Number of auto switches Number of ngers 2 2 Nil 2 S 1 n n Bore size 10 10 mm 16 16 mm 20 20 mm 25 25 mm Auto switch Nil Without auto switch (Built-in magnet) For applicable auto switches, refer to the table below.

Switches Solid State Switch Connection and Examples

Applicable actuator Terminal arrangement 1 Brown + Vcc 1 L 2 White 2 Sensor 3 Black OUTPUT 3 4 Blue GND (OV) 4 Normally ON when light is blocked.

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

VCHR 12 2 1 2 1 2 1 1 ITV 2 1 2 1 2 1 2 1 2 1 L 2 2 1 L L L IC AFM AF ARP AFM AF ARP 10 ITVX c Control a clamping force by precise pressure control. d Release residual pressure with the backflow function. Residual pressure circuit Also exhausts residual pressure completely. Sensitivity within 0.2% F.S. allows more precise pressure adjustment. Repeatability within 1% F.S.

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

SRF 12 2 1 2 1 2 1 1 ITV 2 1 2 1 2 1 2 1 2 1 L 2 2 1 L L L IC AFM AF ARP AFM AF ARP 10 ITVH c Control a clamping force by precise pressure control. d Release residual pressure with the backflow function. Residual pressure circuit Also exhausts residual pressure completely. Sensitivity within 0.2% F.S. allows more precise pressure adjustment. Repeatability within 1% F.S.

VQZ Series

By changing the port plug into a fitting, it can be used as the 5 port single solenoid valves, too. 1 2 3 1 2 3 0 1 0 0 0 0 1 1 1 1 1 1 1 1 1 1 1 1 0 0 0 0 2 2 2 2 0 0 0 0 2 2 2 2 Base Mounted VQZ 85 ,N.C./VQZ 95 ,N.O. 1 1 1 1 3 3 3 3 1 1 1 1 3 3 3 3 3 port valves have the same external appearance as the 5 port valves.

JSXFA

Series JSXFA Pulse Valve Valve for Dust Collector RoHS How to Order JSXFA B 06 R E 1 Compression tting type Direct piping type IN/OUT port size Piping Thread type E Compression tting type1 F Direct piping type 06 3/4 (20A) 10 1 (25A) 14 1 1/2 (40A) R Rc N NPT F G 1 Seals and washers are included.

ZU

Matching the Ejector to the Vacuum Circuit Caution For precautions associated with matching the ejector to the vacuum circuit, refer to the technical data on page 13-1-10 to 13-1-19.

Smooth Cylinder Series CQSY ø 12, ø 16, ø 20, ø 25

Operating pressure (MPa) Bore size (mm) Operating direction Rod size (mm) Piston area (mm2) 0.3 0.5 0.7 12 16 20 25 CQSY12-PS Piston seal 1 pc. Rod seal 1 pc. Tube gasket 1 pc.

In-line Air Filter ZFC Series

Metric size 2 3.2 3.2 4 4 6 6 8 10 12 Inch size 1/8" 1/8" 5/32" 5/32" 1/4" 1/4" 5/16" 3/8" 0.8 Fluid Air, Nitrogen 0.6 Operating pressure 100 kPa to 1.0 MPa (at 20C) Flow rate (Positive pressure) [L/min] *1 15 45 50 80 100 200 250 450 550 650 0.4 Flow rate (Vacuum pressure) [L/min] 2 5 7 10 10 20 30 70 80 100 0.2 Proof pressure [MPa] 1.5 (at 20C) Operating and ambient temperature range

Activated Carbon Filter

AMK20 AMK30 AMK40 Port size 1/8, 1/4 1/4, 3/8 1/43/8, 1/2 Fluid Air Ambient and o fluid temperature -5 to 60 oC (No freezing) Proof pressure 1. 5MPa Max. operating pressure 1. 0MPa Min. operating pressure 0.05MPa Outlet side oil concentration Note1) Max. 0.003mg/m3(0.0025ppm) Compressed air purity class Note 2) ISO8573-1: 2010[1: 4: 1] Note 3) Max. flow capacity Note 4) 300 L/min (ANR) 750L

VQC5000Series

Tightening torque (Nm) Wrench tightening angle after tightened by hand (deg) Warning Uni thread size 1/8 30 to 60 3 to 5 1/4 30 to 60 8 to 12 3/8 15 to 45 14 to 16 1/2 15 to 30 20 to 22 Connection Female Thread : G Wrench tightening angle after tightened by hand (deg) Tightening torque (Nm) Uni thread size 1/8 30 to 45 3 to 4 1/4 15 to 30 4 to 5 3/8 15 to 30 8 to 9 1/2 15 to 30 14 to 15 2

Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series

) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 DNil A B C Sealmaterial XSA 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Symbol Nil N1 Seal material FKM EPDM Barrel Perfluoro Compound no. 1349-80 2101-80 1.3 x 10-10 (FKM) XVD Note 1) Values at ambient temperatures, excluding gas permeation.

Compact Slide ø 6, ø 10, ø 16, ø 20 MXH Series

Compact Slide 6, 10, 16, 20 MXH Series RoHS MXH MXH How to Order MXS MXQ 10 M9BW MXH Z 60 MXQ MXF Made to Order Refer to page 20 for details. Compact Slide MXW Bore size Number of auto switches MXJ 6 mm 10 mm 16 mm 20 mm 6 10 16 20 Nil S 2 pcs. 1 pc. MXP MXY Auto switch MTS Without auto switch (Built-in magnet) Nil For applicable auto switch model, refer to the table below.

3 Port Solenoid Valve

(PE) port of the solenoid valve is significantly restricted or blocked, the valve operation may become abnormal. 1/4 8 to 12 3/8 15 to 20 1/2 20 to 25 3/4 28 to 30 Mounting 1 36 to 38 1. Operation manual 1 1/4 40 to 42 1 1/2 48 to 50 2 48 to 50 Install the products and operate them only after reading the operation manual carefully and understanding its contents.

Hand Valve Series VH

SlA 1 (P) 3 (R) l102 102 88 89 VlA SlA 4-6.6 4-6.6 VlA 81 88 94 VM/VR 144 144 97 97 VH 125 123 107.5 105.5 1 (P) 3 (R) 1 (P) 3 (R) 17 25 19 2 4-Rc1/4, 3/8, 1/2 4-Rc3/4 VH42l-06 (Bottom piping) VH42l-02 to 04 (Bottom piping) 2 (A) 2 (A) 46 54 1 (P) 3 (R) 1 (P) 3 (R) 4 (B) 4 (B) 4-Rc3/4 4-Rc1/4, 3/8, 1/2 3.6-10 Series VH Body Mounted/Dimensions VH600-06/10 2 (A) 4 (B) 1 (P) l152 132 4-11

EXxx-OMC0002

Node address SW1 SW2 SW3 SW4 Node address SW1 SW2 SW3 SW4 0 0 0 0 0 8 0 0 0 1 1 1 0 0 0 9 1 0 0 1 2 0 1 0 0 10 0 1 0 1 3 1 1 0 0 11 1 1 0 1 4 0 0 1 0 12 0 0 1 1 5 1 0 1 0 13 1 0 1 1 6 0 1 1 0 14 0 1 1 1 7 1 1 1 0 15 1 1 1 1 0: OFF 1: ON Set the node address so that it does not duplicate the node address of other slaves.

Air cylinder

Prior to the shipment of a SMC product to another country, assure that all local rules governing that export are known and followed. -3- 1. Specifications 1-1 Specifications Fluid Air Proof pressure 1.5 MPa Max. operating pressure 1.0 Mpa Min. operating pressure 0.05Mpa -10 to +70 oC.